US5400824A
Expired / Lapsed
US
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Microvalve
Assignee: Robert Bosch GmbH
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Filing: 1993-12-29
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Granted: 1995-03-28
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Expires: 2013-12-29
Abstract
Abstract A microminiature valve in multi-layered structure for switching or controlling fluid flows is proposed, having an inlet and a closing element. The inlet is embodied in a first layer in the form of at least one through-opening. The closing element is structured out of a second layer which is applied on the first layer. This second layer has at least one further through-opening in the area of the closing element. The closing element is displaceable by actuation means, in particular electrical ones, essentially parallel to the first layer and the second layer, so that in at least one first position of the closing element the at least one through-opening of the inlet, together with the at least one further through-opening in the second layer, forms at least one flow-through opening. The cross section of the at least one flow-through opening can be varied by actuating the closing element.
Inventors
- 👤 Horst Gschwendtner
- 👤 Jiri Marek
- 👤 Michael Mettner
- 👤 Gerhard Stokmaier
- 👤 Thomas Grauer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 01:27
CPC Classifications
F; F16; F16K; F16K99/00; F16K99/0001; F15; F15C; F15C5/00; F16K99/0003; F16K99/0011; F16K99/0013; F16K99/0034; F16K99/0042; F16K99/0048; F16K99/0051; F16K2099/0073; F16K2099/0074; F16K2099/0082; F16K2099/0096; Y; Y10; Y10T; Y10T137/00; Y10T137/2278; Y10T137/8593; Y10T137/86493; Y10T137/86718; Y10T137/86759
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
208 words
A microminiature valve in multi-layered structure for switching or controlling fluid flows (1), having an inlet element (20), a closing element (10), and electrically actuated means for displacing one of said elements laterally with respect to the other element, where the inlet is formed in a first layer (25) as at least a first through-opening (24) and the closing element (10) is structured out of a second layer (15), which is applied on the first layer (25), wherein the closing element is suspended on a beam (52) structured from said second layer (15); the second layer (15) defines at least a further through-opening (14) adjacent the closing element (10), the closing element (52) is displaceable essentially parallel to the first layer (25) and to the second layer (15), so that, in at least one first position of the closing element, the at least one through-opening (24) of the inlet, together with the at least one further through-opening in the second layer (15) defines at least one flow-through opening (14,24), and the cross section of the at least one flow-through opening changes upon actuation of the closing element (10); and wherein means are provided for pressing said closing element, in at least one position, against said first layer (25).
Claim 2
Dependent Claim
208 words
A microminiature valve in multi-layered structure for switching or controlling fluid flows (1), having an inlet element (20), a closing element (10), and electrically actuated means for displacing one of said elements laterally with respect to the other element, where the inlet is formed in a first layer (25) as at least a first through-opening (24) and the closing element (10) is structured out of a second layer (15), which is applied on the first layer (25), wherein the closing element is suspended on a beam (52) structured from said second layer (15); the second layer (15) defines at least a further through-opening (14) adjacent the closing element (10), the closing element (52) is displaceable essentially parallel to the first layer (25) and to the second layer (15), so that, in at least one first position of the closing element, the at least one through-opening (24) of the inlet, together with the at least one further through-opening in the second layer (15) defines at least one flow-through opening (14,24), and the cross section of the at least one flow-through opening changes upon actuation of the closing element (10); and wherein means are provided for pressing said closing element, in at least one position, against said first layer (25).
Claim 3
Dependent Claim
50 words
A microminiature valve in accordance with claim 1, characterized in that the beam (52) is connected at one end to a pedestal (50) and pivotable about a base point (51) adjacent the pedestal; and the width of the beam (52) is reduced in an area (51) near the base point.
Claim 4
Dependent Claim
22 words
A microminiature valve in accordance with claim 1, characterized by lamellas (33) extending from one or both sides of the beam (52).
Claim 5
Dependent Claim
62 words
A microminiature valve in accordance with claim 3, characterized in that the dimensions and disposition of the at least one first through-opening of the inlet and of the beam (52) and the lamellas (33) are selected such that the beam (52) and the lamellas (33) completely cover the at least one first through-opening of the inlet in at least one first position.
Claim 6
Dependent Claim
54 words
A microminiature valve in accordance with claim 3, characterized in that the dimensions and disposition of the at least one first through-opening of the inlet and of the lamellas (33) are selected such that the lamellas (33) completely cover the at least one first through-opening of the inlet in at least one first position.
Claim 7
Dependent Claim
41 words
A microminiature valve in accordance with claim 1, wherein said means for pressing said closing element against said first layer (25) comprises means for applying a voltage between portions of the first layer (25) and portions of the second layer (15).
Claim 8
Dependent Claim
20 words
A microminiature valve in accordance with claim 1, characterized in that the actuation of the closing element is performed piezo-electrically
Claim 9
Dependent Claim
52 words
A microminiature valve in accordance with claim 7, characterized in that the closing element is connected with at least one triggerable piezo element (61) via at least one lever arm (62), so that a change of extension of the at least one piezo element (61) causes a displacement of the closing element.
