US5386294A
Expired / Lapsed
US
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Pattern position measuring apparatus
Assignee: Nikon Corp
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Filing: 1994-03-21
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Granted: 1995-01-31
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Expires: 2014-03-21
Abstract
Abstract Position of a pattern of a sample placed on a stage is detected by detecting position of a pattern edge. Distortion of the whole sample surface is detected by measuring height of the sample, slope of the surface of the sample at a detected pattern edge position is calculated, and the detected position of the pattern edge is corrected in accordance with the calculated slope.
Inventors
- 👤 Taro Ototake
- 👤 Yasuko Maeda
- 👤 Takakazu Ueki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 15:15
CPC Classifications
G; G03; G03F; G03F9/00
Claims Analysis
Total Claims: 40
Claim 1
Independent Claim
140 words
A pattern position detection apparatus for obtaining the position of a pattern of a sample placed on a stage, by detecting the position of a pattern edge, said pattern position detection apparatus comprising: distortion detection means for detecting distortion of substantially the whole sample surface by measuring height of the sample placed on said stage at points distributed over to dimensions of the whole sample surface before detection of a pattern edge position and without regard to the position of the pattern edge; means for detecting the position of the pattern edge; slope calculating means for calculating, from an output from said distortion detection means, slope of a sample surface at a detected position of the pattern edge; and correction means for correcting the detected position of the pattern edge in accordance with an output from said slope detection means.
Claim 2
Dependent Claim
140 words
A pattern position detection apparatus for obtaining the position of a pattern of a sample placed on a stage, by detecting the position of a pattern edge, said pattern position detection apparatus comprising: distortion detection means for detecting distortion of substantially the whole sample surface by measuring height of the sample placed on said stage at points distributed over to dimensions of the whole sample surface before detection of a pattern edge position and without regard to the position of the pattern edge; means for detecting the position of the pattern edge; slope calculating means for calculating, from an output from said distortion detection means, slope of a sample surface at a detected position of the pattern edge; and correction means for correcting the detected position of the pattern edge in accordance with an output from said slope detection means.
Claim 3
Dependent Claim
93 words
A pattern position detection apparatus according to claim 1, wherein said distortion detection means includes: moving means for moving said stage at predetermined intervals; stage coordinate position detection means for detecting position of said stage; height detection means for detecting height of the sample placed on said stage; and control means for obtaining the height detected by said height detection means corresponding to the position of said stage while monitoring a signal transmitted from said stage coordinate position detection means and while moving said stage by said moving means at said predetermined intervals.
Claim 4
Dependent Claim
39 words
A pattern position detection apparatus according to claim 2, wherein said height detection means detects height of the sample in response to a signal which corresponds to deviation from a focus position detected by a focal point detection means.
Claim 5
Dependent Claim
37 words
A pattern position detection apparatus according to claim 2, wherein said height detection means includes focal point detection means that detects height of the sample by detecting height of an objective lens or height of said stage.
Claim 6
Independent Claim
108 words
A method of detecting pattern position by detecting the position of a pattern edge of a sample placed on a stage, comprising: a first step in which distortion of substantially the whole sample surface is detected by measuring height of the sample placed on said stage; a second step, after said first step is completed, in which a position of the pattern is detected; a third step in which slope of a sample surface at a detected position of the pattern edge is calculated from the detected distortion; and a fourth step in which the detected position the pattern edge is corrected in accordance with the calculated slope.
Claim 7
Independent Claim
108 words
A method of detecting pattern position by detecting the position of a pattern edge of a sample placed on a stage, comprising: a first step in which distortion of substantially the whole sample surface is detected by measuring height of the sample placed on said stage; a second step, after said first step is completed, in which a position of the pattern is detected; a third step in which slope of a sample surface at a detected position of the pattern edge is calculated from the detected distortion; and a fourth step in which the detected position the pattern edge is corrected in accordance with the calculated slope.
