US5107112A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Scanning tunnel-current-detecting device and method for detecting tunnel current and scanning tunnelling microscope and recording/reproducing device using thereof
Assignee: Canon Inc
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Filing: 1989-09-27
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Granted: 1992-04-21
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Expires: 2009-09-27
Abstract
Abstract A scanning tunnel-current-detecting device comprising at least two probe electrodes supported by a supporting member, a means for placing a sample in proximity to the probe electrodes, a means for applying voltage between the probe electrodes and the sample, at least one of the probe electrodes being provided with a mechanism for measuring and compensating variation of the distance between the supporting member and the sample, is provided.
Inventors
- 👤 Yoshihiro Yanagisawa
- 👤 Kunihiro Sakai
- 👤 Hisaaki Kawade
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 14:10
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/10; G01Q60/16; G01Q30/00; G01Q30/04; G01Q30/06; G01Q70/00; G01Q70/02; G01Q70/04; G01Q70/06; G11; G11B; G11B9/00; G11B9/12; G11B9/14; G11B9/1418; G11B9/1427; G11B9/1436; G11B9/1445; G01Q80/00; Y; Y10; Y10S; Y10S977/00; Y10S977/70; Y10S977/832; Y10S977/837; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/861; Y10S977/873; Y10S977/874
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
107 words
An information detecting device for detecting an information of a sample by means of a probe electrode in proximity to a sample surface, comprising at least a first probe electrode and a second probe electrode, which can be driven independently, supported by a supporting member, and provided with a driving means for driving said first probe electrode, and a feedback system for compensating a deviation of a distance between said first probe electrode and said sample surface by adjusting a distance between said sample surface and said supporting member so as to keep substantially constant a current flowing between said second probe electrode and said sample surface.
Claim 2
Dependent Claim
107 words
An information detecting device for detecting an information of a sample by means of a probe electrode in proximity to a sample surface, comprising at least a first probe electrode and a second probe electrode, which can be driven independently, supported by a supporting member, and provided with a driving means for driving said first probe electrode, and a feedback system for compensating a deviation of a distance between said first probe electrode and said sample surface by adjusting a distance between said sample surface and said supporting member so as to keep substantially constant a current flowing between said second probe electrode and said sample surface.
Claim 3
Dependent Claim
105 words
A scanning tunneling microscope for observing a sample surface by means of a probe electrode in proximity with said sample surface, comprising at least a first probe electrode and a second probe electrode, which can be driven independently, supported by a supporting member, and provided with a driving means for driving said first probe electrode, and a feedback system for compensating a deviation of a distance between said first probe electrode and said sample surface by adjusting a distance between said sample surface and said supporting member so as to keep substantially constant a current flowing between said second probe electrode and said sample surface.
Claim 4
Dependent Claim
105 words
A scanning tunneling microscope for observing a sample surface by means of a probe electrode in proximity with said sample surface, comprising at least a first probe electrode and a second probe electrode, which can be driven independently, supported by a supporting member, and provided with a driving means for driving said first probe electrode, and a feedback system for compensating a deviation of a distance between said first probe electrode and said sample surface by adjusting a distance between said sample surface and said supporting member so as to keep substantially constant a current flowing between said second probe electrode and said sample surface.
Claim 5
Independent Claim
103 words
A method for detecting an information of a sample by means of a probe electrode in proximity to a sample surface, comprising using at least a first probe electrode and a second probe electrode, which can be driven independently, supported by a supporting member, and detecting said information of the sample by means of said first probe electrode, compensating a deviation of a distance between the first probe electrode and said sample surface by adjusting a distance between said sample surface and said supporting member so as to keep substantially constant a current flowing between said second probe electrode and said sample surface.
