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US5381300A
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US
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Capacitive micro-sensor with a low stray capacity and manufacturing method
Assignee: Thales Avionics SAS
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Filing: 1993-02-19
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Granted: 1995-01-10
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Expires: 2013-02-19
Abstract
Abstract A capacitive micro-sensor includes a sandwich of three silicon wafers, a peripheral stripe of each surface of the central plate being assembled to a corresponding stripe of an opposing external plate through an insulating layer. At least one of the external plates forms a first electrode, the central plate forms a second electrode and at least one portion of the central plate forms a variable capacity with at least one of the external layers. At least one of the insulating layers is formed by a sandwich of a first insulating layer, a conductive layer and a second insulating layer, the conductive layer being associated with connection means.
Inventors
- 👤 Isabelle Thomas
- 👤 Pierre O. Lefort
- 👤 Christophe Legoux
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 21:01
CPC Classifications
G; G01; G01P; G01P15/00; G01P15/02; G01P15/08; G01P15/125; G01L; G01L9/00; G01L9/0041; G01L9/0072; G01L9/0073; G01P15/0802; G01P2015/0805; G01P2015/0822; G01P2015/0825; G01P2015/0828
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
116 words
A capacitive micro-sensor including a sandwich of three silicon wafers (1,2,3), a peripheral stripe of each surface of the central plate being assembled to a corresponding stripe of an opposing external plate through an insulating layer (5,6), at least one of said external plates forming a first electrode (22,23), the central plate forming a second electrode (21) and at least one portion of said central plate forming a variable capacity with at least one of said external plates, wherein at least one of said insulating layers is formed by a sandwich of a first insulating layer (5-1,6-1), a conductive layer (5-2,6-2) and a second insulating layer (5-3,6-3), said conductive layer being associated with connection means (25,26).
Claim 2
Dependent Claim
116 words
A capacitive micro-sensor including a sandwich of three silicon wafers (1,2,3), a peripheral stripe of each surface of the central plate being assembled to a corresponding stripe of an opposing external plate through an insulating layer (5,6), at least one of said external plates forming a first electrode (22,23), the central plate forming a second electrode (21) and at least one portion of said central plate forming a variable capacity with at least one of said external plates, wherein at least one of said insulating layers is formed by a sandwich of a first insulating layer (5-1,6-1), a conductive layer (5-2,6-2) and a second insulating layer (5-3,6-3), said conductive layer being associated with connection means (25,26).
Claim 3
Dependent Claim
21 words
The capacitive micro-sensor of claim 1 forming an accelerometer, wherein said portion of the central plate forms an inertia block (8)
Claim 4
Dependent Claim
68 words
The capacitive micro-sensor of claim 1 forming a pressure sensor, wherein the lower plate includes a thinner portion (11) forming a diaphragm, said central plate including a stud (12) mounted onto said diaphragm, and a stripe extending between said stud and a peripheral portion of said central plate, said stripe forming with said upper plate a capacitive resonator whose characteristics vary as a function of the applied pressure.
Claim 5
Dependent Claim
21 words
The capacitive micro-sensor of claim 1 , wherein said conductive layer is set to the reference voltage of the central plate.
Claim 6
Dependent Claim
24 words
The capacitive micro-sensor of claim 1, wherein said first and second insulating layers are of silicon oxide and said conductive layer is of polysilicon.
Claim 7
Dependent Claim
25 words
The capacitive micro-sensor of claim 1, wherein said first and second insulating layers are of silicon oxide and said conductive layer is of single-crystal silicon.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-01-09 | 1998-07-11 | 1999-01-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-01-09 | 2002-07-11 | 2003-01-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-01-09 | 2006-07-11 | 2007-01-10 | $7700.00 | Window Closed / Lapsed |