US5380679A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for forming a multilayer wiring conductor structure in semiconductor device
Assignee: NEC Electronics Corp
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Filing: 1993-10-04
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Granted: 1995-01-10
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Expires: 2013-10-04
Abstract
Abstract In a process for forming a multilayer wiring conductor structure, an interlayer insulator film is deposited on a surface including an upper surface of a lower layer wiring conductor, and the deposited interlayer insulator film is planarized so as to expose the upper surface of the lower layer wiring conductor. Then, a bonding metal film is deposited on a surface of the interlayer insulator film exposing the upper surface of the lower layer wiring conductor, and a photoresist film is coated on the bonding metal film and patterned. By using the patterned photoresist, a hole for formation of a connection pillar between the lower layer wiring conductor and a possible upper layer wiring conductor and a patterning of the bonding metal film are simultaneously formed. Accordingly, the bonding metal film can be formed and patterned on the upper surface of the lower layer wiring conductor without increasing the photolithography steps.
Inventors
- 👤 Isao Kano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 05:10
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/063; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/948
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
395 words
A process for forming a multilayer wiring conductor structure in a semiconductor device, comprising the steps of: forming a power supply film for plating on an insulator film formed on a semiconductor substrate; coating a first photoresist film on said power supply film and patterning said first photoresist film to form a first mask having a pattern for a lower layer wiring conductor formation; depositing a metal film on said power supply film by a plating process using said first mask so as to form a lower layer wiring conductor; removing said first mask; selectively removing said power supply film by using said lower layer wiring conductor as a mask; depositing a first interlayer insulator film on a surface including said lower layer wiring conductor; etching back said deposited first interlayer insulator film so as to planarize said first interlayer insulator film and to expose an upper surface of said lower layer wiring conductor; depositing a bonding metal film on a surface including said upper surface of said lower layer wiring conductor; coating a second photoresist film on said bonding metal layer and patterning said second photoresist film to form a second mask having a hole for formation of a connection pillar between said lower layer wiring conductor and a possible upper layer wiring conductor and a pattern for separation of said bonding metal film; selectively etching said bonding metal film by using said second mask so as to remove said bonding metal film within said hole for formation of a connection pillar and to remove said bonding metal film from a region other than a region above said lower layer wiring conductor; depositing a metal layer on said lower layer wiring conductor film within said hole for formation of a connection pillar by a plating process using said second mask so as to form a connection pillar between said lower layer wiring conductor and a possible upper layer wiring conductor; removing said second mask; depositing a second interlayer insulator film on a surface including said connection pillar; etching back said second interlayer insulator film so as to planarize said second interlayer insulator film and to expose an upper surface of said connection pillar; and selectively forming on said second interlayer insulator film a metal film so as to form an upper layer wiring conductor in contact with said upper surface of said connection pillar.
Claim 2
Dependent Claim
395 words
A process for forming a multilayer wiring conductor structure in a semiconductor device, comprising the steps of: forming a power supply film for plating on an insulator film formed on a semiconductor substrate; coating a first photoresist film on said power supply film and patterning said first photoresist film to form a first mask having a pattern for a lower layer wiring conductor formation; depositing a metal film on said power supply film by a plating process using said first mask so as to form a lower layer wiring conductor; removing said first mask; selectively removing said power supply film by using said lower layer wiring conductor as a mask; depositing a first interlayer insulator film on a surface including said lower layer wiring conductor; etching back said deposited first interlayer insulator film so as to planarize said first interlayer insulator film and to expose an upper surface of said lower layer wiring conductor; depositing a bonding metal film on a surface including said upper surface of said lower layer wiring conductor; coating a second photoresist film on said bonding metal layer and patterning said second photoresist film to form a second mask having a hole for formation of a connection pillar between said lower layer wiring conductor and a possible upper layer wiring conductor and a pattern for separation of said bonding metal film; selectively etching said bonding metal film by using said second mask so as to remove said bonding metal film within said hole for formation of a connection pillar and to remove said bonding metal film from a region other than a region above said lower layer wiring conductor; depositing a metal layer on said lower layer wiring conductor film within said hole for formation of a connection pillar by a plating process using said second mask so as to form a connection pillar between said lower layer wiring conductor and a possible upper layer wiring conductor; removing said second mask; depositing a second interlayer insulator film on a surface including said connection pillar; etching back said second interlayer insulator film so as to planarize said second interlayer insulator film and to expose an upper surface of said connection pillar; and selectively forming on said second interlayer insulator film a metal film so as to form an upper layer wiring conductor in contact with said upper surface of said connection pillar.
Claim 3
Dependent Claim
46 words
A process as claimed in claim 1 wherein said metal film of said lower layer wiring conductor is formed of a metal selected from the group consisting of gold, silver, and copper, and said metal film of said upper layer wiring conductor is formed of gold.
Claim 4
Dependent Claim
62 words
A process as claimed in claim 2 wherein said bonding metal film is formed of a metal having properties of adhesion to said lower layer wiring conductor, adhesion to said interlayer insulator layer, thermal stability, and processibility substantially similar to a titanium film, and said metal does not substantially vary the resistance of said lower layer wiring conductor by a heat treatment.