Claim 8
Dependent Claim
46 words
A method of detecting pattern position according to claim 5, wherein said first step is performed in such a manner that the height is measured corresponding to position of said stage while moving said stage at predetermined intervals in accordance with positional information of said stage.
Claim 9
Dependent Claim
67 words
A method of detecting pattern position according to claim 23, wherein said first step is performed in such a manner that a distorted contour of a line in a direction X of the sample is approximated from height (z) and positional information (X) of five points in said direction X, by a quartic equation expressed as follows, in which z=a.sub.1 X.sub.4 +a.sub.2 X.sup.3 +a.sub.3 X.sup.2 +a.sub.4 X+a.sub.5.
Claim 10
Dependent Claim
49 words
A method of detecting pattern position according to claim 7, wherein said third step is performed in such a manner that a slope of the sample surface at a detected pattern edge position is obtained by substituting X-directional coordinate values which have been obtained by differentiating said quartic equation.
Claim 11
Dependent Claim
88 words
A method of detecting pattern position according to claim 7, wherein said third step is performed in such a manner that a distorted contour of a line in a direction Y of said sample, which is perpendicular to said direction X, is approximated from height (z) and positional information (Y) of five points in said direction Y, by a quartic equation expressed as follows, in which b 1 , b 2 , b 3 , b 4 and b 5 are constants: z=b.sub.1 Y.sup.4 +b.sub.2 Y.sup.2 +b.sub.4 Y+b.sub.5.
Claim 12
Dependent Claim
50 words
A method of detecting pattern position according to claim 9, wherein said third step is performed in such a manner that a slope of the sample surface at a detected pattern edge position is obtained by substituting Y-directional coordinate values which have been obtained by differentiating the last-recited quartic equation.
Claim 13
Dependent Claim
69 words
A method of detecting pattern position according to claim 5, wherein said first step is performed in such a manner that a distorted contour of a line in a direction X of the sample is approximated by an equation of an arbitrary degree m, which satisfies a relationship m<n-1, where n is an arbitrary number of sample height measuring points along said direction X, using the least square method.
Claim 14
Dependent Claim
48 words
A method of detecting pattern position according to claim 11, wherein said third step is performed in such a manner that a slope of the sample surface at a detected pattern edge position is obtained by substituting X-directional coordinate values which have been obtained by differentiating said equation.
Claim 15
Dependent Claim
76 words
A method of detecting pattern position according to claim 11, wherein said first step is performed in such a manner that a distorted contour of a line in a direction Y of said sample, which is perpendicular to said direction X, is approximated by an equation of an arbitrary degree m, which satisfies a relationship m<n-1, where n is an arbitrary number of sample height measuring points along said direction Y, using the least square method.
Claim 16
Dependent Claim
49 words
A method of detecting pattern position according to claim 13, wherein said third step is performed in such a manner that a slope of the sample surface at a detected pattern edge position is obtained by substituting Y-directional coordinate values which have been obtained by differentiating the last-recited equation.
Claim 17
Dependent Claim
83 words
A method of detecting pattern position according to claim 5, wherein said first step is performed in such a manner that a distorted contour of a line in a direction X of the sample and a line in a direction Y of the sample, which is perpendicular to the direction X, is approximated by an equation expressed by arbitrary function z=f(x, y) relating to height (z) of an arbitrary number of sample height measuring points and positional information (x, y) of said stage.
Claim 18
Dependent Claim
51 words
A method of detecting pattern position according to claim 15, wherein said third step is performed in such a manner that a slope of the sample surface at a detected pattern edge position is obtained by substituting X and Y-directional coordinate values which have been obtained by differentiating said arbitrary function.
Claim 19
Dependent Claim
60 words
A method of detecting pattern position according to claim 5, wherein said first step is performed in such a manner that a distorted contour of the sample is approximated by an equation expressed by arbitrary function z=f (x, y) relating to height (z) of an arbitrary number of sample height measuring points and positional information (x, y) of said stage.
