US5399830A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Plasma treatment apparatus
Assignee: Mitsubishi Electric Corp
•
Filing: 1994-01-11
•
Granted: 1995-03-21
•
Expires: 2014-01-11
Abstract
Abstract An electromagnetic coil and the microwave generating source are provided so that the ECR discharge occurs to the reactive gas within the reaction chamber by generating a magnetic field in the reaction chamber and by introducing the microwave into it, for generating plasma. The sample table for placing the wafer is installed within the reaction chamber, on which wafer treatment like etching is effected by the plasma generated within the reaction chamber. The reaction chamber includes a first portion and a second portion which is insulated from the first portion by an insulating portion. The first portion and the second portion are structured so that the potential difference is applied by way of the power supply.
Inventors
- 👤 Takahiro Maruyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 07:02
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32458; H01J37/32009; H01J37/32357; H01J37/3266; H01J37/32678; H01J37/32697
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
164 words
A plasma treatment apparatus for performing a predetermined treatment at a main surface of a substrate by generating plasma by way of electron cyclotron resonance discharge above the main surface of said substrate placed within a reaction chamber, and having a peripheral wall portion surrounding said plasma, wherein said peripheral wall portion includes first electric field applying means arranged to apply a first voltage and surrounding an outer peripheral portion of a first space for applying an electric field only at the outer peripheral portion of said first space, second electric field applying means electrically insulated from said first electric field applying means, arranged to apply a second voltage different from said first voltage, and surrounding an outer peripheral portion of a second space different from said first space for applying an electric field only at the outer peripheral portion of said second space, and power supply means for applying said first and second voltages to said first and second electric field applying means.
Claim 2
Dependent Claim
164 words
A plasma treatment apparatus for performing a predetermined treatment at a main surface of a substrate by generating plasma by way of electron cyclotron resonance discharge above the main surface of said substrate placed within a reaction chamber, and having a peripheral wall portion surrounding said plasma, wherein said peripheral wall portion includes first electric field applying means arranged to apply a first voltage and surrounding an outer peripheral portion of a first space for applying an electric field only at the outer peripheral portion of said first space, second electric field applying means electrically insulated from said first electric field applying means, arranged to apply a second voltage different from said first voltage, and surrounding an outer peripheral portion of a second space different from said first space for applying an electric field only at the outer peripheral portion of said second space, and power supply means for applying said first and second voltages to said first and second electric field applying means.
Claim 3
Dependent Claim
38 words
The plasma treatment apparatus according to claim 1, wherein said power supply means includes a DC source which is disposed such that said first voltage is a negative voltage and said second voltage is connected to the ground.
Claim 4
Dependent Claim
38 words
The plasma treatment apparatus according to claim 1, wherein said power supply means includes a DC source which is disposed such that said first voltage is a positive voltage and said second voltage is connected to the ground.
Claim 5
Dependent Claim
24 words
The plasma treatment apparatus according to claim 2, wherein said negative voltage is not less than -100 V and not more than -10 V.
Claim 6
Dependent Claim
24 words
The plasma treatment apparatus according to claim 3, wherein said positive voltage is not less than 10 V and not more than 100 V.
Claim 7
Dependent Claim
39 words
The plasma treatment apparatus according to claim 1, wherein said power supply means includes an AC source which is disposed such that said first voltage is a radio frequency voltage and said second voltage is connected to the ground.
Claim 8
Dependent Claim
16 words
The plasma treatment apparatus according to claim 5, wherein said radio frequency voltage is 13.56 MHz.
Claim 9
Dependent Claim
29 words
A plasma treatment apparatus according to claim 1, characterized by the absence of any electrode in the plasma generating space surrounded by the first and second peripheral wall portions.
Claim 10
Dependent Claim
204 words
A plasma treatment apparatus for performing a predetermined treatment at a main surface of a substrate by generating plasma by way of the electron cyclotron resonance discharge above the main surface of said substrate, comprising: a base for placing said substrate; a reaction chamber which includes a peripheral wall portion surrounding said plasma and accommodates said base; magnetic field generating means disposed outside said peripheral wall portion for generating a magnetic field within said reaction chamber; microwave introducing means for introducing the microwave into said reaction chamber; wherein said peripheral wall portion includes first electric field applying means arranged to apply a first voltage and surrounding an outer peripheral portion of a first space for applying an electric field only at the outer peripheral portion of said first space, second electric field applying means electrically insulated from said first electric field applying means, arranged to apply a second voltage different from said first voltage, and surrounding an outer peripheral portion of a second space different from said first space for applying an electric field only at the outer peripheral portion of said second space, and power supply means for applying said first and second voltages to said first and second electric field applying means.
Claim 11
Dependent Claim
204 words
A plasma treatment apparatus for performing a predetermined treatment at a main surface of a substrate by generating plasma by way of the electron cyclotron resonance discharge above the main surface of said substrate, comprising: a base for placing said substrate; a reaction chamber which includes a peripheral wall portion surrounding said plasma and accommodates said base; magnetic field generating means disposed outside said peripheral wall portion for generating a magnetic field within said reaction chamber; microwave introducing means for introducing the microwave into said reaction chamber; wherein said peripheral wall portion includes first electric field applying means arranged to apply a first voltage and surrounding an outer peripheral portion of a first space for applying an electric field only at the outer peripheral portion of said first space, second electric field applying means electrically insulated from said first electric field applying means, arranged to apply a second voltage different from said first voltage, and surrounding an outer peripheral portion of a second space different from said first space for applying an electric field only at the outer peripheral portion of said second space, and power supply means for applying said first and second voltages to said first and second electric field applying means.
Claim 12
Dependent Claim
29 words
A plasma treatment apparatus according to claim 9, characterized by the absence of any electrode in the plasma generating space surrounded by the first and second peripheral wall portions.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-03-20 | 1998-09-19 | 1999-03-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-03-20 | 2002-09-19 | 2003-03-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-03-20 | 2006-09-19 | 2007-03-21 | $7700.00 | Window Closed / Lapsed |