US5379515A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for preparing electrical connecting member
Assignee: Canon Inc
•
Filing: 1994-02-16
•
Granted: 1995-01-10
•
Expires: 2014-02-16
Abstract
Abstract A process for preparing an electrical connecting member having a holding member comprising an electrically insulating material and a plurality of electroconductive members equipped in the holding member under the state mutually insulated from each other, one end of the each electroconductive member being exposed at one surface of the holding member, and the other end of the each electroconductive member being exposed at the other surface of the each holding member, the process having the following steps, namely the step of forming a matrix having the state where the holding member is in contact with a base member for supporting the holding member the step of irradiating a high energy beam on the matrix from the holding member side to remove the holding member, thereby forming a plurality of holes the step of filling an electroconductive material which becomes the electroconductive member into the plurality of holes formed and the step of removing the base member.
Inventors
- 👤 Hiroshi Kondo
- 👤 Tetsuo Yoshizawa
- 👤 Toyohide Miyazaki
- 👤 Takashi Sakaki
- 👤 Yoshimi Terayama
- 👤 Yoichi Tamura
- 👤 Takahiro Okabayashi
- 👤 Kazuo Kondo
- 👤 Yasuo Nakatsuka
- 👤 Yuichi Ikegami
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 13:33
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/01; H10W70/05; H10W70/095; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49155; Y10T29/49165; Y10T29/49204; Y10T29/49208
Claims Analysis
Total Claims: 84
Claim 1
Independent Claim
160 words
A process for preparing an electrical connecting member having a hole with a high aspect ratio to be filled with an electroconductive member of said electrical connecting member, said electrical connecting member having a holding member comprising an electrically insulating material and a plurality of electroconductive members equipped in said holding member in a state mutually insulated from each other, one end of each electroconductive member being exposed at one surface of said holding member, and the other end of each electroconductive member being exposed at the other surface of said holding member, said process comprising; the step of forming a matrix having a state in which said holding member is in contact with a base member for supporting said holding member; and the step of irradiating a high energy beam on said matrix from said holding member side to remove an irradiated portion of said holding member to form a plurality of holes each having said high aspect ratio.
Claim 2
Dependent Claim
160 words
A process for preparing an electrical connecting member having a hole with a high aspect ratio to be filled with an electroconductive member of said electrical connecting member, said electrical connecting member having a holding member comprising an electrically insulating material and a plurality of electroconductive members equipped in said holding member in a state mutually insulated from each other, one end of each electroconductive member being exposed at one surface of said holding member, and the other end of each electroconductive member being exposed at the other surface of said holding member, said process comprising; the step of forming a matrix having a state in which said holding member is in contact with a base member for supporting said holding member; and the step of irradiating a high energy beam on said matrix from said holding member side to remove an irradiated portion of said holding member to form a plurality of holes each having said high aspect ratio.
Claim 3
Dependent Claim
25 words
A process according to claim 1, wherein the step of forming said matrix is carried out by forming said holding member on said base member.
Claim 4
Dependent Claim
43 words
A process according to claim 1, further comprising the step of irradiating a high energy beam to remove a part of said base member subsequent to the step of irradiating a high energy beam to remove said holding member, thereby forming the holes.
Claim 5
Dependent Claim
43 words
A process according to claim 1 or 3, wherein the step of filling the electroconductive material which becomes said electroconductive member is carried out by forming said electroconductive member to the same level as or protruding from the surface of said holding member.
Claim 6
Dependent Claim
52 words
A process according to claim 4, wherein the size of at least a part of a protruding portion formed as protruding from the surface of said holding member is larger than the diameter of the hole formed through said holding member and smaller than half of an interperipheral distance of adjoining holes.
Claim 7
Dependent Claim
39 words
A process according to claim 1 or 3, further comprising the step of etching a part of the base member exposed by said plurality of holes formed through said holes prior to the step of filling said electroconductive material.
Claim 8
Dependent Claim
48 words
A process according to claim 6, wherein the size of at least a part of the holes formed through the base member by etching is larger than the diameter of the hole formed through said holding member and smaller than half of an interperipheral distance of adjoining holes.
Claim 9
Dependent Claim
41 words
A process according to claim 7, wherein the step of filling of electroconductive material which becomes said electroconductive member is carried out by forming said electroconductive member to the same level as or protruding from the surface of said holding member.
