Patent US5403457A successfully refreshed from Google Patents.
US5403457A
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Method for making soft magnetic film
Assignee: Panasonic Holdings Corp
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Filing: 1993-08-24
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Granted: 1995-04-04
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Expires: 2013-08-24
Abstract
Abstract The method of the invention provides a soft magnetic film having a high saturation magnetic flux density and an anisotropy of high magnetic permeability suitable for use in various types of magnetic heads at a high production yield by use of a sputtering apparatus provided with a sputtering electrode, which has permanent magnets arranged above a target 1 mainly of Fe or Co in such a way that lines of magnetic force 3 generated by said permanent magnets are in parallel to the surface of said target 1 and to the center line of said target 1 and have a magnetic strength pattern symmetric with respect to said center line while the lines of magnetic force to the right of said center line are of a reverse direction to those to the left of said center line.
Inventors
- 👤 Kumio Nago
- 👤 Isamu Aokura
- 👤 Hitoshi Yamanishi
- 👤 Koichi Osano
- 👤 Hiroshi Sakakima
- 👤 Toshiyuki Suemitsu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 14:47
CPC Classifications
B; B82; B82Y; B82Y25/00; G; G11; G11B; G11B5/00; G11B5/127; G11B5/147; B82Y40/00; H; H01; H01F; H01F41/00; H01F41/14; H01F41/18; H01F41/30; H01F41/302; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/4902; Y10T29/49021; Y10T29/49032; Y10T29/49034
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
102 words
A method for making a soft magnetic film comprised of a ferromagnetic metal component on a substrate by sputtering from a rectangular flat plate target by means of a magnetron sputtering apparatus, which comprises a step of forming lines of magnetic force applied in parallel to a surface of the rectangular flat plate target and arranged symmetrically on opposite sides of a center line of the target into right side lines and left side lines, the right side lines having a direction reverse to that of the left side lines, magnetic strength distributions on both sides of the center line being symmetrical.
Claim 2
Independent Claim
102 words
A method for making a soft magnetic film comprised of a ferromagnetic metal component on a substrate by sputtering from a rectangular flat plate target by means of a magnetron sputtering apparatus, which comprises a step of forming lines of magnetic force applied in parallel to a surface of the rectangular flat plate target and arranged symmetrically on opposite sides of a center line of the target into right side lines and left side lines, the right side lines having a direction reverse to that of the left side lines, magnetic strength distributions on both sides of the center line being symmetrical.
Claim 3
Dependent Claim
25 words
The method for making a soft magnetic film according to claim 1, wherein the soft magnetic film comprises as a main ingredient, Co or Fe.
Claim 4
Dependent Claim
54 words
The method for making a soft magnetic film according to claim 1, wherein the soft magnetic film comprises Fe, 5 to 20 atomic % of N, and 5 to 15 atomic % of a metal, M, which is at least one element selected from the group consisting of Ta, Zr, Hf, Nb, and Ti.
Claim 5
Dependent Claim
34 words
The method for making a soft magnetic film according to claim 1, wherein the soft magnetic film comprises Fe, 5 to 20 atomic % of N, and 5 to 15 atomic % of Ta.
Claim 6
Independent Claim
38 words
The method for making a soft magnetic film according to claims 1, 2, 3 or 4, wherein a bias power is continuously applied to the substrate to be provided with the soft magnetic film during the sputtering step.
Claim 7
Dependent Claim
26 words
The method for making a soft magnetic film according to claim 5, wherein the applied bias power density is set to 3700 W/m 2 or less.
Claim 8
Independent Claim
82 words
A method for making a multilayer soft magnetic film comprising soft magnetic films and an insulating film which are alternately laminated according to claims 1, 2 or 3, wherein at least two soft magnetic films, laminated to each other through the insulating film, are formed on said substrate by means of the sputtering with a bias condition set to a different power, including a non-bias condition, for each film to provide a relatively large isotropic area of the resulting soft magnetic film.
Claim 9
Dependent Claim
27 words
A magnetic head in which at least a part of a magnetic circuit comprises the multilayer soft magnetic film formed by the method according to claim 7.
Claim 10
Independent Claim
147 words
A method for making a soft magnetic film comprised of Fe, 5 to 20 atomic % of N, and 5 to 15 atomic % of a metal, M, which is at least one element selected from the group consisting of Ta, Zr, Hf, Nb, and Ti according to claims 2, 3 or 4, wherein said soft magnetic film comprises a mixture of fine crystals of α--Fe and fine particles of a nitride of a metal, M, in which the α--Fe crystals includes as a solid solution at least one element or compound selected from the group consisting of Ta, Zr, Hf, Nb, and Ti, N, and a metal nitride, which expand the lattices of α--Fe, the fine crystals of α--Fe having an average grain size of 15 nm or less and the fine crystals of metal nitride having an average grain size of 5 nm or less.
Claim 11
Dependent Claim
30 words
A magnetic head in which at least a part of a magnetic circuit comprises the soft magnetic film formed by the method according to claims 1, 2, 3 or 4.
Claim 12
Dependent Claim
90 words
A rectangular flat plate sputtering target electrode for making a soft magnetic film comprised of a ferromagnetic metal component on a substrate, which comprises a magnet means for forming lines of magnetic force applied in parallel to a surface of the target and arranged symmetrically on opposite sides of a center line of the target into right side lines and left side lines, the right side lines having a direction reverse to that of the left side lines, magnetic strength distributions on both sides of the center line being symmetrical.
Claim 13
Dependent Claim
90 words
A rectangular flat plate sputtering target electrode for making a soft magnetic film comprised of a ferromagnetic metal component on a substrate, which comprises a magnet means for forming lines of magnetic force applied in parallel to a surface of the target and arranged symmetrically on opposite sides of a center line of the target into right side lines and left side lines, the right side lines having a direction reverse to that of the left side lines, magnetic strength distributions on both sides of the center line being symmetrical.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-04-03 | 1998-10-03 | 1999-04-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-04-03 | 2002-10-03 | 2003-04-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-04-03 | 2006-10-03 | 2007-04-04 | $7700.00 | Window Closed / Lapsed |