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US5403786A
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Semiconductor device and method for fabricating the same
Assignee: Panasonic Holdings Corp
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Filing: 1994-05-31
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Granted: 1995-04-04
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Expires: 2014-05-31
Abstract
Abstract Disclosed are a semiconductor device possessing an insulating film which is a silicon oxide film containing nitrogen formed on a semiconductor substrate, with the hydrogen concentration ([H]) in this oxide film satisfying the condition of ##EQU1## where m≃2.0±0.4, n≃2.5±0.5 k≃2.0±0.4 (at. %) -2 [H ox ]: hydrogen concentration in an ordinary thermally grown silicon oxide film [N]: concentration of nitrogen contained in the interface of oxide film and substrate; and a method for fabricating a semiconductor device comprising the steps of forming a nitrided oxide silicon film by nitrizing a thermally grown silicon oxide film formed on a semiconductor substrate in a nitrizing atmosphere by using a rapid heating furnace, reannealing it in an oxidizing or inert gas atmosphere by using a rapid heating furnace to form a reannealed nitrided oxide insulating film, and forming a gate electrode.
Inventors
- 👤 Takashi Hori
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 23:01
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/65; H10P14/6516; H10P14/6518; H10P14/6524; H10P14/6526; H10D; H10D64/00; H10D64/01; H10D64/013; H10D64/01302; H10D64/01332; H10D64/01336; H10D64/0134; H10D64/01344; H10D64/60; H10D64/66; H10D64/68; H10D64/693; H10P14/6529; H10P14/6536; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; H10P14/6927; H10P95/00; H10P95/94; H10P14/63; H10P14/6302; H10P14/6304; H10P14/6306; H10P14/6308; H10P14/6309; H10P14/69215
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
260 words
A method for fabricating a semiconductor device comprising the steps of: a) thermally growing a silicon oxide film containing hydrogen on a semiconductor substrate, b) forming a nitrided oxide film containing hydrogen by performing a light nitridation of said thermal silicon oxide film in a nitridizing atmosphere, whereby the concentration of nitrogen contained at the interface of said nitrided oxide film and the substrate is less than or equal to about 5 atomic % and hydrogen is introduced into said nitrided oxide film so that the hydrogen concentration of the nitrided oxide film is at a higher level than that of said thermal oxide film, c) forming an annealed nitrided oxide film by annealing said nitrided oxide film at an elevated temperature so that the hydrogen concentration of said nitrided oxide film formed in step b) is reduced to about the same level or lower than that in said thermal silicon oxide film of step a) and d) forming a gate electrode on said nitrided oxide film, wherein light nitridation in step b) is performed under a furnace time and temperature such that the concentration of hydrogen introduced in said nitrided oxide film can remain low so that the heat treatment time in step c) at a given temperature does not exceed an allowable time for fabrication of semiconductor devices without significant impurity redistribution, but is sufficient to reduce the hydrogen concentration introduced in said nitrided oxide film in step b) to about the same level or lower than as that in said thermal silicon oxide film of step a).
Claim 2
Independent Claim
260 words
A method for fabricating a semiconductor device comprising the steps of: a) thermally growing a silicon oxide film containing hydrogen on a semiconductor substrate, b) forming a nitrided oxide film containing hydrogen by performing a light nitridation of said thermal silicon oxide film in a nitridizing atmosphere, whereby the concentration of nitrogen contained at the interface of said nitrided oxide film and the substrate is less than or equal to about 5 atomic % and hydrogen is introduced into said nitrided oxide film so that the hydrogen concentration of the nitrided oxide film is at a higher level than that of said thermal oxide film, c) forming an annealed nitrided oxide film by annealing said nitrided oxide film at an elevated temperature so that the hydrogen concentration of said nitrided oxide film formed in step b) is reduced to about the same level or lower than that in said thermal silicon oxide film of step a) and d) forming a gate electrode on said nitrided oxide film, wherein light nitridation in step b) is performed under a furnace time and temperature such that the concentration of hydrogen introduced in said nitrided oxide film can remain low so that the heat treatment time in step c) at a given temperature does not exceed an allowable time for fabrication of semiconductor devices without significant impurity redistribution, but is sufficient to reduce the hydrogen concentration introduced in said nitrided oxide film in step b) to about the same level or lower than as that in said thermal silicon oxide film of step a).
Claim 3
Dependent Claim
18 words
The method according to claim 1, wherein the nitridizing atmosphere in step b) contains ammonia (NH 3 ).
Claim 4
Dependent Claim
18 words
The method according to claim 1, wherein the annealing in step c) is performed in an oxidizing atmosphere.
Claim 5
Dependent Claim
18 words
The method according to claim 1, wherein the annealing in step c) is performed in an inert atmosphere.
Claim 6
Dependent Claim
19 words
The method according to claim 1, wherein the nitridation in step b) is performed using a rapid heating furnace.
Claim 7
Dependent Claim
19 words
The method according to claim 1, wherein the annealing in step c) is performed using a rapid heating furnace.
Claim 8
Dependent Claim
25 words
The method according to claim 1, wherein the nitridation in step b) and the annealing in step c) are performed using a rapid heating furnace.
Claim 9
Dependent Claim
24 words
The method according to claim 5, wherein the nitridation is performed at a temperature of 900° to 1150° C. for 15 to 60 seconds.
Claim 10
Dependent Claim
24 words
The method according to claim 6, wherein the annealing is performed at a temperature of 900° to 1150° C. for 15 to 60 seconds.
Claim 11
Dependent Claim
24 words
The method according to claim 1, wherein the annealing is performed at a temperature of 900° to 1150° C. for 15 to 60 seconds.
Claim 12
Dependent Claim
34 words
The method according to claim 1, when the heat treatment time in step c) at a given temperature does not exceed the allowable time for fabrication of submicron semiconductor devices without significant impurity redistribution.
Claim 13
Dependent Claim
46 words
The method according to claim 1, wherein the heat treatment time in step c) at a given temperature does not exceed the allowable time for fabrication of submicron semiconductor devices without increasing depth of impurity layer formed on the semiconductor substrate larger than about 0.4 μm.
References Cited (Backward Citations)
US5198392A
Cited
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