Claim 6
Independent Claim
103 words
A method for detecting an information of a sample by means of a probe electrode in proximity to a sample surface, comprising using at least a first probe electrode and a second probe electrode, which can be driven independently, supported by a supporting member, and detecting said information of the sample by means of said first probe electrode, compensating a deviation of a distance between the first probe electrode and said sample surface by adjusting a distance between said sample surface and said supporting member so as to keep substantially constant a current flowing between said second probe electrode and said sample surface.
Claim 7
Dependent Claim
116 words
A recording/reproducing device for recording an information into a recording medium and/or for reproducing or erasing a recorded information by means of a probe electrode in proximity to a recording medium, comprising at least a first probe electrode and a second probe electrode, which can be driven independently, supported by a supporting member, and provided with a driving means for driving said first probe electrode, and a feedback system for compensating a deviation of a distance between said first probe electrode and said recording medium by adjusting a distance between said recording medium surface and said supporting member so as to keep substantially constant a current flowing between said second probe electrode and said recording medium.
Claim 8
Dependent Claim
116 words
A recording/reproducing device for recording an information into a recording medium and/or for reproducing or erasing a recorded information by means of a probe electrode in proximity to a recording medium, comprising at least a first probe electrode and a second probe electrode, which can be driven independently, supported by a supporting member, and provided with a driving means for driving said first probe electrode, and a feedback system for compensating a deviation of a distance between said first probe electrode and said recording medium by adjusting a distance between said recording medium surface and said supporting member so as to keep substantially constant a current flowing between said second probe electrode and said recording medium.
Claim 9
Independent Claim
102 words
A method for adjusting a distance between a probe electrode and a sample surface in a method for detecting an information of sample by means of a probe electrode in proximity to a sample surface, comprising using a first probe electrode and a second probe electrode, which can be driven independently, supported by a supporting member, and compensating a deviation of a distance between said first probe electrode and said sample surface by adjusting a distance between said sample surface and said supporting member so as to keep substantially constant a current flowing between said second probe electrode and said sample surface.
Claim 10
Independent Claim
102 words
A method for adjusting a distance between a probe electrode and a sample surface in a method for detecting an information of sample by means of a probe electrode in proximity to a sample surface, comprising using a first probe electrode and a second probe electrode, which can be driven independently, supported by a supporting member, and compensating a deviation of a distance between said first probe electrode and said sample surface by adjusting a distance between said sample surface and said supporting member so as to keep substantially constant a current flowing between said second probe electrode and said sample surface.
Claim 11
Dependent Claim
39 words
The method for adjusting a distance between a probe electrode and a sample surface according to claim 5, wherein said first probe electrode is connected with said supporting member through said driving means for driving said first probe electrode.
Claim 12
Dependent Claim
26 words
The method for adjusting a distance between a probe electrode and a sample surface according to claim 5, wherein said driving means is a piezo element.
Claim 13
Dependent Claim
33 words
The method for adjusting a distance between a probe electrode and a sample surface according to claim 5, wherein said second probe electrode is kept at a specified position above said sample surface.
Claim 14
Independent Claim
87 words
A method for keeping a sample surface horizontal with respect to a supporting member in a method for detecting sample information by means of a probe electrode supported by a supporting member in proximity to a sample surface, comprising using at least three probe electrodes on said supporting member capable of being driven independently, and adjusting a positional relationship between said sample surface and said supporting member to keep substantially constant current flowing between each of said at least three probe electrodes and said sample surface, respectively.
Claim 15
Independent Claim
87 words
A method for keeping a sample surface horizontal with respect to a supporting member in a method for detecting sample information by means of a probe electrode supported by a supporting member in proximity to a sample surface, comprising using at least three probe electrodes on said supporting member capable of being driven independently, and adjusting a positional relationship between said sample surface and said supporting member to keep substantially constant current flowing between each of said at least three probe electrodes and said sample surface, respectively.
Claim 16
Dependent Claim
29 words
The method for keeping a sample surface horizontal to a supporting member according to claim 9, wherein said probe electrodes are kept at specified position above said sample surface.
