US5391035A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Micro-enviroment load lock
Assignee: Applied Materials Inc
•
Filing: 1994-04-18
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Granted: 1995-02-21
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Expires: 2014-04-18
Abstract
Abstract A micro-environment load lock for coupling a SMIF-type box containing a stack of semiconductor wafers directly to a wafer processing chamber includes a load lock chamber in communication with at least one wafer processing tool. The load lock also includes a seal operable to accept and sealably couple a SMIF-type box to the load lock chamber such that SMIF-type box becomes an extension of the load lock chamber, and provides a base that is selectably operable to open and close the SMIF-type box and to selectably draw a cassette of wafers from the SMIF-type box through a port in communication with the load lock chamber and into the load lock chamber. The base is also operable to seal the port in the absence of a SMIF-type box. A single robot is provided in conjunction with the load lock chamber for moving one wafer at a time between the cassette of wafers and the process chamber.
Inventors
- 👤 Gordon P. Krueger
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 05:46
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/33; H10P72/3306; H10P72/34; H10P72/3402; H10P72/3406; H10P72/3408; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/137; Y10S414/139; Y10S414/14
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
207 words
A micro-environment load lock for coupling a sealed micro-environment container directly to a process chamber, comprising: a load lock chamber in direct communication with at least one process chamber; a port in communication with said load lock chamber; a seal operable to accept and sealably couple said micro-environment container to said load lock chamber such that said micro-environment container, when opened, has an interior volume which is a sealed extension of said load lock chamber, and has an exterior surface which remains exposed to the ambient; a base selectably operable to open and close said micro-environment container and to selectably draw a cassette of wafers from said micro-environment container through said port and into said load lock chamber, and operable to seal said port in the absence of said micro-environment container; wherein said base is operable to apply a pressure differential to said micro-environment container for drawing said cassette of wafers into said load lock chamber; a lift indexer for coordinating operation of said base and said robot to effect transfer of said one wafer at a time between said cassette of wafers and said process chamber; and a single robot for moving one wafer at a time between said cassette of wafers and said process chamber.
Claim 2
Dependent Claim
207 words
A micro-environment load lock for coupling a sealed micro-environment container directly to a process chamber, comprising: a load lock chamber in direct communication with at least one process chamber; a port in communication with said load lock chamber; a seal operable to accept and sealably couple said micro-environment container to said load lock chamber such that said micro-environment container, when opened, has an interior volume which is a sealed extension of said load lock chamber, and has an exterior surface which remains exposed to the ambient; a base selectably operable to open and close said micro-environment container and to selectably draw a cassette of wafers from said micro-environment container through said port and into said load lock chamber, and operable to seal said port in the absence of said micro-environment container; wherein said base is operable to apply a pressure differential to said micro-environment container for drawing said cassette of wafers into said load lock chamber; a lift indexer for coordinating operation of said base and said robot to effect transfer of said one wafer at a time between said cassette of wafers and said process chamber; and a single robot for moving one wafer at a time between said cassette of wafers and said process chamber.
Claim 3
Dependent Claim
41 words
The load lock of claim 1, wherein said carrier and said load lock chamber comprise a single variable volume equal to a minimum volume necessary to accommodate that portion of said wafer cassette corresponding to a wafer location currently being processed.
Claim 4
Dependent Claim
162 words
A process for coupling a sealed micro-environment container directly to a process chamber, comprising the steps of: accepting and sealably coupling said micro-environment container to a load lock chamber such that an interior volume of said micro-environment container becomes an extension of said load lock chamber, and such that an exterior surface of said micro-environment chamber remains exposed to the ambient; selectably opening and closing said micro-environment container; alternatively sealing said port in the absence of said micro-environment container; applying a pressure differential at a base of said micro,environment container to selectably drawing a cassette of wafers from said micro-environment container through a port and into said load lock chamber; coordinating said wafer drawing step with said wafer moving step to effect transfer of said one wafer at a time between said cassette of wafers and said process chamber; and moving one wafer at a time, through the action of a single robot, between said cassette of wafers and said process chamber.
Claim 5
Dependent Claim
162 words
A process for coupling a sealed micro-environment container directly to a process chamber, comprising the steps of: accepting and sealably coupling said micro-environment container to a load lock chamber such that an interior volume of said micro-environment container becomes an extension of said load lock chamber, and such that an exterior surface of said micro-environment chamber remains exposed to the ambient; selectably opening and closing said micro-environment container; alternatively sealing said port in the absence of said micro-environment container; applying a pressure differential at a base of said micro,environment container to selectably drawing a cassette of wafers from said micro-environment container through a port and into said load lock chamber; coordinating said wafer drawing step with said wafer moving step to effect transfer of said one wafer at a time between said cassette of wafers and said process chamber; and moving one wafer at a time, through the action of a single robot, between said cassette of wafers and said process chamber.
Claim 6
Dependent Claim
51 words
The process of claim 3, wherein, by drawing said cassette of wafers into said load lock chamber, said carrier and said load lock chamber comprise a single variable volume equal to a minimum volume necessary to accommodate that portion of said wafer cassette corresponding to a wafer location currently being processed.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-02-20 | 1998-08-22 | 1999-02-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-02-20 | 2002-08-22 | 2003-02-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-02-20 | 2006-08-22 | 2007-02-21 | $7700.00 | Window Closed / Lapsed |