Claim 10
Dependent Claim
47 words
A process according to claim 8, wherein the size of a protruding portion formed as protruding from the surface of said holding member is larger than the diameter of the hole formed through said holding member and smaller than half of an interperipheral distance of adjoining holes.
Claim 11
Dependent Claim
25 words
A process according to claim 1, further comprising the step of filling an electroconductive material, which becomes the electroconductive member, into the plurality of holes.
Claim 12
Dependent Claim
15 words
A process according to claim 10, further comprising the step of removing the base member.
Claim 13
Dependent Claim
18 words
A process according to claim 1, wherein the high aspect ratio is equal to or greater than 1.
Claim 14
Dependent Claim
183 words
A process for preparing an electrical connecting member having a hole with a high aspect ratio to be filled with an electroconductive member of said electrical connecting member, said electrical connecting member having a holding member comprising an electrically insulating material and a plurality of electroconductive members equipped in said holding member in a state mutually insulated from each other, one end of each electroconductive member being exposed at one surface of said holding member, and the other end of each electroconductive member being exposed at the other surface of said holding member, said process comprising: the step of forming a matrix having said holding member as a first insulating layer and a second insulating layer comprising a material different from the material of said first insulating layer in the order mentioned on a base member for supporting said holding member; and the step of irradiating high energy on said matrix from the side of said second insulating layer to remove the irradiated portion of said first and second insulating layers to form a plurality of holes each having a high aspect ratio.
Claim 15
Dependent Claim
183 words
A process for preparing an electrical connecting member having a hole with a high aspect ratio to be filled with an electroconductive member of said electrical connecting member, said electrical connecting member having a holding member comprising an electrically insulating material and a plurality of electroconductive members equipped in said holding member in a state mutually insulated from each other, one end of each electroconductive member being exposed at one surface of said holding member, and the other end of each electroconductive member being exposed at the other surface of said holding member, said process comprising: the step of forming a matrix having said holding member as a first insulating layer and a second insulating layer comprising a material different from the material of said first insulating layer in the order mentioned on a base member for supporting said holding member; and the step of irradiating high energy on said matrix from the side of said second insulating layer to remove the irradiated portion of said first and second insulating layers to form a plurality of holes each having a high aspect ratio.
Claim 16
Dependent Claim
27 words
A process according to claim 13, further comprising the step of performing etching to change the shape of the plurality of holes of the second insulating layer.
Claim 17
Dependent Claim
27 words
A process according to claim 14, further comprising the step of etching a part of the base member exposed by the plurality of holes through the holes.
Claim 18
Dependent Claim
31 words
A process according to claim 15, further comprising the step of filling an electroconductive material, which becomes the electroconductive member, into the plurality of holes, the holes being subjected to etching.
Claim 19
Dependent Claim
20 words
A process according to claim 16, further comprising the step of removing the second insulating layer and the base member.
Claim 20
Dependent Claim
18 words
A process according to claim 13, wherein the high aspect ratio is equal to or greater than 1.
Claim 21
Dependent Claim
156 words
A process for preparing an electrical connecting member having a hole with a high aspect ratio to be filled with an electroconductive member of said electrical connecting member, said electrical connecting member having a holding member comprising an electrically insulating material and a plurality of electroconductive members equipped in said holding member in a state mutually insulated from each other, one end of each electroconductive member being exposed at one surface of said holding member, and the other end of each electroconductive member being exposed at the other surface of said holding member, said process comprising: the step of forming a matrix having a state in which said holding member is fixedly supported by a base member; and the step of irradiating a high energy beam on said matrix from said holding member side to remove an irradiated portion of said holding member side to form a plurality of holes each having said high aspect ratio.
Claim 22
Dependent Claim
156 words
A process for preparing an electrical connecting member having a hole with a high aspect ratio to be filled with an electroconductive member of said electrical connecting member, said electrical connecting member having a holding member comprising an electrically insulating material and a plurality of electroconductive members equipped in said holding member in a state mutually insulated from each other, one end of each electroconductive member being exposed at one surface of said holding member, and the other end of each electroconductive member being exposed at the other surface of said holding member, said process comprising: the step of forming a matrix having a state in which said holding member is fixedly supported by a base member; and the step of irradiating a high energy beam on said matrix from said holding member side to remove an irradiated portion of said holding member side to form a plurality of holes each having said high aspect ratio.
