Alignment and exposure apparatus

Claim 2

A step-and-repeat type projection exposure apparatus for projecting a device pattern of a reticle on different zones of a workpiece in sequence through a projection optical system, wherein said apparatus comprises: a reticle holder for holding the reticle; a workpiece holder for holding the workpiece; a movable stage for holding the workpiece holder; wherein said workpiece holder has a plurality of recording areas each being provided by a magneto-optical material, a photochromic material, or a photosensitive material, the recording areas being located around the periphery of the workpiece held by said workpiece holder, wherein said movable stage is adapted to move said workpiece holder so that on each of the recording areas an image of a mark of the reticle is projected and thus recorded through the projection optical system; and detecting means for detecting the images recorded on the recording areas of said workpiece holder and means for determining, on the basis of obtained data, the coordinates of the pattern array on the workpiece for step-and-repeat exposures of the workpiece.

Claim 3

An apparatus according to claim 1, wherein the reticle has four-marks located substantially equidistantly around said workpiece holding means.

Claim 4

An apparatus according to claim 1, wherein the surface of each recording area is set at substantially the same level as the surface of the workpiece.

Claim 5

An apparatus according to claim 1, further comprising erasing means for erasing the image recorded on the plurality of recording areas.

Claim 6

A semiconductor manufacturing method for use with a step-and-repeat type projection exposure apparatus having an original holder for holding an original with a device pattern and a plurality of marks, a workpiece holder for holding the workpiece having different zones, and a movable stage for holding the workpiece holder, the method comprising steps of: providing on the workpiece holder a plurality of recording areas at sites around the periphery of the workpiece as it is held by the workpiece holder, wherein each of said recording areas is provided by at least one of a magneto-optical material, a photochromic material, and a photosensitive material; projecting the device pattern of the original on the different zones of the workpiece in sequence while moving the workpiece holder through the movable stage; recording on each recording area an image related to at least one of the marks of the original, while moving the workpiece holder through the movable stage; detecting the images recorded on the recording areas, sequentially; and controlling the motion of the movable stage for step-and-repeat exposures of the workpiece, on the basis of data produced through said detection step.

Claim 7

A semiconductor manufacturing method for use with a step-and-repeat type projection exposure apparatus having an original holder for holding an original with a device pattern and a plurality of marks, a workpiece holder for holding the workpiece having different zones, and a movable stage for holding the workpiece holder, the method comprising steps of: providing on the workpiece holder a plurality of recording areas at sites around the periphery of the workpiece as it is held by the workpiece holder, wherein each of said recording areas is provided by at least one of a magneto-optical material, a photochromic material, and a photosensitive material; projecting the device pattern of the original on the different zones of the workpiece in sequence while moving the workpiece holder through the movable stage; recording on each recording area an image related to at least one of the marks of the original, while moving the workpiece holder through the movable stage; detecting the images recorded on the recording areas, sequentially; and controlling the motion of the movable stage for step-and-repeat exposures of the workpiece, on the basis of data produced through said detection step.

Claim 8

A method according to claim 5, wherein the surface of each recording area is set at substantially the same level as the surface of the workpiece.

Claim 9

A method according to claim 5, further comprising the step of erasing the images recorded on the recording areas.

Claim 10

A projection exposure apparatus for projecting a device pattern of a reticle on different zones of a workpiece in sequence, said apparatus comprising: a reticle holder for holding the reticle; a workpiece holder for holding the workpiece; a movable stage for holding said workpiece holder; wherein said workpiece holder has a plurality of recording areas each being provided by at least one of a magneto-optical material, a photochromic material, and a photosensitive material, said recording areas being located around the periphery of the workpiece held by said workpiece holder; wherein said movable stage is adapted to move said workpiece holder so that on each of said recording areas an image of a mark of the reticle is projected and thus recorded; and detecting means for detecting the images recorded on said recording areas of said workpiece holder, and for determining, on the basis of obtained data, the coordinates of a pattern array on the workpiece for exposures of different zones of the workpiece in sequence.

Claim 11

A projection exposure apparatus for projecting a device pattern of a reticle on different zones of a workpiece in sequence, said apparatus comprising: a reticle holder for holding the reticle; a workpiece holder for holding the workpiece; a movable stage for holding said workpiece holder; wherein said workpiece holder has a plurality of recording areas each being provided by at least one of a magneto-optical material, a photochromic material, and a photosensitive material, said recording areas being located around the periphery of the workpiece held by said workpiece holder; wherein said movable stage is adapted to move said workpiece holder so that on each of said recording areas an image of a mark of the reticle is projected and thus recorded; and detecting means for detecting the images recorded on said recording areas of said workpiece holder, and for determining, on the basis of obtained data, the coordinates of a pattern array on the workpiece for exposures of different zones of the workpiece in sequence.

Claim 12

An apparatus according to claim 8, wherein the reticle has four marks located substantially equidistantly around said workpiece holder.

Claim 13

An apparatus according to claim 8, wherein the surface of each recording area is set at substantially the same level as the surface of the workpiece.

Claim 14

An apparatus according to claim 8, further comprising erasing means for erasing the images recorded on said recording areas.

Claim 15

A semiconductor device manufacturing method for use with a projection exposure apparatus having an original holder for holding an original with a device pattern and a plurality of marks, a workpiece holder for holding the workpiece having different zones, and a movable stage for holding the workpiece holder, said method comprising the steps of: providing on the workpiece holder a plurality of recording areas at sites around the periphery of the workpiece as the workpiece is held by the workpiece holder, wherein each of the recording areas is provided by at least one of a magneto-optical material, a photochromic material, and a photosensitive material; projecting the device pattern of the original on the different zones of the workpiece in sequence while moving the workpiece holder with the movable stage; recording on each recording area an image related to at least one of the marks of the original, while moving the workpiece holder with the movable stage; detecting the images recorded on the recording areas, sequentially; and controlling the motion of the movable stage for exposures of the workpiece, on the basis of data produced by said detecting step.

Claim 16

A semiconductor device manufacturing method for use with a projection exposure apparatus having an original holder for holding an original with a device pattern and a plurality of marks, a workpiece holder for holding the workpiece having different zones, and a movable stage for holding the workpiece holder, said method comprising the steps of: providing on the workpiece holder a plurality of recording areas at sites around the periphery of the workpiece as the workpiece is held by the workpiece holder, wherein each of the recording areas is provided by at least one of a magneto-optical material, a photochromic material, and a photosensitive material; projecting the device pattern of the original on the different zones of the workpiece in sequence while moving the workpiece holder with the movable stage; recording on each recording area an image related to at least one of the marks of the original, while moving the workpiece holder with the movable stage; detecting the images recorded on the recording areas, sequentially; and controlling the motion of the movable stage for exposures of the workpiece, on the basis of data produced by said detecting step.

Claim 17

A method according to claim 12, wherein the surface of each recording area is set at substantially the same level as the surface of the workpiece.

Claim 18

A method according to claim 12, further comprising the step of erasing the images recorded on the recording areas.