Claim 20
Dependent Claim
51 words
A method of detecting pattern position according to claim 17, wherein said third step is performed in such a manner that a slope of the sample surface at a detected pattern edge position is obtained by substituting X and Y-directional coordinate values which have been obtained by differentiating said arbitrary function.
Claim 21
Dependent Claim
133 words
A pattern position detection apparatus for obtaining the position of a pattern of a sample placed on a stage, by detecting the position of a pattern edge, said pattern position detection apparatus comprising: distortion detection means for detecting distortion of substantially the whole sample surface by measuring height of the sample placed on said stage at predetermined points distributed over two dimensions of the whole sample surface without regard to the position of the pattern edge; means for detecting the position of the pattern edge; slope calculating means for calculating, from an output from said distortion detection means, slope of a sample surface at a detected position of the pattern edge; and correction means for correcting the detected position of the pattern edge in accordance with an output from said slope detection means.
Claim 22
Dependent Claim
133 words
A pattern position detection apparatus for obtaining the position of a pattern of a sample placed on a stage, by detecting the position of a pattern edge, said pattern position detection apparatus comprising: distortion detection means for detecting distortion of substantially the whole sample surface by measuring height of the sample placed on said stage at predetermined points distributed over two dimensions of the whole sample surface without regard to the position of the pattern edge; means for detecting the position of the pattern edge; slope calculating means for calculating, from an output from said distortion detection means, slope of a sample surface at a detected position of the pattern edge; and correction means for correcting the detected position of the pattern edge in accordance with an output from said slope detection means.
Claim 23
Dependent Claim
93 words
A pattern position detection apparatus according to claim 19, wherein said distortion detection means includes: moving means for moving said stage at predetermined intervals; stage coordinate position detection means for detecting position of said stage; height detection means for detecting height of the sample placed on said stage; and control means for obtaining the height detected by said height detection means corresponding to the position of said stage while monitoring a signal transmitted from said stage coordinate position detection means and while moving said stage by said moving means at said predetermined intervals.
Claim 24
Dependent Claim
39 words
A pattern position detection apparatus according to claim 20, wherein said height detection means detects height of the sample in response to a signal which corresponds to deviation from a focus position detected by a focal point detection means.
Claim 25
Dependent Claim
37 words
A pattern position detection apparatus according to claim 20, wherein said height detection means includes focal point detection means that detects height of the sample by detecting height of an objective lens or height of said stage.
Claim 26
Independent Claim
101 words
A method of detecting pattern position by detecting the position of a pattern edge of a sample placed on a stage, comprising: detecting distortion of substantially the whole sample surface by measuring height of the sample placed on said stage at predetermined points distributed over two dimensions of the whole sample surface without regard to the position of the pattern edge; detecting a position of the pattern edge; calculating slope of a sample surface at a detected position of the pattern edge from the detected distortion; and correcting the detected position of the pattern edge in accordance with the calculated slope.
Claim 27
Independent Claim
101 words
A method of detecting pattern position by detecting the position of a pattern edge of a sample placed on a stage, comprising: detecting distortion of substantially the whole sample surface by measuring height of the sample placed on said stage at predetermined points distributed over two dimensions of the whole sample surface without regard to the position of the pattern edge; detecting a position of the pattern edge; calculating slope of a sample surface at a detected position of the pattern edge from the detected distortion; and correcting the detected position of the pattern edge in accordance with the calculated slope.
Claim 28
Dependent Claim
47 words
A method of detecting pattern position according to claim 23, wherein said detecting of distortion is performed in such a manner that the height is measured corresponding to position of said stage while moving said stage at predetermined intervals in accordance with positional information of said stage.
Claim 29
Dependent Claim
85 words
A method of detecting pattern position according to claim 23, wherein said detecting of distortion is performed in such a manner that a distorted contour of a line in a direction X of the sample is approximated from height (z) and positional information (X) of five points in said direction X, by a quartic equation expressed as follows, in which a 1 , a 2 , a 3 , a 4 , and a 5 are constants: z=a.sub.1 X.sub.4 +a.sub.2 X.sup.3 +a.sub.3 X.sup.2 +a.sub.4 X+a.sub.5.
