US5377816A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Spiral magnetic linear translating mechanism
Assignee: Tokyo Electron Ltd
•
Filing: 1993-07-15
•
Granted: 1995-01-03
•
Expires: 2013-07-15
Abstract
Abstract A spiral magnetic linear translating mechanism for use with a wafer processing system which includes a plurality of evacuatable housings connected in a series to form a processing line comprises at least one wafer support structure which is mounted to move on a track through the housings along the processing line. The structure includes a base disposed proximate a wall of the housing and includes a plurality of magnetic thread segments extending thereon to face the wall. Outside of the housing, a cylindrical shaft is mounted proximate the wall. An elongated magnetic drive with successive sections is wound spirally around the shaft to rotate with the shaft so that the sections of the drive face the wall opposite the thread segments. The magnetic thread segments are attracted to the magnetic drive, thus coupling the wafer support structure to the shaft such that when the shaft rotates the thread segments are exposed to different successive sections of the drive located further along the shaft and the wafer carrier is driven linearly along the track and through the housing. Preferably, the magnetic thread segments and spiral magnetic drive are made up of individual magnetic elements alternately magnetically polarized at their outer extremities with opposite magnetic polarities so that the individual thread segment elements are attracted to drive elements having opposite magnetic polarities. In an alternative embodiment, the shaft includes a plurality of magnetic drives wound spirally thereon. The shaft is covered with a non-magnetic sleeve to protect the magnetic drive.
Inventors
- 👤 Mario Deligi
- 👤 Senia Derbinsky
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 07:25
CPC Classifications
H; H10; H10P; H10P95/00; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7618; H10P72/30; H10P72/32; H10P72/3204; H10P72/3206; H10P72/33; H10P72/3314; H10P72/7621
Claims Analysis
Total Claims: 42
Claim 1
Independent Claim
186 words
A magnetic translating mechanism to move a wafer along a path through a wafer processing chamber having at least one wall comprising: an elongated cylindrical shaft located externally of the processing chamber and mounted to extend parallel to said path, the shaft rotating on its longitudinal axis adjacent a wall of the processing chamber; at least one elongated magnetic drive, comprising successive drive sections, wound spirally around the shaft to rotate with the shaft; and a wafer support structure for holding a wafer, said support structure mounted to be movable within the chamber proximate the wall so as to move generally along said path parallel to the axis of the elongated shaft, the structure having at least one magnetic thread segment thereon to magnetically couple the structure to a section of the magnetic drive, rotation of the shaft exposing the thread segment to different successive sections of the drive disposed further along the length of the shaft, such that the thread segment is coupled to the successive drive sections and moves the structure linearly along said path parallel to the elongated shaft as the shaft rotates.
Claim 2
Dependent Claim
186 words
A magnetic translating mechanism to move a wafer along a path through a wafer processing chamber having at least one wall comprising: an elongated cylindrical shaft located externally of the processing chamber and mounted to extend parallel to said path, the shaft rotating on its longitudinal axis adjacent a wall of the processing chamber; at least one elongated magnetic drive, comprising successive drive sections, wound spirally around the shaft to rotate with the shaft; and a wafer support structure for holding a wafer, said support structure mounted to be movable within the chamber proximate the wall so as to move generally along said path parallel to the axis of the elongated shaft, the structure having at least one magnetic thread segment thereon to magnetically couple the structure to a section of the magnetic drive, rotation of the shaft exposing the thread segment to different successive sections of the drive disposed further along the length of the shaft, such that the thread segment is coupled to the successive drive sections and moves the structure linearly along said path parallel to the elongated shaft as the shaft rotates.
Claim 3
Dependent Claim
24 words
The magnetic translating mechanism of claim 1 wherein the spiral magnetic drive is wound to extend along substantially the entire length of the shaft.
Claim 4
Dependent Claim
32 words
The magnetic translating mechanism of claim 1 wherein the support structure thread segment extends in a direction substantially parallel to the section of the spiral magnetic drive to which it is coupled.
Claim 5
Dependent Claim
32 words
The magnetic translating mechanism of claim 1, the spiral magnetic drive comprising a plurality of magnetic elements disposed generally side-by-side on the shaft to collectively form a generally continuous spiral magnetic drive.