Claim 5
Dependent Claim
30 words
A process as claimed in claim 3 wherein said bonding metal film is formed of a film selected from the group consisting of a titanium film and a titanium-tungsten film.
Claim 6
Dependent Claim
41 words
A process as claimed in claim 3 wherein each of said first and second interlayer insulator films is formed of a film selected from the group consisting of a silicon nitride film, a silicon oxide film and a silicon oxynitride film.
Claim 7
Dependent Claim
22 words
A process as claimed in claim 3 wherein said connection pillar is formed by depositing a gold film by an electroless plating.
Claim 8
Dependent Claim
395 words
A process for forming a multilayer wiring conductor structure in a semiconductor device, comprising the steps of; forming a power supply film for plating on an insulator film formed on a semiconductor substrate; coating a first photoresist film on said power supply film and patterning said first photoresist film and to form a first mask having a pattern for a lower layer wiring conductor formation; removing said power supply film by an etching using said first mask so as to selectively expose said insulator film, selectively depositing a first interlayer insulator film on an exposed surface of said insulator film by using said first mask; removing said first mask; depositing a metal film on said power supply film by a plating using said first interlayer insulator film as a mask so as to form a lower layer wiring conductor having an upper surface adjacent to an upper surface of said first interlayer insulator film; depositing a bonding metal film on a surface including said upper surface of said lower layer wiring conductor; coating a second photoresist film on said bonding metal layer and patterning said second photoresist film to form a second mask having a hole for formation of a connection pillar between said lower layer wiring conductor and a possible upper layer wiring conductor and a pattern for separation of said bonding metal film; selectively etching said bonding metal film by using said second mask so as to remove said bonding metal film within said hole for formation of a connection pillar and to remove said bonding metal film from a region other than a region above said lower layer wiring conductor; depositing a metal layer on said lower layer wiring conductor film within said hole for formation of a connection pillar by a plating process using said second mask so as to form a connection pillar between said lower layer wiring conductor and a possible upper layer wiring conductor; removing said second mask; depositing a second interlayer insulator film on a surface including said connection pillar; etching back said second interlayer insulator film so as to planarize said second interlayer insulator film and to expose an upper surface of said connection pillar; and selectively forming on said second interlayer insulator film a metal film so as to form an upper layer wiring conductor in contact with said upper surface of said connection pillar.
Claim 9
Dependent Claim
395 words
A process for forming a multilayer wiring conductor structure in a semiconductor device, comprising the steps of; forming a power supply film for plating on an insulator film formed on a semiconductor substrate; coating a first photoresist film on said power supply film and patterning said first photoresist film and to form a first mask having a pattern for a lower layer wiring conductor formation; removing said power supply film by an etching using said first mask so as to selectively expose said insulator film, selectively depositing a first interlayer insulator film on an exposed surface of said insulator film by using said first mask; removing said first mask; depositing a metal film on said power supply film by a plating using said first interlayer insulator film as a mask so as to form a lower layer wiring conductor having an upper surface adjacent to an upper surface of said first interlayer insulator film; depositing a bonding metal film on a surface including said upper surface of said lower layer wiring conductor; coating a second photoresist film on said bonding metal layer and patterning said second photoresist film to form a second mask having a hole for formation of a connection pillar between said lower layer wiring conductor and a possible upper layer wiring conductor and a pattern for separation of said bonding metal film; selectively etching said bonding metal film by using said second mask so as to remove said bonding metal film within said hole for formation of a connection pillar and to remove said bonding metal film from a region other than a region above said lower layer wiring conductor; depositing a metal layer on said lower layer wiring conductor film within said hole for formation of a connection pillar by a plating process using said second mask so as to form a connection pillar between said lower layer wiring conductor and a possible upper layer wiring conductor; removing said second mask; depositing a second interlayer insulator film on a surface including said connection pillar; etching back said second interlayer insulator film so as to planarize said second interlayer insulator film and to expose an upper surface of said connection pillar; and selectively forming on said second interlayer insulator film a metal film so as to form an upper layer wiring conductor in contact with said upper surface of said connection pillar.
Claim 10
Dependent Claim
46 words
A process as claimed in claim 7 wherein said metal film of said lower layer wiring conductor is formed of a metal selected from the group consisting of gold, silver, and copper, and said metal film of said upper layer wiring conductor is formed of gold.
Claim 11
Dependent Claim
62 words
A process as claimed in claim 8 wherein said bonding metal film is formed of a metal having properties of adhesion to said lower layer wiring conductor, adhesion to said interlayer insulator layer, thermal stability, and processibility substantially similar to a titanium film, and said metal does not substantially vary the resistance of said lower layer wiring conductor by a heat treatment.
Claim 12
Dependent Claim
30 words
A process as claimed in claim 9 wherein said bonding metal film is formed of a film selected from the group consisting of a titanium film and a titanium-tungsten film.
Claim 13
Dependent Claim
41 words
A process as claimed in claim 9 wherein each of said first and second interlayer insulator films is formed of a film selected from the group consisting of a silicon nitride film, a silicon oxide film and a silicon oxynitride film.
Claim 14
Dependent Claim
22 words
A process as claimed in claim 9 wherein said connection pillar is formed by depositing a gold film by an electroless plating.
References Cited (Backward Citations)
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