Claim 17
Independent Claim
83 words
A method for detecting an information of sample by means of a probe electrode in proximity to a sample surface, comprising using at least four probe electrodes, which can be driven independently, supported by a supporting member, and detecting said information of sample by means of the fourth probe electrode, while adjusting a distance between said sample surface and said supporting member so as to keep substantially constant each current flowing between said first to third probe electrodes and said sample surface, respectively.
Claim 18
Independent Claim
83 words
A method for detecting an information of sample by means of a probe electrode in proximity to a sample surface, comprising using at least four probe electrodes, which can be driven independently, supported by a supporting member, and detecting said information of sample by means of the fourth probe electrode, while adjusting a distance between said sample surface and said supporting member so as to keep substantially constant each current flowing between said first to third probe electrodes and said sample surface, respectively.
Claim 19
Dependent Claim
33 words
The method for detecting an information according to claim 11, wherein said sample surface and said supporting member are kept horizontally, by adjusting a distance between said sample surface and said supporting member.
Claim 20
Dependent Claim
26 words
The method for detecting an information according to claim 11, wherein said first to third probe electrodes are kept at specified positions above said sample surface.
Claim 21
Dependent Claim
31 words
The method for detecting an information according to claim 11, wherein said fourth probe electrode is connected with said supporting member through a driving means for driving said fourth probe electrode.
Claim 22
Dependent Claim
98 words
A scanning tunneling microscope for observing a sample surface by means of a probe electrode in proximity to a sample surface, comprising at least four probe electrodes, which can be driven independently, supported by a supporting member, and provided with a means for adjusting a positional relationship between the sample surface and said supporting member to keep substantially constant current flowing between each of said first to third probe electrodes and said sample surface, respectively, to maintain said sample surface substantially horizontal with respect to the supporting member, and a driving means for driving said fourth probe electrode.
Claim 23
Dependent Claim
98 words
A scanning tunneling microscope for observing a sample surface by means of a probe electrode in proximity to a sample surface, comprising at least four probe electrodes, which can be driven independently, supported by a supporting member, and provided with a means for adjusting a positional relationship between the sample surface and said supporting member to keep substantially constant current flowing between each of said first to third probe electrodes and said sample surface, respectively, to maintain said sample surface substantially horizontal with respect to the supporting member, and a driving means for driving said fourth probe electrode.
Claim 24
Dependent Claim
29 words
The scanning tunneling microscope according to claim 15, wherein said fourth probe electrode is connected with said supporting member through a driving means for driving said fourth probe electrode.
Claim 25
Dependent Claim
16 words
The scanning tunneling microscope according to claim 15, wherein said driving means is a piezo element.
Claim 26
Dependent Claim
24 words
The scanning tunneling microscope according to claim 15, wherein said first to third probe electrodes are kept at specified positions above said recording medium.
Claim 27
Dependent Claim
97 words
An information detecting device for detecting an information of a sample by means of a probe electrode in proximity to a sample surface, comprising a first probe electrode and at least one other probe electrode, which can be driven independently, a driving means for driving said first probe electrode, and a feedback system for compensating for deviation in a distance between said first probe electrode and said sample surface by adjusting the position of the sample so as to keep substantially constant a current flowing between the at least one other probe electrode and said sample surface.
Claim 28
Dependent Claim
97 words
An information detecting device for detecting an information of a sample by means of a probe electrode in proximity to a sample surface, comprising a first probe electrode and at least one other probe electrode, which can be driven independently, a driving means for driving said first probe electrode, and a feedback system for compensating for deviation in a distance between said first probe electrode and said sample surface by adjusting the position of the sample so as to keep substantially constant a current flowing between the at least one other probe electrode and said sample surface.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-04-21 | 1995-10-21 | 1996-04-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-04-21 | 1999-10-21 | 2000-04-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-04-21 | 2003-10-21 | 2004-04-21 | $7700.00 | Window Closed / Lapsed |