Patent US5382803A successfully refreshed from Google Patents.
US5382803A
Expired / Lapsed
US
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Ion injection device
Assignee: Tokyo Electron Ltd
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Filing: 1992-05-28
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Granted: 1995-01-17
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Expires: 2012-05-28
Abstract
Abstract An ion injection device comprises a rotatable holding table for holding a semiconductor wafer, a rotary driving mechanism for rotating the holding table, and a detection device for detecting the position of the wafer. The holding table has a holding portion for electrostatically holding the wafer, and an electrode unit located below the holding portion substantially in parallel with an upper surface of the same. The holding portion is made of a dielectric member, and the electrode unit includes a plurality of electrodes separated from one another. The ion injection device further comprises a power source for applying voltage between the electrodes, a control device for controlling the application and interruption of voltage between the electrodes, and an ion injection unit for injecting ions into the wafer.
Inventors
- 👤 Teruo Asakawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:08
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/317; H01J37/3171; H10; H10P; H10P72/00; H10P72/70; H10P72/72; H10P72/722; H10P72/04; H10P72/0451; H10P72/0466; H10P72/06; H10P72/0606; H10P72/30; H10P72/33; H10P72/3302; H10P72/3306; H10P72/50; H10P72/53; H10P72/78; Y; Y10; Y10T; Y10T279/00; Y10T279/23
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
164 words
A position detecting device comprising: a vacuum chamber in which an atmosphere is evacuated; a rotatable holding table provided in the vacuum chamber for holding a semiconductor wafer thereon; rotary driving means for rotating the holding table; detection means for detecting the position of the wafer; a holding portion provided on the holding table for electrostatically holding the wafer, the holding portion being made of a dielectric member; an electrode unit located below the holding portion substantially in parallel with an upper surface of the holding portion, the electrode unit having a plurality of electrodes separated from one another, the electrode unit including terminals; voltage application means for applying voltage between the electrodes through the terminals; control means for controlling the application and interruption of voltage between the electrodes; and means for isolating the terminals from the vacuum in the vacuum chamber to maintain the terminals at a pressure greater than that in the vacuum chamber and thereby prevent vacuum discharge across the terminals.
Claim 2
Dependent Claim
164 words
A position detecting device comprising: a vacuum chamber in which an atmosphere is evacuated; a rotatable holding table provided in the vacuum chamber for holding a semiconductor wafer thereon; rotary driving means for rotating the holding table; detection means for detecting the position of the wafer; a holding portion provided on the holding table for electrostatically holding the wafer, the holding portion being made of a dielectric member; an electrode unit located below the holding portion substantially in parallel with an upper surface of the holding portion, the electrode unit having a plurality of electrodes separated from one another, the electrode unit including terminals; voltage application means for applying voltage between the electrodes through the terminals; control means for controlling the application and interruption of voltage between the electrodes; and means for isolating the terminals from the vacuum in the vacuum chamber to maintain the terminals at a pressure greater than that in the vacuum chamber and thereby prevent vacuum discharge across the terminals.
Claim 3
Dependent Claim
36 words
The ion injection device according to claim 1, wherein the electrode unit has at least three electrodes, and the voltage application means has means for continuously applying voltage between at least one pair of the electrodes.
Claim 4
Dependent Claim
18 words
The ion injection device according to claim 2, wherein the voltage application means includes a three-phase-current power source.
Claim 5
Dependent Claim
40 words
A position detecting device according to claim 1, further comprising: a hollow member which with the holding table defines an enclosed space communicating with an outer atmosphere and in which the terminals are disposed and exposed to said outer atmosphere.
Claim 6
Dependent Claim
137 words
A transfer device comprising: a holding member for holding an object to be transferred; a holding portion provided on the holding member for electrostatically holding the object, the holding portion being made of a dielectric member; an electrode unit located below the holding portion substantially in parallel with an upper surface of the holding portion, the electrode unit having a plurality of electrodes separated from one another; voltage application means for applying voltage between the electrodes; control means for controlling the application and interruption of voltage between the electrodes; a chamber containing the holding member, which can be evacuated to create a vacuum state therein; pressure detection means for detecting pressure in the chamber; and interlock means for interrupting the supply of voltage between the electrodes when the pressure in the chamber falls within a predetermined range.
Claim 7
Dependent Claim
137 words
A transfer device comprising: a holding member for holding an object to be transferred; a holding portion provided on the holding member for electrostatically holding the object, the holding portion being made of a dielectric member; an electrode unit located below the holding portion substantially in parallel with an upper surface of the holding portion, the electrode unit having a plurality of electrodes separated from one another; voltage application means for applying voltage between the electrodes; control means for controlling the application and interruption of voltage between the electrodes; a chamber containing the holding member, which can be evacuated to create a vacuum state therein; pressure detection means for detecting pressure in the chamber; and interlock means for interrupting the supply of voltage between the electrodes when the pressure in the chamber falls within a predetermined range.
Claim 8
Dependent Claim
35 words
The transfer device according to claim 5, wherein the electrode unit has at least three electrodes, and the voltage application means has means for continuously applying voltage between at least one pair of the electrodes.
Claim 9
Dependent Claim
17 words
The transfer device according to claim 6, wherein the voltage application means includes a three-phase-current power source,
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-01-16 | 1998-07-18 | 1999-01-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-01-16 | 2002-07-18 | 2003-01-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-01-16 | 2006-07-18 | 2007-01-17 | $7700.00 | Window Closed / Lapsed |