Claim 23
Dependent Claim
25 words
A process according to claim 19, further comprising the step of filing an electroconductive material which becomes the electroconductive member, into the plurality of holes.
Claim 24
Dependent Claim
15 words
A process according to claim 20, further comprising the step of removing the base member.
Claim 25
Dependent Claim
43 words
A process according to claim 19, further comprising the step of irradiating a high energy beam to remove a part of said base member subsequent to the step of irradiating a high energy beam to remove said holding member, thereby forming the holes.
Claim 26
Dependent Claim
41 words
A process according to claim 19, wherein the step of filing the electroconductive material which becomes said electroconductive member is carried out by forming said electroconductive member to the same level as or protruding from the surface of said holding member.
Claim 27
Dependent Claim
52 words
A process according to claim 23, wherein the size of at least a part of a protruding portion formed as protruding from the surface of said holding member is larger than the diameter of the hole formed through said holding member and smaller than half of an interperipheral distance of adjoining holes.
Claim 28
Dependent Claim
37 words
A process according to claim 19, further comprising the step of etching a part of the base member exposed by said plurality of holes formed through said holes prior to the step of filing said electroconductive material.
Claim 29
Dependent Claim
48 words
A process according to claim 25, wherein the size of at least a part of the holes formed through the base member by etching is larger than the diameter of the hole formed through said holding member and smaller than half of an interperipheral distance of adjoining holes.
Claim 30
Dependent Claim
41 words
A process according to claim 26, wherein the step of filling of electroconductive material which becomes said electroconductive member is carried out by forming said electroconductive member to the same level as or protruding from the surface of said holding member.
Claim 31
Dependent Claim
47 words
A process according to claim 27, wherein the size of a protruding portion formed as protruding from the surface of said holding member is larger than the diameter of the hole formed through said holding member and smaller than half of an interperipheral distance of adjoining holes.
Claim 32
Dependent Claim
25 words
A process according to claim 19, wherein the step of forming said matrix is carried out by forming said holding member on said base member.
Claim 33
Dependent Claim
18 words
A process according to claim 19, wherein the hight aspect ratio is equal to or greater than 1.
Claim 34
Dependent Claim
31 words
A process according to claim 13, further comprising the step of irradiating a high energy beam to remove a part of said base member subsequent to said the matrix irradiating step.
Claim 35
Dependent Claim
50 words
A process according to claim 13, or 11, wherein the size of at least a part of the holes formed through the base member by etching is larger than the diameter of the holes formed through said holding member and smaller than half of an interperipheral distance of adjoining holes.
Claim 36
Dependent Claim
73 words
A process according to claim 32, wherein said further comprising the step of performing etching for changing the shape of said plurality of holes of said second insulating layer and wherein said step of etching at least a part the holes formed in said base member and said step of performing etching for changing the shape of the plurality of holes of said second insulating layer are carried out at the same time.
Claim 37
Dependent Claim
183 words
A process for preparing an electrical conducting member having a holding member comprising an electrical insulating material and a plurality of electroconductive members equipped in said holding member under a state of mutually insulated from each other, one end of said each electroconductive member being exposed at one surface of said holding member, and the other end of said each electroconductive member being exposed at the other surface of said holding member, said process having the following steps, namely: the first step of irradiating a high energy beam on said holding member to form a plurality of holes perforated therethrough; the second step of connecting said holding member to a base member for supporting said holding member by bonding; the third step of etching a part of the base member exposed by the plurality of holes formed through the holding member through said plurality of holes; the fourth step of filling an electroconductive material which becomes said electroconductive member into said plurality of holes and a part of the base member subjected to etching; and the fifth step of removing said base member.
Claim 38
Dependent Claim
183 words
A process for preparing an electrical conducting member having a holding member comprising an electrical insulating material and a plurality of electroconductive members equipped in said holding member under a state of mutually insulated from each other, one end of said each electroconductive member being exposed at one surface of said holding member, and the other end of said each electroconductive member being exposed at the other surface of said holding member, said process having the following steps, namely: the first step of irradiating a high energy beam on said holding member to form a plurality of holes perforated therethrough; the second step of connecting said holding member to a base member for supporting said holding member by bonding; the third step of etching a part of the base member exposed by the plurality of holes formed through the holding member through said plurality of holes; the fourth step of filling an electroconductive material which becomes said electroconductive member into said plurality of holes and a part of the base member subjected to etching; and the fifth step of removing said base member.
