US5391871A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Scanning probe microscope
Assignee: Canon Inc
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Filing: 1992-06-02
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Granted: 1995-02-21
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Expires: 2012-06-02
Abstract
Abstract A scanning type probe microscope apparatus for measuring a surface state of a sample by scanning the sample by use of a probe is disclosed. In the apparatus, the sample is inclined relative to a scan direction of the probe by a inclination mechanism. Of a signal component corresponding to the surface state of the sample, a signal component having an optional space frequency is selected to be detected by a detecting circuit. The inclination mechanism is controlled on the basis of a detection result of the detecting circuit.
Inventors
- 👤 Hiroshi Matsuda
- 👤 Hisaaki Kawade
- 👤 Ken Eguchi
- 👤 Yoshihiro Yanagisawa
- 👤 Toshihiko Takeda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 11:16
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/10; G01Q60/16; B; B82; B82Y; B82Y35/00; G01B; G01B7/00; G01B7/34; G01Q10/00; G01Q10/04; G01Q10/06; Y; Y10; Y10S; Y10S977/00; Y10S977/70; Y10S977/788; Y10S977/789; Y10S977/79; Y10S977/791; Y10S977/792; Y10S977/832; Y10S977/837; Y10S977/84; Y10S977/849; Y10S977/85; Y10S977/851; Y10S977/86; Y10S977/868; Y10S977/869
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
156 words
A scanning probe microscope for measuring a surface status of a sample by scanning the sample with a probe, comprising: a probe; an inclination means for inclining the sample disposed to face said probe relative to a scanning surface defined by the scanning of said probe; moving means for performing relative movement between said probe and the sample so as to reciprocally scan the sample with said probe; detection means for detecting a signal corresponding to surface information of the sample utilizing said probe upon scanning the sample with said probe; extraction means for extracting a low frequency signal from said detected signal; and control means for controlling said inclination means on the basis of said low frequency signal so that a level of said low frequency signal extracted by said extraction means becomes lower in order to make an angle defined by said scanning surface of said probe and the surface of the sample smaller.
Claim 2
Dependent Claim
156 words
A scanning probe microscope for measuring a surface status of a sample by scanning the sample with a probe, comprising: a probe; an inclination means for inclining the sample disposed to face said probe relative to a scanning surface defined by the scanning of said probe; moving means for performing relative movement between said probe and the sample so as to reciprocally scan the sample with said probe; detection means for detecting a signal corresponding to surface information of the sample utilizing said probe upon scanning the sample with said probe; extraction means for extracting a low frequency signal from said detected signal; and control means for controlling said inclination means on the basis of said low frequency signal so that a level of said low frequency signal extracted by said extraction means becomes lower in order to make an angle defined by said scanning surface of said probe and the surface of the sample smaller.
Claim 3
Dependent Claim
15 words
A scanning probe microscope according to claim 1, wherein said inclination means utilizes a goniometer.
Claim 4
Dependent Claim
18 words
A scanning probe microscope according to claim 1, wherein said inclination means utilizes at least two piezo-electric elements.
Claim 5
Dependent Claim
31 words
A scanning probe microscope according to claim 1, wherein said scanning probe microscope is a scanning probe tunneling microscope which utilizes a tunneling current caused between said probe and the sample.
Claim 6
Dependent Claim
30 words
A scanning probe microscope according to claim 1, wherein said scanning probe microscope is a scanning interatomic microscope which utilizes an internatomic force caused between said probe and the sample.
Claim 7
Dependent Claim
31 words
A scanning probe microscope according to claim 1, wherein said scanning probe microscope is a scanning magnetic force microscope which utilizes a magnetic force caused between said probe and the sample.
Claim 8
Dependent Claim
31 words
A scanning probe microscope according to claim 1, wherein said scanning probe microscope is a scanning ion conduction microscope which utilizes an ion conduction caused between said probe and the sample.
Claim 9
Dependent Claim
28 words
A scanning probe microscope according to claim 1, wherein said scanning probe microscope is a scanning acoustic microscope which utilizes acoustics caused between said probe and the sample.
Claim 10
Dependent Claim
32 words
A scanning probe microscope according to claim 1, wherein said scanning probe microscope is a scanning proximity field optical microscope which utilizes an evanescent light caused between said probe and the sample.
Claim 11
Dependent Claim
16 words
A scanning probe microscope according to claim 1, wherein said extraction means is a lock-in amplifier.
Claim 12
Dependent Claim
27 words
A scanning probe microscope according to claim 1, wherein said control means controls said inclination means before measuring the surface status of the sample by said probe.
Claim 13
Independent Claim
163 words
An apparatus for recording and/or reproducing information on and/or from a recording medium by scanning the recording medium with a probe, comprising: a probe; inclination means for inclining the recording medium disposed to face said probe relative to a scanning surface defined by the scanning of said probe; moving means for performing relative movement between said probe and the recording medium so as to reciprocally scan the recording medium with said probe; detection means for detecting a signal corresponding to surface information of the recording medium utilizing said probe upon scanning the recording medium with said probe; extraction means for extracting a low frequency signal from said detected signal; and control means for controlling said inclination means on the basis of said low frequency signal so that a level of the low frequency signal extracted by said extraction means becomes lower in order to make an angle defined by said scanning surface of said probe and the surface of the recording medium smaller.
Claim 14
Independent Claim
163 words
An apparatus for recording and/or reproducing information on and/or from a recording medium by scanning the recording medium with a probe, comprising: a probe; inclination means for inclining the recording medium disposed to face said probe relative to a scanning surface defined by the scanning of said probe; moving means for performing relative movement between said probe and the recording medium so as to reciprocally scan the recording medium with said probe; detection means for detecting a signal corresponding to surface information of the recording medium utilizing said probe upon scanning the recording medium with said probe; extraction means for extracting a low frequency signal from said detected signal; and control means for controlling said inclination means on the basis of said low frequency signal so that a level of the low frequency signal extracted by said extraction means becomes lower in order to make an angle defined by said scanning surface of said probe and the surface of the recording medium smaller.
Claim 15
Dependent Claim
32 words
An apparatus according to claim 12, wherein said control means controls said inclination means before effecting recording to information or reproduction of information on or from the recording medium by said probe.
References Cited (Backward Citations)
US3903735A
Cited
EP0240150A2
Cited
GB2204130A
Cited
EP0338083A1
Cited
EP0351260A2
Cited
US5107112A
Cited
JPH02147803A
Cited
EP0421437A2
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-02-20 | 1998-08-22 | 1999-02-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-02-20 | 2002-08-22 | 2003-02-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-02-20 | 2006-08-22 | 2007-02-21 | $7700.00 | Window Closed / Lapsed |