Claim 6
Dependent Claim
28 words
The magnetic translating mechanism of claim 4 wherein each successive magnetic drive element has an opposite magnetic polarity at its outer extremity to its adjacent magnetic drive elements.
Claim 7
Dependent Claim
30 words
The magnetic translating mechanism of claim 4, the support structure magnetic thread segment comprising a plurality of magnetic elements disposed generally side-by-side to form a generally continuous magnetic thread segment.
Claim 8
Dependent Claim
30 words
The magnetic translating mechanism of claim 6 wherein each successive magnetic thread segment element has an opposite magnetic polarity at its outer extremity to its adjacent magnetic thread segment elements.
Claim 9
Dependent Claim
101 words
The magnetic translating mechanism of claim 6 wherein at least one thread segment element is magnetically attracted to a magnetic drive element of the opposite polarity to magnetically couple the support structure to the drive, the rotation of the shaft exposing the thread segment element to different successive magnetic drive elements of the opposite polarity which are disposed further along the length of the magnetic drive, such that the thread segment element is magnetically coupled to a different successive drive element as the shaft rotates causing the wafer support structure to move linearly parallel to the shaft as the shaft rotates.
Claim 10
Dependent Claim
44 words
The magnetic translation mechanism of claim 4 wherein the shaft is made of a ferromagnetic material and includes at least one spiral-shaped groove therein, the magnetic elements adhering to the shaft by magnetic attraction inside the groove to collectively form the spiral magnetic drive.
Claim 11
Dependent Claim
63 words
The magnetic wafer support mechanism of claim 1 wherein the translating structure includes a plurality of magnetic thread segments spaced from each other along the length of the structure, and at least two thread segments of the plurality are magnetically coupled to the spiral magnetic drive at the same time to more smoothly move the wafer support structure linearly through the processing chamber.
Claim 12
Dependent Claim
21 words
The magnetic translating mechanism of claim 10 wherein each thread segment of the plurality is coupled to the spiral magnetic drive.
Claim 13
Dependent Claim
31 words
The magnetic translating mechanism of claim 1 further comprising a sleeve made of a non-magnetic material which is disposed over the shaft and spiral magnetic drive to protect the magnetic drive.
Claim 14
Dependent Claim
31 words
The magnetic translating mechanism of claim 1 wherein the elongated magnetic drive is wound spirally around the shaft to maintain a generally uniform lead angle along the length of the shaft.
Claim 15
Dependent Claim
75 words
The magnetic translating mechanism of claim 13 further comprising a plurality of thread segments, the thread segments disposed on the wafer support structure essentially equidistant from one another along the length of the structure and angled from the longitudinal axis of the shaft to be generally parallel with each other, to align with the angled sections of the spiral drive which face the thread segments to more strongly couple the thread segments to the drive.
Claim 16
Dependent Claim
59 words
The magnetic translating mechanism of claim 1 further comprising a plurality of elongated magnetic drives, each originating at a point spaced around the periphery of one end of the shaft, the drives wound spirally around the shaft to interleave with one another and maintain approximately the same lead angle so that adjacent drive sections do not intersect one another.
Claim 17
Dependent Claim
34 words
The magnetic translating mechanism of claim 15, wherein the peripheral origination points of the plurality of spiral magnetic drives are spaced equidistant around the periphery of at least one end of the cylindrical shaft.
Claim 18
Dependent Claim
35 words
The magnetic translating mechanism of claim 15 wherein the support structure includes a plurality of magnetic thread segments and at least two thread segments of the plurality are magnetically coupled to the spiral magnetic drives.
Claim 19
Dependent Claim
31 words
The magnetic translating mechanism of claim 17 wherein each thread segment of the plurality of thread segments is magnetically coupled to a section of a spiral magnetic drive on the shaft.