Claim 10
Dependent Claim
25 words
A microminiature valve in accordance with claim 7, characterized in that the at least one piezo element is constituted by a multilayer ceramic piezo piece.
Claim 11
Dependent Claim
20 words
A microminiature valve in accordance with claim 1, characterized in that the actuation of the closing element is performed electrostatically.
Claim 12
Dependent Claim
90 words
A microminiature valve in accordance with claim 10, characterized in that starting at the closing element, at least one first comb-shaped lamella structure (32) is formed in the second layer (15), at least a second comb-shaped lamella structure (33) is formed in the second layer (15) which is disposed such that the lamellas of the first lamella structure (32) and the lamellas of the second lamella structure (33) are interspersed, and means are provided for applying a voltage between the first lamella structure (32) and the second lamella structure (33).
Claim 13
Dependent Claim
33 words
A microminiature valve in accordance with claim 11, characterized in that the first lamella structure (32) and the second lamella structure (33) are embodied in the entire thickness of the second layer (15).
Claim 14
Dependent Claim
39 words
A microminiature valve in accordance with claim 1, characterized in that the first layer (25) and the second layer (15) are monocrystalline silicon wafers with a crystal orientation selected from the group consisting of (100)-crystalline orientation and (110)-crystalline orientation.
Claim 15
Dependent Claim
33 words
A microminiature valve in accordance with claim 20, characterized in that the first layer (25) and the second layer (15) are bonded to each other via an auxiliary layer (110) of silicon oxide.
Claim 16
Dependent Claim
38 words
A microminiature valve in accordance with claim 13, characterized in that the first layer (25) and the second layer (15) are structured by a process selected from the group consisting of anisotropic wet-chemical etching and electro-chemical dry etching.
Claim 17
Dependent Claim
133 words
A microminiature valve in accordance with claim 13, characterized in that the first layer (25) has, in the surface facing the second layer (15), at least one of: two pedestal-like raisings (104) or at least two recesses (103) and at least one pedestal-like raising (104) and at least one recess (103), the second layer (15) has, in the surface facing the first layer (25), recesses (103) at those places where there are pedestal-like raisings (104) in the first layer (25), and has pedestal-like raisings (104) in those places where there are recesses (103) in the first layer (25), where the positions of the closing element and the inlet are aligned in respect to each other, and the recesses (103) and the pedestal-like raisings are disposed on the non-movable parts of the microminiature valve.
Claim 18
Dependent Claim
43 words
A microminiature valve in accordance with claim 13, characterized in that the crystalline orientation of the silicon wafer forming the second layer diverges by a small loss angle from the (110) orientation, and the second layer (15) is structured by anisotropic wet-chemical etching.
Claim 19
Dependent Claim
80 words
A microminiature valve in accordance with claim 17, characterized in that the closing element is connected via resilient beams (12) with the second layer (15), where the orientation of one of the main axes of inertia of the resilient beams (12) slightly deviates from the orientation of the surfaces of the second layer (15), so that during actuation the closing element is given a displacement perpendicularly to the second layer (15), besides the displacement parallel to the second layer (15).
Claim 20
Dependent Claim
78 words
A microminiature valve in accordance with claim 1, wherein said means for pressing said closing element against said first layer (25) comprises a plurality of resilient beams having respective support axes whose resistance to flexing is least in a plane substantially parallel to the surface of said second layer, yet slightly deviating from parallel, whereby displacement of said closing element parallel to said first layer also causes slight displacement of said closing element perpendicular to said first layer.
Claim 21
Dependent Claim
45 words
A microminiature valve in accordance with claim 1, wherein the inlet is formed as a first grid structure (20) with grid beams (23) and holes (24), and the closing element is formed as a second grid structure (10) with grid beams (13) and holes (14).
Claim 22
Dependent Claim
49 words
A microminiature valve in accordance with claim 20, wherein the grid beams (23) of the first grid structure (20) and the grid beams (13) of the second grid structure (10) are disposed parallel to each other, and the closing element is displaceable parallel to the grid beams (13, 23).
Claim 23
Dependent Claim
26 words
A microminiature valve in accordance with claim 20, wherein the first grid structure (20) and the second grid structure (10) have holes of the same size.
Claim 24
Dependent Claim
56 words
A microminiature valve in accordance with claim 20, wherein the hole size and the width of the grid beams (23, 13) are selected such that the grid beams (13) of the second grid structure (10) completely cover the holes (24) of the first grid structure (20) in at least a second position of the closing element.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-03-27 | 1998-09-26 | 1999-03-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-03-27 | 2002-09-26 | 2003-03-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-03-27 | 2006-09-26 | 2007-03-28 | $7700.00 | Window Closed / Lapsed |