Claim 39
Dependent Claim
33 words
A process according to claim 34, wherein said plurality of holes are formed by performing irradiation of said high energy beam on the both surfaces of said holding member at the same time.
Claim 40
Dependent Claim
31 words
A process according to claim 34, wherein said plurality of holes are formed by performing irradiation of said high energy beam on, one by one, the surfaces of said holding member.
Claim 41
Dependent Claim
47 words
A process according to any one of claims 34, 35 and 36, wherein the step of filling an electroconductive material which becomes said electroconductive member is carried out by forming said electroconductive member to the same level as or protruded from the surface of said holding member.
Claim 42
Dependent Claim
49 words
A process according to claim 37, wherein the size of at least a part of the protruded portions formed as protruded from the surface of said insulating layer is larger than the diameter formed through said holding member and smaller than half of the interperipheral distance of adjoining holes.
Claim 43
Dependent Claim
42 words
A process according to claim 38, the size of at least a part of the concavities formed on the base member is larger than the diameter formed through said holding member and smaller than half of the interperipheral distance of adjoining holes.
Claim 44
Dependent Claim
18 words
A process according to claim 39, wherein said second step is carried out by use of an adhesive.
Claim 45
Dependent Claim
21 words
A process according to claim 40, wherein the etching step is carried out for removing the adhesive before said third step.
Claim 46
Dependent Claim
191 words
A process for preparing an electrical conducting member having a holding member comprising an electrical insulating material and a plurality of electroconductive members equipped in said holding member under a state of mutually insulated from each other, one end of said each electroconductive member being exposed at one surface of said holding member, and the other end of said each electroconductive member being exposed at the other surface of said holding member, said process having the following steps, namely: the first step of irradiating a high energy beam on said holding member to form a plurality of holes extending therethrough; the second step of forming concavities on the surface of a base member for supporting said holding member at positions corresponding to the positions of the holes formed through said holding member; the third step of effecting registration between the holes formed through said holding member and the concavities of the base member, and connecting said holding member to said base member by bonding; the fourth step of filling an electroconductive material which becomes said electroconductive member into said holes and cavities; and the fifth step of removing said base member.
Claim 47
Dependent Claim
191 words
A process for preparing an electrical conducting member having a holding member comprising an electrical insulating material and a plurality of electroconductive members equipped in said holding member under a state of mutually insulated from each other, one end of said each electroconductive member being exposed at one surface of said holding member, and the other end of said each electroconductive member being exposed at the other surface of said holding member, said process having the following steps, namely: the first step of irradiating a high energy beam on said holding member to form a plurality of holes extending therethrough; the second step of forming concavities on the surface of a base member for supporting said holding member at positions corresponding to the positions of the holes formed through said holding member; the third step of effecting registration between the holes formed through said holding member and the concavities of the base member, and connecting said holding member to said base member by bonding; the fourth step of filling an electroconductive material which becomes said electroconductive member into said holes and cavities; and the fifth step of removing said base member.
Claim 48
Dependent Claim
33 words
A process according to claim 42, wherein said plurality of holes are formed by performing irradiation of said high energy beam on the both surfaces of said holding member at the same time.
Claim 49
Dependent Claim
31 words
A process according to claim 42, wherein said plurality of holes are formed by performing irradiation of said high energy beam on, one by one, the surface of said holding member.
Claim 50
Dependent Claim
54 words
A process according to any one of claims 42, 43 and 44, wherein the step of filling the electroconductive material is carried out by forming said electroconductive member so as to have a surface coplanar with the surface of said holding member or a protruded portion protruded from the surface of said holding member.
Claim 51
Dependent Claim
52 words
A process according to claim 45, wherein the size of at least a part of the protruded portions formed as protruded from the surface of said holding member is larger than the diameter of the holes formed through said holding member and smaller than half of the interperipheral distance of adjoining holes.
Claim 52
Dependent Claim
55 words
A process according to claim 46, wherein the concavity formed on the base member is formed by etching, and the size of at least a part of the concavities is larger than the diameter of said plurality of holes formed through the holding member and smaller than half of the interperipheral distance of adjoining holes.
