US5203924A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of and apparatus for synthesizing diamondlike thin film
Assignee: Panasonic Holdings Corp
•
Filing: 1990-07-26
•
Granted: 1993-04-20
•
Expires: 2010-07-26
Abstract
Abstract A method of and an apparatus for synthesizing a diamondlike thin film on a substrate, the method comprising the steps of: generating plasma of gas containing hydrocarbon gas, in a first vacuum vessel having an inflow portion and an outflow portion for the gas such that the substrate is provided in a second vacuum vessel maintained at a pressure lower, by one figure or more, than that of the first vacuum vessel due to flow resistance of the gas between the outflow portion and the substrate; and irradiating the plasma onto the substrate by pressure difference between the first vacuum vessel and the second vacuum vessel while an AC power is being applied to at least one of the substrate and an internal electrode provided in the first vacuum vessel.
Inventors
- 👤 Tsutomu Mitani
- 👤 Hirokazu Nakaue
- 👤 Hideo Kurokawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 19:51
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/3244; H01J37/32449; C; C23; C23C; C23C16/00; C23C16/22; C23C16/26; C23C16/44; C23C16/448; C23C16/452; C23C16/54; C23C16/545; H01J37/32009; H01J37/32082; H01J37/32357; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/338; H01J2237/339; Y; Y10; Y10S; Y10S427/00; Y10S427/103; Y10S427/106
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
162 words
An apparatus for synthesizing a diamondlike thin film on a substrate, comprising: a first vacuum vessel which has an inflow portion and an outflow portion for gas containing hydrocarbon gas; a plasma generating means for converting the gas into plasma in said first vacuum vessel; a second vacuum vessel which is coupled with said first vacuum vessel so as to allow the gas to flow between said outflow portion of said first vacuum vessel and said second vacuum vessel and has a pressure lower than that of said first vacuum vessel; said substrate being provided in said second vacuum vessel; a mesh type electrode which is provided upstream of said substrate in a flow path of the gas between said first vacuum vessel and said second vacuum vessel; a voltage applying means for applying a voltage to said mesh type electrode; and a supply means for continuously supplying a clean portion of said mesh type electrode to a front of said substrate.
Claim 2
Independent Claim
162 words
An apparatus for synthesizing a diamondlike thin film on a substrate, comprising: a first vacuum vessel which has an inflow portion and an outflow portion for gas containing hydrocarbon gas; a plasma generating means for converting the gas into plasma in said first vacuum vessel; a second vacuum vessel which is coupled with said first vacuum vessel so as to allow the gas to flow between said outflow portion of said first vacuum vessel and said second vacuum vessel and has a pressure lower than that of said first vacuum vessel; said substrate being provided in said second vacuum vessel; a mesh type electrode which is provided upstream of said substrate in a flow path of the gas between said first vacuum vessel and said second vacuum vessel; a voltage applying means for applying a voltage to said mesh type electrode; and a supply means for continuously supplying a clean portion of said mesh type electrode to a front of said substrate.
Claim 3
Dependent Claim
91 words
An apparatus as claimed in claim 6, further comprising: a removal means for removing the diamondlike thin film synthesized on said mesh type electrode, which is separated from said second vacuum vessel by a partition wall having an opening for passing said mesh type electrode therethrough; wherein the diamondlike thin film synthesized on said mesh type electrode is removed from said mesh type electrode by said removal means such that the clean portion of said mesh type electrode is continuously supplied to the front of said substrate by said supply means.
Claim 4
Dependent Claim
27 words
An apparatus as claimed in claim 2, wherein plasma etching utilizing at least one of oxygen, hydrogen, fluorine and inert elements is employed in said removal means.
Claim 5
Dependent Claim
28 words
An apparatus as claimed in claim 2, wherein ion beam etching utilizing at least one of oxygen, hydrogen, fluorine and inert elements is employed in said removal means.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-04-19 | 1996-10-19 | 1997-04-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-04-19 | 2000-10-19 | 2001-04-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-04-19 | 2004-10-19 | 2005-04-20 | $7700.00 | Window Closed / Lapsed |