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US5396795A Expired / Lapsed US ⏱️ 0.0 years remaining

Semiconductor sensor device for measuring intake flow rate

Assignee: Mitsubishi Electric Corp
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Filing: 1992-11-24
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Granted: 1995-03-14
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Expires: 2012-11-24
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Abstract

Abstract The semiconductor flow rate detector comprises a semiconductor chip having sensor elements on its surface, leads connected to connecting terminals of the semiconductor chip, and a resin base covering junctions between the leads and the connecting terminals of the semiconductor chip and integrally holding them.

Inventors

  • 👤 Toru Araki

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 22:01
CPC Classifications
G; G01; G01F; G01F1/00; G01F1/68; G01F1/684; G01F1/6845; H; H10; H10W; H10W74/00; H10W74/01; H10W74/016

Claims Analysis

Total Claims: 10
Claim 1
Independent Claim 118 words
A semiconductor sensor device, comprising: a semiconductor chip including on its surface a sensor element and a connecting terminal connected to said sensor element; a lead connected to said connecting terminal; and a base for covering only a junction between said connecting terminal and said lead with said sensor element exposed and integrally holding said semiconductor chip and said lead, wherein said semiconductor chip further includes a first resin wall formed around said sensor element on said surface of said semiconductor chip and a second resin wall formed in a position on an opposite face of said semiconductor chip which corresponds to the position of said first resin wall with respect to said surface of said semiconductor chip.
Claim 2
Dependent Claim 118 words
A semiconductor sensor device, comprising: a semiconductor chip including on its surface a sensor element and a connecting terminal connected to said sensor element; a lead connected to said connecting terminal; and a base for covering only a junction between said connecting terminal and said lead with said sensor element exposed and integrally holding said semiconductor chip and said lead, wherein said semiconductor chip further includes a first resin wall formed around said sensor element on said surface of said semiconductor chip and a second resin wall formed in a position on an opposite face of said semiconductor chip which corresponds to the position of said first resin wall with respect to said surface of said semiconductor chip.
Claim 3
Dependent Claim 19 words
A semiconductor sensor device in accordance with claim 1, wherein said sensor element includes a flow rate sensor element.
Claim 4
Dependent Claim 23 words
A semiconductor sensor device in accordance with claim 2, wherein said flow rate sensor element includes a heater element and a temperature-sensitive element.
Claim 5
Dependent Claim 19 words
A semiconductor sensor device in accordance with claim 1, wherein said first and second resin walls comprise silicon resin.
Claim 6
Dependent Claim 34 words
A semiconductor sensor device in accordance with claim 1, wherein said lead includes a hard lead, said hard lead being joined to said connecting terminal of said semiconductor chip by means of wire bonding.
Claim 7
Dependent Claim 17 words
A semiconductor sensor device in accordance with claim 1, wherein said base is formed of mold resin.
Claim 8
Dependent Claim 16 words
A semiconductor sensor device in accordance with claim 1, wherein said lead includes a flexible lead.
Claim 9
Dependent Claim 32 words
A semiconductor sensor device in accordance with claim 7, wherein a connection between said flexible lead and said connecting terminal of said semiconductor chip comprises a metal bump therebetween at said junction.
Claim 10
Dependent Claim 28 words
A semiconductor sensor device in accordance with claim 1, wherein said semiconductor chip comprises a thin film portion, said sensor element being formed on said thin film portion.

References Cited (Backward Citations)

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US4888988A Cited
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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1998-03-13 1998-09-12 1999-03-14 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2002-03-13 2002-09-12 2003-03-14 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2006-03-13 2006-09-12 2007-03-14 $7700.00 Window Closed / Lapsed

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