Claim 30
Dependent Claim
48 words
A method of detecting pattern position according to claim 25, wherein said calculating is performed in such a manner that a slope of the sample surface at a detected pattern edge position is obtained by substituting X-directional coordinate values which have been obtained by differentiating said quartic equation.
Claim 31
Dependent Claim
89 words
A method of detecting pattern position according to claim 25, wherein said detecting of distortion is performed in such a manner that a distorted contour of a line in a direction Y of said sample, which is perpendicular to said direction X, is approximated from height (z) and positional information (Y) of five points in said direction Y, by a quartic equation expressed as follows, in which b 1 , b 2 , b 3 , b 4 and b 5 are constants: z=b.sub.1 Y.sup.4 +b.sub.2 Y.sup.3 +b.sub.4 Y+b.sub.5.
Claim 32
Dependent Claim
49 words
A method of detecting pattern position according to claim 27, wherein said calculating is performed in such a manner that a slope of the sample surface at a detected pattern edge position is obtained by substituting Y-directional coordinate values which have been obtained by differentiating the last-recited quartic equation.
Claim 33
Dependent Claim
70 words
A method of detecting pattern position according to claim 23, wherein said detecting of distortion is performed in such a manner that a distorted contour of a line in a direction X of the sample is approximated by an equation of an arbitrary degree m, which satisfies a relationship m<n-1, where n is an arbitrary number of sample height measuring points along said direction X, using the least square method.
Claim 34
Dependent Claim
47 words
A method of detecting pattern position according to claim 29, wherein said calculating is performed in such a manner that a slope of the sample surface at a detected pattern edge position is obtained by substituting X-directional coordinate values which have been obtained by differentiating said equation.
Claim 35
Dependent Claim
77 words
A method of detecting pattern position according to claim 29, wherein said detecting of distortion is performed in such a manner that a distorted contour of a line in a direction Y of said sample, which is perpendicular to said direction X, is approximated by an equation of an arbitrary degree m, which satisfies a relationship m<n-1, where n is an arbitrary number of sample height measuring points along said direction Y, using the least square method.
Claim 36
Dependent Claim
48 words
A method of detecting pattern position according to claim 31, wherein said calculating is performed in such a manner that a slope of the sample surface at a detected pattern edge position is obtained by substituting Y-directional coordinate values which have been obtained by differentiating the last-recited equation.
Claim 37
Dependent Claim
84 words
A method of detecting pattern position according to claim 23, wherein said detecting of distortion is performed in such a manner that a distorted contour of a line in a direction X of the sample and a line in a direction Y of the sample, which is perpendicular to the direction X, is approximated by an equation expressed by arbitrary function z=f(x, y) relating to height (z) of an arbitrary number of sample height measuring points and positional information (x, y) of said stage.
Claim 38
Dependent Claim
50 words
A method of detecting pattern position according to claim 33, wherein said calculating is performed in such a manner that a slope of the sample surface at a detected pattern edge position is obtained by substituting X and Y-directional coordinate values which have been obtained by differentiating said arbitrary function.
Claim 39
Dependent Claim
60 words
A method of detecting pattern position according to claim 23, wherein said detecting of distortion is performed in such a manner that a distorted contour of the sample is approximated by an equation expressed by arbitrary function z=f(x, y) relating to height (z) of an arbitrary number of sample height measuring points and positional information (x, y) of said stage.
Claim 40
Dependent Claim
50 words
A method of detecting pattern position according to claim 35, wherein said calculating is performed in such a manner that a slope of the sample surface at a detected pattern edge position is obtained by substituting X and Y-directional coordinate values which have been obtained by differentiating said arbitrary function.
References Cited (Backward Citations)
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