Claim 53
Dependent Claim
18 words
A process according to claim 47, wherein said second step is carried out by use of an adhesive.
Claim 54
Dependent Claim
21 words
A process according to claim 48, wherein the etching step is carried out for removing the adhesive before said third step.
Claim 55
Dependent Claim
36 words
A process according to claim 48, having the step of filling said plurality of holes formed through the holding member with a soluble material different from the material of said holding member before said third step.
Claim 56
Dependent Claim
21 words
A process according to claim 50, having the etching step for removing said soluble material and adhesive before said fourth step.
Claim 57
Dependent Claim
34 words
A process according to claim 48, having the step of filling the concavities formed on said base member with a soluble material different from the material of said holding material before said third step.
Claim 58
Dependent Claim
21 words
A process according to claim 52, having the etching step for removing said soluble material and adhesive before said fourth step.
Claim 59
Dependent Claim
44 words
A process according to claim 48, having the step of filling said plurality of holes formed through said holding member and the concavities formed on said base member with a soluble material different from the material of said holding member before said third step.
Claim 60
Dependent Claim
21 words
A process according to claim 54, having the etching step for removing said soluble material and adhesive before said fourth step.
Claim 61
Dependent Claim
64 words
A process according to claim 46, wherein the concavities formed on said base member are formed by bonding a metal foil having a plurality of holes perforated therethrough onto the base member, and the size of at least a part of said concavities is larger than the diameter of said plurality of holes and smaller than half of the interperipheral distance of adjoining holes.
Claim 62
Dependent Claim
36 words
A process according to claims 56, having the step of filling said plurality of holes formed through the holding member with a soluble material different from the material of said holding member before said third step.
Claim 63
Dependent Claim
36 words
A process according to claim 57, wherein said third step is carried out by use of an adhesive, said process having the etching step for removing said soluble material and a adhesive before said fourth step.
Claim 64
Dependent Claim
34 words
A process according to claim 56, having the step of filling the concavities formed on said base member with a soluble material different from the material of said holding member before said third step.
Claim 65
Dependent Claim
35 words
A process according to claim 59, wherein said third step is carried out by use of an adhesive, said process having the etching step for removing said soluble material and adhesive before said fourth step.
Claim 66
Dependent Claim
44 words
A process according to claim 56, having the step of filling said plurality of holes formed through said holding member and the concavities formed on said base member with a soluble material different from the material of said holding member before said third step.
Claim 67
Dependent Claim
34 words
A process according to claim 61, wherein said third step is carried out by use of adhesive, said process having the etching step for removing said soluble material and adhesive before said fourth step.
Claim 68
Dependent Claim
63 words
A process according to claim 46, wherein the concavity formed on said base member is formed by providing a photosensitive resin layer on the base member and subjecting it to patterning, and the size of at least a part of said concavities is larger than the diameter of said plurality of holes and smaller than half of the interperipheral distance of adjoining holes.
Claim 69
Dependent Claim
36 words
A process according to claim 63, having the step of filling said plurality of holes formed through the holding member with a soluble material different from the material of said holding member before said third step.
Claim 70
Dependent Claim
21 words
A process according to claim 64, having the etching step for removing said soluble material and adhesive before said fourth step.
Claim 71
Dependent Claim
34 words
A process according to claim 63, having the step of filling the concavities formed on said base member with a soluble material different from the material of said holding member before said third step.
Claim 72
Dependent Claim
21 words
A process according to claim 66, having the etching step for removing said soluble material and adhesive before said fourth step.
Claim 73
Dependent Claim
44 words
A process according to claim 63, having the step of filling said plurality of holes formed through said holding member and the concavities formed on said base member with a soluble material different from the material of said holding member before said third step.
Claim 74
Dependent Claim
21 words
A process according to claim 68, having the etching step for removing said soluble material and adhesive before said fourth step.
Claim 75
Dependent Claim
189 words
A process for preparing an electrical connecting member having a holding member comprising an electrically insulating material and plurality of electroconductive members equipped in said holding member under the state mutually insulated from each other, one end of said each electroconductive member being exposed at one surface of said holding member, and the other end of said each electroconductive member being exposed at the other surface of said each holding member, said process having the following steps, namely: the first step of irradiating on a matrix having on a first insulating layer which is said holding member a second insulating layer of a material different from said first insulating layer to form a plurality of holes perforated therethrough; the second step of connecting said matrix to a base member for supporting said matrix bonding; the third step of etching a part of the base member exposed by said plurality of holes formed through said matrix; the fourth step of filing an electroconductive material which becomes said electroconductive member into said holes and the etched concavities; and the fifth step of removing said base member and said second insulating layer.
