US5384267A
Expired / Lapsed
US
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Method of forming infrared detector by hydrogen plasma etching to form refractory metal interconnects
Assignee: OL Security LLC
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Filing: 1993-10-19
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Granted: 1995-01-24
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Expires: 2013-10-19
Abstract
Abstract A metal interconnect fabrication process for hybrid solid state systems such as thermal imaging system (50). A plurality of vias (62) are formed in a focal plane array (60) between the thermal sensors (20) to expose a corresponding array of contact pads (84) on a silicon processor (80) bonded to the focal plane array (60). A metal film layer (30) is disposed on the focal plane array (60) to fill the vias (62). Photoresist material (32) is patterned on the metal layer (30) to correspond with the desired sensor signal flow path. With the photoresist material (32) still in place, the metal layer (30) is dry etched to produce the desired metal interconnect pattern by removing portions of the metal layer (30) unprotected by the photoresist material (32).
Inventors
- 👤 Larry D. Hutchins
- 👤 Rudy L. York
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 07:36
CPC Classifications
H; H10; H10F; H10F39/00; H10F39/10; H10F39/12; H10F39/18; H10F39/184; H10F39/1843; H10F77/00; H10F77/20; H10F77/206; H10W; H10W20/00; H10W20/01; H10W20/021; H10W20/023; H10W20/0234; H10W20/20; H10W72/00; H10W72/20
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
95 words
A method of fabricating a metal interconnect pattern for use in electrically coupling two component structures in a hybrid solid state system comprising the steps of: forming a metal film layer wherein metal is a refractory metal or refractory metal alloy, on at least one of the component structures; placing a pattern of photoresist material on the metal layer with the photoresist pattern corresponding to the desired metal interconnect pattern; placing the component structure in an RF chamber; and dry etching the metal film layer with hydrogen plasma to form the desired metal interconnect pattern.
Claim 2
Independent Claim
95 words
A method of fabricating a metal interconnect pattern for use in electrically coupling two component structures in a hybrid solid state system comprising the steps of: forming a metal film layer wherein metal is a refractory metal or refractory metal alloy, on at least one of the component structures; placing a pattern of photoresist material on the metal layer with the photoresist pattern corresponding to the desired metal interconnect pattern; placing the component structure in an RF chamber; and dry etching the metal film layer with hydrogen plasma to form the desired metal interconnect pattern.
Claim 3
Dependent Claim
23 words
The method of claim 1 wherein the dry etching step applies the hydrogen plasma with a carrier gas of either argon or helium.
Claim 4
Dependent Claim
57 words
The method of claim 1 wherein said dry etching step further comprises: the hydrogen plasma forming a hydrogen radical in the RF chamber; a reaction between the hydrogen radical and the exposed portions of the metal layer to form a volatile metal hydride; and providing a vacuum in the RF chamber for removal of the metal hydride.
Claim 5
Dependent Claim
11 words
The method of claim 1, wherein the metal film comprises indium.
Claim 6
Dependent Claim
19 words
The method of claim 1 wherein the dry etching step is performed at a temperature less than 100° C.
Claim 7
Independent Claim
154 words
A method of fabricating a thermal imaging system having a plurality of infrared detector elements disposed on a silicon processor with an array of contact pads comprising the steps of: mounting a plurality of HgCdTe semiconductor bars on the surface of the silicon processor to form each infrared detector element adjacent to its associated contact pads; forming a via between each infrared detector element to correspond with its associated contact pad; positioning a storage gate on the top of each semiconductor bar with an insulating layer therebetween; forming a layer of metal wherein the metal is a refractory metal or refractory metal alloy on the focal plane array to cover each storage gate and to fill each via; placing layers of photoresist material at selected locations on the layer of metal; and dry etching the metal layer with hydrogen plasma to form metal connectors extending from each storage gate to its associated contact pad.