Claim 20
Dependent Claim
149 words
A magnetic transmitting mechanism to move a wafer along a path through a wafer processing chamber having at least one wall comprising: a wafer support for supporting a wafer, the support mounted to be movable along the path within a processing chamber; a magnetic coupling device disposed on the support proximate one side of the chamber wall; a rotatable magnetic driver mounted externally of the chamber and including successive magnetic drive sections, each successive drive section located further along the path than the preceding drive section, the driver disposed proximate the other side of the chamber wall to impose magnetic fields within the chamber and magnetically coupled to the magnetic coupling device such that when the driver rotates it exposes different successive drive sections located further along the path to the magnetic coupling device and drives the coupling device and the wafer support along the path through the chamber.
Claim 21
Dependent Claim
149 words
A magnetic transmitting mechanism to move a wafer along a path through a wafer processing chamber having at least one wall comprising: a wafer support for supporting a wafer, the support mounted to be movable along the path within a processing chamber; a magnetic coupling device disposed on the support proximate one side of the chamber wall; a rotatable magnetic driver mounted externally of the chamber and including successive magnetic drive sections, each successive drive section located further along the path than the preceding drive section, the driver disposed proximate the other side of the chamber wall to impose magnetic fields within the chamber and magnetically coupled to the magnetic coupling device such that when the driver rotates it exposes different successive drive sections located further along the path to the magnetic coupling device and drives the coupling device and the wafer support along the path through the chamber.
Claim 22
Dependent Claim
118 words
The magnetic translating mechanism of claim 19 wherein the magnetic driver includes an elongated cylindrical shaft mounted to extend parallel to the path and to rotate on a longitudinal axis adjacent the other side of the chamber wall, and further includes at least one elongated magnetic drive comprising successive drive sections wound spirally around the shaft to rotate with the shaft such that rotation of the shaft exposes the magnetic coupling device to different successive sections of the magnetic drive disposed further along the length of the shaft such that the coupling device is coupled to the successive drive sections to drive the coupling device and the wafer support linearly along the path parallel to the elongated shaft.
Claim 23
Dependent Claim
97 words
The magnetic translating mechanism of claim 19 wherein the magnetic coupling device comprises a plurality of magnetic coupling elements disposed generally side-by-side, each coupling element having an opposite magnetic polarity at its outer extremity to its adjacent coupling elements; and the magnetic driver comprises a plurality of magnetic drive elements disposed generally side-by-side, each drive element having an opposite magnetic polarity at its outer extremity to its adjacent drive elements; at least one coupling element being magnetically attracted to a drive element of the opposite polarity to magnetically couple the magnetic coupling device to the magnetic driver.
Claim 24
Dependent Claim
230 words
A wafer processing line comprising: a plurality of serially-connected housings; processing means coupled to at least one of the housings to perform a processing step in the housing; a wafer support structure to receive a wafer; guide means for guiding the wafer support structure along a path through the serial housings; and a magnetic translating mechanism to move the support structure along the path through a housing comprising: an elongated cylindrical shaft located externally of at least one of the housings and mounted to extend generally parallel with the path, the shaft rotating on its longitudinal axis adjacent a first wall of the housing; at least one elongated magnetic drive, comprising successive drive sections, wound spirally around the shaft to rotate with the shaft, the drive imposing magnetic fields inside the housing proximate the first wall; at least one magnetic thread segment disposed on the support structure to face the first wall when the structure is in the housing, the thread segment magnetically coupling the support structure to a section of the magnetic drive proximate the first wall, rotation of the shaft exposing the thread segment to different successive sections of the drive which are disposed further along the length of the shaft, such that the thread segment is coupled to the successive drive sections and moves the structure linearly along said path, through the housings, as the shaft rotates.
Claim 25
Dependent Claim
230 words
A wafer processing line comprising: a plurality of serially-connected housings; processing means coupled to at least one of the housings to perform a processing step in the housing; a wafer support structure to receive a wafer; guide means for guiding the wafer support structure along a path through the serial housings; and a magnetic translating mechanism to move the support structure along the path through a housing comprising: an elongated cylindrical shaft located externally of at least one of the housings and mounted to extend generally parallel with the path, the shaft rotating on its longitudinal axis adjacent a first wall of the housing; at least one elongated magnetic drive, comprising successive drive sections, wound spirally around the shaft to rotate with the shaft, the drive imposing magnetic fields inside the housing proximate the first wall; at least one magnetic thread segment disposed on the support structure to face the first wall when the structure is in the housing, the thread segment magnetically coupling the support structure to a section of the magnetic drive proximate the first wall, rotation of the shaft exposing the thread segment to different successive sections of the drive which are disposed further along the length of the shaft, such that the thread segment is coupled to the successive drive sections and moves the structure linearly along said path, through the housings, as the shaft rotates.
