US5387312A
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High selective nitride etch
Assignee: Micron Technology Inc
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Filing: 1993-07-09
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Granted: 1995-02-07
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Expires: 2013-07-09
Abstract
Abstract A cleaner, selective etch process wherein NF 3 ions and nitrogen ions are employed to bombard a patterned nitride layer disposed superjacent an oxide layer, thereby creating substantially vertical sidewalls, especially useful when etching submicron features.
Inventors
- 👤 David J. Keller
- 👤 Debra K. Gould
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 13:14
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
100 words
An etch process for improving etch uniformity, comprising the following steps of: bombarding a substrate with an ionized halogen-containing compound, said substrate having a silicon oxide layer and a silicon nitride layer and a patterned mask disposed thereon, said layered substrate is bombarded with NF 3 ions in combination with said ionized halogen-containing compound; and thereafter, bombarding said substrate with a nitrogen plasma, said layered substrate is bombarded with NF 3 ions in combination with said nitrogen plasma, said halogen containing compound and said nitrogen plasma removing unmasked portions of said layer, thereby creating substantially straight sidewalls in said layer.
Claim 2
Dependent Claim
100 words
An etch process for improving etch uniformity, comprising the following steps of: bombarding a substrate with an ionized halogen-containing compound, said substrate having a silicon oxide layer and a silicon nitride layer and a patterned mask disposed thereon, said layered substrate is bombarded with NF 3 ions in combination with said ionized halogen-containing compound; and thereafter, bombarding said substrate with a nitrogen plasma, said layered substrate is bombarded with NF 3 ions in combination with said nitrogen plasma, said halogen containing compound and said nitrogen plasma removing unmasked portions of said layer, thereby creating substantially straight sidewalls in said layer.
Claim 3
Dependent Claim
15 words
The process according to claim 1, wherein said layered substrate is ion bombarded in situ.
Claim 4
Dependent Claim
22 words
The process according to claim 1, wherein said nitrogen ions, said NF 3 ions, and said halogen-containing compound leave essentially no contaminants.
Claim 5
Dependent Claim
16 words
The process according to claim 1, wherein said ions are generated in a reactive ion etcher.
Claim 6
Dependent Claim
22 words
The process according to claim 1, wherein said pattern defines features, said features having a size of approximately 1.0 μm or less.
Claim 7
Dependent Claim
13 words
The process according to claim 1, wherein said ionized halogen-containing compound is chlorine.
Claim 8
Dependent Claim
27 words
The process according to claim 1, wherein an inert gas is added to said ionized halogen-containing compound and said NF 3 , said inert gas being argon.
Claim 9
Dependent Claim
66 words
An etch process having a substantial physical component comprising the following steps of: exposing a semiconductor substrate to a plasma comprising ionized Cl 2 , said substrate having at least one layer of nitride disposed thereon, said Cl 2 ions etching sidewalls in said nitride layer, said sidewalls being substantially normal to said substrate; and thereafter, exposing said semiconductor substrate to ionized nitrogen in a plasma.
Claim 10
Dependent Claim
66 words
An etch process having a substantial physical component comprising the following steps of: exposing a semiconductor substrate to a plasma comprising ionized Cl 2 , said substrate having at least one layer of nitride disposed thereon, said Cl 2 ions etching sidewalls in said nitride layer, said sidewalls being substantially normal to said substrate; and thereafter, exposing said semiconductor substrate to ionized nitrogen in a plasma.
Claim 11
Dependent Claim
22 words
The process of claim 8, wherein said substrate is exposed to ionized NF 3 in combination with said ionized Cl 2 .
Claim 12
Dependent Claim
20 words
The process of claim 9, wherein said substrate is exposed to ionized NF 3 in combination with said ionized nitrogen.
Claim 13
Dependent Claim
32 words
The process of claim 10, wherein said nitride layer is disposed on an oxide layer, said nitride layer being patterned with a photoresist layer, said nitrogen enhancing selectivity to said oxide layer.
Claim 14
Dependent Claim
31 words
The process of claim 11, wherein said ions are generated in at least one of a reactive ion etcher, a magnetically enhanced reactive ion etcher, and a high density source reactor.
Claim 15
Independent Claim
60 words
A method of etching submicron features, said method comprising the following steps of: layering a semiconductor substrate with at least one layer of oxide and at least one layer of nitride; exposing said layered substrate to a first atmosphere, said first atmosphere comprising halogen ions; and exposing said layered substrate to a second atmosphere, said second atmosphere comprising ionized nitrogen.
Claim 16
Independent Claim
60 words
A method of etching submicron features, said method comprising the following steps of: layering a semiconductor substrate with at least one layer of oxide and at least one layer of nitride; exposing said layered substrate to a first atmosphere, said first atmosphere comprising halogen ions; and exposing said layered substrate to a second atmosphere, said second atmosphere comprising ionized nitrogen.
Claim 17
Dependent Claim
30 words
The process of claim 10, wherein said nitride layer is disposed superjacent to an oxide layer, said NF 3 ions and said nitrogen ions producing selectivity to said oxide layer.
Claim 18
Dependent Claim
11 words
The process of claim 13, wherein said halogen ions comprise chlorine.
Claim 19
Dependent Claim
27 words
The method according to claim 13, wherein said first atmosphere and said second atmosphere further comprise fluorine ions, said fluorine ions being generated from NF 3 .
Claim 20
Dependent Claim
16 words
The method according to claim 16, wherein said ions are generated in a reactive ion etcher.
Claim 21
Dependent Claim
24 words
The method according to claim 17, wherein an inert gas is added to said first atmosphere, thereby enhancing etch uniformity of said layered substrate.
Claim 22
Dependent Claim
21 words
The method according to claim 18, wherein said submircon features have geometries in the approximate range of 1.0 μm or less.
Claim 23
Dependent Claim
26 words
The method according to claim 17, wherein said at least one oxide layer and said at least one nitride layer form part of an oxide/nitride/oxide stack.
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