Claim 8
Independent Claim
154 words
A method of fabricating a thermal imaging system having a plurality of infrared detector elements disposed on a silicon processor with an array of contact pads comprising the steps of: mounting a plurality of HgCdTe semiconductor bars on the surface of the silicon processor to form each infrared detector element adjacent to its associated contact pads; forming a via between each infrared detector element to correspond with its associated contact pad; positioning a storage gate on the top of each semiconductor bar with an insulating layer therebetween; forming a layer of metal wherein the metal is a refractory metal or refractory metal alloy on the focal plane array to cover each storage gate and to fill each via; placing layers of photoresist material at selected locations on the layer of metal; and dry etching the metal layer with hydrogen plasma to form metal connectors extending from each storage gate to its associated contact pad.
Claim 9
Dependent Claim
20 words
The method of claim 6, wherein said dry etching step further comprises a methyl alkyl etch in an RF chamber.
Claim 10
Dependent Claim
27 words
The method of claim 6, wherein said dry etching step applies the hydrogen plasma with a carrier gas of either argon or helium in an RF chamber.
Claim 11
Dependent Claim
33 words
The method of claim 6 further comprising the preliminary step of forming a via between adjacent bars of semiconductor material to allow access to at least a portion of the associated contact pad.
Claim 12
Independent Claim
106 words
A method of fabricating a metal interconnect pattern for use in electrically coupling a focal plane array having a plurality of thermal sensors with a silicon processor having an array of contact pads comprising the steps of: forming a metal film layer wherein the metal is a refractory metal or refractory metal alloy on the focal plane array; placing a pattern of photoresist material on the metal film layer with the photoresist pattern corresponding to the desired metal interconnect pattern; placing the focal plane array in an RF chamber; and dry etching the metal film layer with hydrogen plasma to form the desired metal interconnect pattern.
Claim 13
Independent Claim
106 words
A method of fabricating a metal interconnect pattern for use in electrically coupling a focal plane array having a plurality of thermal sensors with a silicon processor having an array of contact pads comprising the steps of: forming a metal film layer wherein the metal is a refractory metal or refractory metal alloy on the focal plane array; placing a pattern of photoresist material on the metal film layer with the photoresist pattern corresponding to the desired metal interconnect pattern; placing the focal plane array in an RF chamber; and dry etching the metal film layer with hydrogen plasma to form the desired metal interconnect pattern.
Claim 14
Dependent Claim
23 words
The method of claim 10 wherein the dry etching step applies the hydrogen plasma with a carrier gas of either argon or helium.
Claim 15
Dependent Claim
57 words
The method of claim 10 wherein said dry etching step further comprises: forming a hydrogen radical from the hydrogen plasma in the RF chamber; a reaction between the hydrogen radical and the exposed portions of the metal layer to form a volatile metal hydride; and providing a vacuum in the RF chamber to remove the metal hydride.
Claim 16
Dependent Claim
21 words
The method of claim 10 further comprising the step of forming the film layer on the focal plane array from indium.
Claim 17
Dependent Claim
19 words
The method of claim 10 wherein the dry etching step is performed at a temperature less than 100° C.
Claim 18
Dependent Claim
26 words
The method of claim 10 further comprising the step of stripping the photoresist material from the metal interconnect pattern following completion of the dry etching step.
Claim 19
Dependent Claim
67 words
The method of claim 10 further comprising the steps of: forming an array of indium bumps on the surface of the silicon processor for electrically coupling the focal plane array with the silicon processor; forming the film layer on the focal plane array from indium; and placing the photoresist material on the indium film layer in a pattern corresponding to the indium bumps on the silicon processor.
Claim 20
Independent Claim
104 words
A method of fabricating a metal interconnect pattern for use in electrically coupling a focal plane array having a plurality of thermal sensors with a silicon processor having an array of contact pads comprising the steps of: forming a metal film layer wherein the metal is a refractory metal or refractory metal alloy on the silicon processor; placing a pattern of photoresist material on the metal film layer with the photoresist pattern corresponding to the desired metal interconnect pattern; placing the silicon processor in an RF chamber; and dry etching the metal film layer with hydrogen plasma to form the desired metal interconnect pattern.
Claim 21
Independent Claim
104 words
A method of fabricating a metal interconnect pattern for use in electrically coupling a focal plane array having a plurality of thermal sensors with a silicon processor having an array of contact pads comprising the steps of: forming a metal film layer wherein the metal is a refractory metal or refractory metal alloy on the silicon processor; placing a pattern of photoresist material on the metal film layer with the photoresist pattern corresponding to the desired metal interconnect pattern; placing the silicon processor in an RF chamber; and dry etching the metal film layer with hydrogen plasma to form the desired metal interconnect pattern.