Claim 76
Dependent Claim
189 words
A process for preparing an electrical connecting member having a holding member comprising an electrically insulating material and plurality of electroconductive members equipped in said holding member under the state mutually insulated from each other, one end of said each electroconductive member being exposed at one surface of said holding member, and the other end of said each electroconductive member being exposed at the other surface of said each holding member, said process having the following steps, namely: the first step of irradiating on a matrix having on a first insulating layer which is said holding member a second insulating layer of a material different from said first insulating layer to form a plurality of holes perforated therethrough; the second step of connecting said matrix to a base member for supporting said matrix bonding; the third step of etching a part of the base member exposed by said plurality of holes formed through said matrix; the fourth step of filing an electroconductive material which becomes said electroconductive member into said holes and the etched concavities; and the fifth step of removing said base member and said second insulating layer.
Claim 77
Dependent Claim
27 words
A process according to claim 70, wherein etching is carried out for changing the shape of the holes of said second insulating layer before said second step.
Claim 78
Dependent Claim
27 words
A process according to claim 70, wherein etching is carried out for changing the shape of the holes of said second insulating layer after said second step.
Claim 79
Dependent Claim
28 words
A process according to claim 70, wherein etching is carried out for changing the shape of the holes of said second insulating layer simultaneously with said third step.
Claim 80
Dependent Claim
219 words
A process for preparing an electrical connecting member having a holding member comprising an electrically insulating material and plurality of electroconductive members equipped in said holding member under the state mutually insulted from each other, one end of said each electroconductive member being exposed at one surface of said holding member, and the other end of said each electroconductive member being exposed at the other surface of said each holding member, said process having the following steps, namely; the first step of irradiating a high energy beam on a matrix having on a first insulating layer which is said holding member a second insulating layer of a material different from said first insulating layer to form a plurality of holes extending therethrough; the second step of forming concavities on the base member for supporting said matrix at the positions corresponding to the positions of the hole formed through said matrix; the third step of performing registration between the holes formed on said matrix and the concavities formed on the base member, and connecting said holding member to said base member by bonding; the fourth step of filing an electroconductive material which becomes said electroconductive member into the holes formed in said matrix and the concavities; and the fifth step of removing said base member and said second insulating layer.
Claim 81
Dependent Claim
219 words
A process for preparing an electrical connecting member having a holding member comprising an electrically insulating material and plurality of electroconductive members equipped in said holding member under the state mutually insulted from each other, one end of said each electroconductive member being exposed at one surface of said holding member, and the other end of said each electroconductive member being exposed at the other surface of said each holding member, said process having the following steps, namely; the first step of irradiating a high energy beam on a matrix having on a first insulating layer which is said holding member a second insulating layer of a material different from said first insulating layer to form a plurality of holes extending therethrough; the second step of forming concavities on the base member for supporting said matrix at the positions corresponding to the positions of the hole formed through said matrix; the third step of performing registration between the holes formed on said matrix and the concavities formed on the base member, and connecting said holding member to said base member by bonding; the fourth step of filing an electroconductive material which becomes said electroconductive member into the holes formed in said matrix and the concavities; and the fifth step of removing said base member and said second insulating layer.
Claim 82
Dependent Claim
27 words
A process according to claim 74, wherein etching is carried out for changing the shape of the holes of said second insulating layer before said third step.
Claim 83
Dependent Claim
27 words
A process according to claim 74, wherein etching is carried out for changing the shape of the holes of said second insulating layer after said third step.
Claim 84
Dependent Claim
47 words
A process according to claim 75 or 76, having the step of filling the concavities of said base member with a soluble material different from said first or second insulating layer before said third step and the step of removing said soluble material before said fourth step.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-01-09 | 1998-07-11 | 1999-01-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-01-09 | 2002-07-11 | 2003-01-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-01-09 | 2006-07-11 | 2007-01-10 | $7700.00 | Window Closed / Lapsed |