US5389400A
Expired / Lapsed
US
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Method for making a diamond/carbon/carbon composite useful as an integral dielectric heat sink
Assignee: Applied Sciences Inc
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Filing: 1993-04-07
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Granted: 1995-02-14
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Expires: 2013-04-07
Abstract
Abstract A method for producing a diamond/carbon/carbon composite is provided which includes the steps of densifying a preform of interwoven vapor grown carbon fibers form a carbon/carbon composite, and then depositing a polycrystalline diamond film on the carbon/carbon composite. The preform may be densified by depositing pyrolyric carbon into the interstices of the preform, either by a chemical vapor infiltration process or by a pitch infiltration process. The polycrystalline diamond film is deposited on the carbon/carbon composite by a microwave plasma enhanced chemical vapor deposition process. The resulting diamond/carbon/carbon composite can be utilized as an integral dielectric heat sink by depositing metallic circuits on the diamond layer of the diamond/carbon/carbon composite.
Inventors
- 👤 Jyh-Ming Ting
- 👤 Max L. Lake
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 07:39
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C04B35/00; C04B35/71; C04B35/78; C04B35/80; C04B35/83; C04B41/45; C04B41/50; C04B41/5001; C04B41/5002; C04B41/80; C04B41/81; C04B41/85; C23; C23C; C23C16/00; C23C16/22; C23C16/26; C23C16/27; H; H10; H10W; H10W40/00; H10W40/20; H10W40/25; H10W40/254; Y; Y10; Y10S; Y10S427/00; Y10S427/10; Y10S427/103; Y10T; Y10T428/00; Y10T428/29; Y10T428/2913; Y10T428/2918; Y10T428/292; Y10T428/30; Y10T428/31504; Y10T428/31678
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
60 words
A method of making a diamond/carbon/carbon composite comprising the steps of: a) providing a preform of interwoven vapor grown carbon fibers having interstices therein; b) densifying said preform of interwoven vapor grown carbon fibers by depositing pyrolytic carbon into the interstices of said preform to produce a carbon/carbon composite; and c) depositing a polycrystalline diamond film on said carbon/carbon composite.
Claim 2
Independent Claim
60 words
A method of making a diamond/carbon/carbon composite comprising the steps of: a) providing a preform of interwoven vapor grown carbon fibers having interstices therein; b) densifying said preform of interwoven vapor grown carbon fibers by depositing pyrolytic carbon into the interstices of said preform to produce a carbon/carbon composite; and c) depositing a polycrystalline diamond film on said carbon/carbon composite.
Claim 3
Dependent Claim
15 words
The method of claim 1 wherein said densifying step comprises a chemical vapor infiltration process.
Claim 4
Dependent Claim
27 words
The method of claim 2 wherein said chemical vapor infiltration process is carried out at a temperature range of from about 1000° C. to about 1100° C.
Claim 5
Dependent Claim
27 words
The method of claim 2 wherein said chemical vapor infiltration process is carried out at a pressure range of from about 5 torr to about 40 torr.
Claim 6
Dependent Claim
38 words
The method of claim 2 wherein said chemical vapor infiltration process uses a gaseous mixture of hydrogen gas and hydrocarbon gas, said hydrocarbon gas comprising at least 50% but not more than 75% by volume of said mixture.
Claim 7
Dependent Claim
11 words
The method of claim 5 wherein said hydrocarbon gas is methane.
Claim 8
Dependent Claim
14 words
The method of claim 1 wherein said densifying step comprises a pitch infiltration process.
Claim 9
Dependent Claim
25 words
The method of claim 1 wherein said polycrystalline diamond film is deposited on said carbon/carbon composite by a microwave plasma enhanced chemical vapor deposition process.
Claim 10
Dependent Claim
30 words
The method of claim 8 wherein said microwave plasma enhanced chemical vapor deposition technique is carried out at a temperature range of from about 850° C. to about 1100° C.
Claim 11
Dependent Claim
20 words
The method of claim 1 wherein said polycrystalline diamond is deposited on said carbon/carbon composite by a hot filament process.
Claim 12
Dependent Claim
24 words
The method of claim 10 wherein said hot filament process is carried out at a temperature range of about 850° C. to 1100° C.
Claim 13
Dependent Claim
22 words
The method of claim 10 wherein said hot filament process is carried out at a pressure of about 15 to 50 torr.
Claim 14
Dependent Claim
22 words
The method of claim 1 further including the step of depositing a metallic film on the diamond layer of said diamond/carbon/carbon composite.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-02-13 | 1998-08-15 | 1999-02-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-02-13 | 2002-08-15 | 2003-02-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-02-13 | 2006-08-15 | 2007-02-14 | $7700.00 | Window Closed / Lapsed |