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US5392118A
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Method for measuring a trench depth parameter of a material
Assignee: Advanced Metrology Systems LLC
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Filing: 1993-09-22
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Granted: 1995-02-21
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Expires: 2013-09-22
Abstract
Abstract A method suitable for measuring a trench depth parameter of a material. The method comprises the steps of propagating source radiation around a trench and through the material; and analyzing a characteristic variation of an interference signal as a determinant of the trench depth parameter; the interference signal developing as radiation from a base of the trench interferes with radiation propagated from a top surface of the material.
Inventors
- 👤 Hemantha K. Wickramasinghe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 13:42
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/22
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
83 words
A method suitable for measuring a trench depth parameter of a material, the method comprising the steps of: 1) propagating source radiation of wavelength λ around a trench of width w, and through the material, wherein λ is greater than w (λ>w); and 2) analyzing a characteristic variation of an interference signal as a determinant of the trench depth parameter; said interference signal developing as radiation from a base of the trench interferes with radiation propagated from a top surface of the material.
Claim 2
Independent Claim
83 words
A method suitable for measuring a trench depth parameter of a material, the method comprising the steps of: 1) propagating source radiation of wavelength λ around a trench of width w, and through the material, wherein λ is greater than w (λ>w); and 2) analyzing a characteristic variation of an interference signal as a determinant of the trench depth parameter; said interference signal developing as radiation from a base of the trench interferes with radiation propagated from a top surface of the material.
Claim 3
Dependent Claim
12 words
A method according to claim 1, wherein step 2 comprises wavelength tuning.
Claim 4
Dependent Claim
12 words
A method according to claim 1, wherein step 2 comprises depth sampling.
Claim 5
Dependent Claim
12 words
A method according to claim 1, wherein step 2 comprises angle tuning.
Claim 6
Independent Claim
74 words
A method suitable for measuring a trench depth parameter of a material, the method comprising the steps of: 1) propagating source radiation around a trench and through the material; and 2) analyzing a characteristic variation of an interference signal as a determinant of the trench depth parameter; said interference signal comprising angle tuning and developing as radiation from a base of the trench interferes with radiation propagated from a top surface of the material.
Claim 7
Independent Claim
74 words
A method suitable for measuring a trench depth parameter of a material, the method comprising the steps of: 1) propagating source radiation around a trench and through the material; and 2) analyzing a characteristic variation of an interference signal as a determinant of the trench depth parameter; said interference signal comprising angle tuning and developing as radiation from a base of the trench interferes with radiation propagated from a top surface of the material.
References Cited (Backward Citations)
US4615620A
Cited
US4744660A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-02-20 | 1998-08-22 | 1999-02-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-02-20 | 2002-08-22 | 2003-02-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-02-20 | 2006-08-22 | 2007-02-21 | $7700.00 | Window Closed / Lapsed |