EP0358443A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Mask cassette loading device
Assignee: Canon Inc
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Filing: 1989-09-05
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Granted: —
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Expires: 2009-09-05
Abstract
Abstract A mask cassette and mask cassette loading device, suitably usable in an X-ray exposure apparatus for exposing a wafer to a mask with X-rays contains in a synchrotron radiation, to print a pattern of the mask on the wafer, are disclosed. The mask cassette includes a base for accommodating plural masks and a cover which can be separated from and coupled to the base only in one direction. When they are coupled by a locking mechanism, the cassette can be completely closed against the atmospheric pressure. The mask cassette loading device includes a common mechanism which serves to release the locking mechanism of the cassette and also to move the cassette base relatively to the cover. Thus, with a simple and compact structure, the protection and replacement of X-ray masks are ensured with certainty.
Inventors
- 👤 Yuji Chiba
- 👤 Hidehiko Fujioka
- 👤 Nobutoshi Mizusawa
- 👤 Takao Kariya
- 👤 Isamu Shimoda
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-02 11:21
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/33; H10P72/3306; G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70733; G03F7/70741; G03F7/708; G03F7/70858; G03F7/70866; H10P72/3308; H10P72/34; H10P72/3411; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/137
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
75 words
A device for loading a mask cassette for accommodating therein a mask for manufacture of semiconductor chips, said device comprising: a chamber isolated from an atmosphere; and a driving mechanism for separating, in said chamber, the mask cassette into a cassette major part and a cover, said driving mechanism being adapted to move after separation the cassette major part and the cover relatively to each other, to position the cassette major part above the cover.
Claim 2
Independent Claim
75 words
A device for loading a mask cassette for accommodating therein a mask for manufacture of semiconductor chips, said device comprising: a chamber isolated from an atmosphere; and a driving mechanism for separating, in said chamber, the mask cassette into a cassette major part and a cover, said driving mechanism being adapted to move after separation the cassette major part and the cover relatively to each other, to position the cassette major part above the cover.
Claim 3
Dependent Claim
19 words
A device according to Claim 1, wherein said driving mechanism is adapted to move the cassette major part vertically.
Claim 4
Dependent Claim
36 words
A device according to Claim 1, wherein said chamber is provided with an inlet for introducing at least one type of gas into said chamber, and a pressure gauge for measuring the pressure in said chamber.
Claim 5
Dependent Claim
18 words
A device according to Claim 3, wherein the gas comprises at least one of nitrogen, helium and argon.
Claim 6
Dependent Claim
47 words
A mask cassette, comprising: a base portion adapted to accommodate and hold, in a mass, at least two X-ray masks; a cover portion effective to close said cassette base portion; and a locking mechanism for coupling said cassette base portion and said cover portion with each other.
Claim 7
Dependent Claim
47 words
A mask cassette, comprising: a base portion adapted to accommodate and hold, in a mass, at least two X-ray masks; a cover portion effective to close said cassette base portion; and a locking mechanism for coupling said cassette base portion and said cover portion with each other.
Claim 8
Dependent Claim
40 words
A cassette according to Claim 5, wherein said cassette base portion and said cover portion can be separated from and coupled with each other only in one direction, and wherein a hermetically sealing member is provided at an abutment therebetween.
Claim 9
Dependent Claim
33 words
A cassette according to Claim 6, wherein, when said cassette base portion and said cover portion are in a coupled state, said hermetically sealing member is resistive at least to and outside pressure.
Claim 10
Dependent Claim
17 words
A cassette according to Claim 5, wherein said cover portion is provided with at least one valve.
Claim 11
Dependent Claim
84 words
Apparatus for use in the manufacture of semiconductor microcircuit devices, which apparatus is associated with the manufacturing step of positioning a mask for X-ray exposure to print the mask pattern onto the semiconductor wafer, said apparatus comprising a chamber with means to enable it to be hermetically sealed and containing a mechanism which in operation enables a two-part cassette for containing a plurality of said masks, to have the first part separated from the second part to enable access to the masks contained therein.
Claim 12
Dependent Claim
84 words
Apparatus for use in the manufacture of semiconductor microcircuit devices, which apparatus is associated with the manufacturing step of positioning a mask for X-ray exposure to print the mask pattern onto the semiconductor wafer, said apparatus comprising a chamber with means to enable it to be hermetically sealed and containing a mechanism which in operation enables a two-part cassette for containing a plurality of said masks, to have the first part separated from the second part to enable access to the masks contained therein.
References Cited (Backward Citations)
No citation records indexed.
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