Claim 22
Dependent Claim
23 words
The method of claim 17 wherein the dry etching step applies the hydrogen plasma with a carrier gas of either argon or helium.
Claim 23
Dependent Claim
57 words
The method of claim 17 wherein said dry etching step further comprises: forming a hydrogen radical from the hydrogen plasma in the RF chamber; a reaction between the hydrogen radical and the exposed portions of the metal layer to form a volatile metal hydride; and providing a vacuum in the RF chamber to remove the metal hydride.
Claim 24
Dependent Claim
11 words
The method of claim 17, wherein the metal film comprises indium.
Claim 25
Dependent Claim
19 words
The method of claim 17 wherein the dry etching step is performed at a temperature less than 100° C.
Claim 26
Dependent Claim
26 words
The method of claim 17 further comprising the step of stripping the photoresist material from the metal interconnect pattern following completion of the dry etching step.
Claim 27
Dependent Claim
72 words
The method of claim 17 further comprising the steps of: forming an array of indium bumps on the surface of the focal plane array for electrically coupling the thermal sensors of the focal plane array with the silicon processor; forming the film layer on the silicon processor from indium; and placing the photoresist material on the indium film layer in a pattern corresponding to the indium bumps on the focal plane array.
Claim 28
Independent Claim
135 words
A method of fabricating a metal interconnect pattern for use in electrically coupling two component structures in a hybrid solid state system comprising the steps of: forming a metal film layer comprised of a refractory metal or refractory metal alloy on at least one of the component structures; placing a pattern of photoresist material on the refractory metal layer with the photoresist pattern corresponding to the desired metal interconnect pattern; placing the component structure in an RF chamber; dry etching the metal film layer with hydrogen plasma to form the desired metal interconnect pattern by forming a hydrogen radical in the RF chamber; reacting the hydrogen radical and the exposed portions of the metal layer to form a volatile metal hydride; and providing a vacuum in the RF chamber for removal of the metal hydride.
Claim 29
Independent Claim
135 words
A method of fabricating a metal interconnect pattern for use in electrically coupling two component structures in a hybrid solid state system comprising the steps of: forming a metal film layer comprised of a refractory metal or refractory metal alloy on at least one of the component structures; placing a pattern of photoresist material on the refractory metal layer with the photoresist pattern corresponding to the desired metal interconnect pattern; placing the component structure in an RF chamber; dry etching the metal film layer with hydrogen plasma to form the desired metal interconnect pattern by forming a hydrogen radical in the RF chamber; reacting the hydrogen radical and the exposed portions of the metal layer to form a volatile metal hydride; and providing a vacuum in the RF chamber for removal of the metal hydride.
Claim 30
Dependent Claim
34 words
The method of claim 24 further comprising the step of forming the metal film layer on the component structure from the group consisting of aluminum, indium, lead, titanium, tungsten, tantalum, molybdenum and alloys thereof.
Claim 31
Dependent Claim
27 words
The method of claim 1, wherein the metal film layer is selected from the group consisting of indium, lead, aluminum, titanium, tungsten, tantalum, molybdenum, and alloys thereof.
Claim 32
Dependent Claim
25 words
The method of claim 6, wherein the metal is selected from the group consisting of indium, lead, aluminum, titanium, tungsten, tantalum, molybdenum, and alloys thereof.
Claim 33
Dependent Claim
27 words
The method of claim 10, wherein the metal film layer is selected from the group consisting of indium, lead, aluminum, titanium, tungsten, tantalum, molybdenum, and alloys thereof.
Claim 34
Dependent Claim
27 words
The method of claim 17, wherein the metal film layer is selected from the group consisting of indium, lead, aluminum, titanium, tungsten, tantalum, molybdenum, and alloys thereof.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-01-23 | 1998-07-25 | 1999-01-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-01-23 | 2002-07-25 | 2003-01-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-01-23 | 2006-07-25 | 2007-01-24 | $7700.00 | Window Closed / Lapsed |