Claim 26
Dependent Claim
52 words
The wafer processing line of claim 22, the spiral magnetic drive comprising a plurality of magnetic elements disposed generally side-by-side on the shaft to collectively form a generally continuous spiral magnetic drive, each successive magnetic drive element having an opposite magnetic plurality at its outer extremity to its adjacent magnetic drive elements.
Claim 27
Dependent Claim
144 words
The wafer processing line of claim 23, wherein the support structure magnetic thread segment comprises a plurality of magnetic elements disposed generally side-by-side to form a generally continuous magnetic thread segment, each successive magnetic thread segment element having an opposite magnetic plurality at its outer extremity to its adjacent magnetic thread segment elements, at least one thread segment element magnetically attracted to a magnetic drive element of the opposite plurality to magnetically couple the support structure to the drive, the rotation of the shaft exposing the thread segment element to different successive magnetic drive elements of the opposite polarity which are disposed further along the length of the magnetic drive, such that the thread segment element is magnetically coupled to a different successive drive element as the shaft rotates causing the wafer support structure to move linearly along the path as the shaft rotates.
Claim 28
Dependent Claim
58 words
The wafer processing line of claim 22 wherein the support structure includes a plurality of magnetic thread segments spaced from each other along the structure, and at least two thread segments of the plurality are magnetically coupled to the spiral magnetic drive at the same time to more smoothly move the wafer support structure linearly through the housings.
Claim 29
Dependent Claim
60 words
The wafer processing line of claim 22 further comprising a plurality of elongated magnetic drives, each drive originating at a point spaced around the periphery of one end of the shaft, the drives wound spirally around the shaft to interleave with one another and maintain approximately the same lead angle so that adjacent drive sections do not intersect one another.
Claim 30
Dependent Claim
33 words
The wafer processing line of claim 22 further comprising a complete magnetic translating mechanism associated with each of the serially-connected housings so that a wafer may be moved through each of the housings.
Claim 31
Dependent Claim
82 words
The wafer processing line of claim 27, the wafer support structure having a plurality of thread segments and dimensioned to extend between adjacent serial housings, so that a thread segment on the forward end of the support structure is coupled to the magnetic drive of one housing and a thread segment at the rearward end of the structure is coupled to the drive of the previous housing in order to continuously move the structure from housing to housing along the processing line.
Claim 32
Dependent Claim
45 words
The wafer processing line of claim 22 wherein one elongated cylindrical shaft with successive drive sections extends adjacent at least two of the serially-connected housings, whereby the wafer support structure is magnetically coupled to the same shaft as it moves through the two serially-connected housings.
Claim 33
Independent Claim
232 words
A method of transporting wafers along a path through a wafer processing chamber having a wall comprising the steps of: a.) supporting a wafer in a support structure which is movable along the path within the processing chamber proximate a chamber wall, the structure including at least one magnetic thread segment disposed thereon facing the wall; b.) positioning the support structure so that the thread segment is opposite an elongated cylindrical shaft mounted externally of the chamber proximate the wall to rotate on an axis which extends generally parallel to the path, the shaft including an elongated magnetic drive comprising successive sections wound spirally around the shaft to rotate with the shaft so that sections of the drive face the wall opposite the magnetic thread segment of the translating structure, the drive section imposing magnetic fields within the chamber in proximity to the thread segment so that the thread segment magnetically couples to a drive section; c.) rotating the shaft so that the thread segment is opposite and coupled to a different successive section of the spiral drive, which is disposed further along the length of the shaft such that the structure moves linearly along the shaft and along the path through the chamber when the shaft rotates; whereby the rotating spiral drive translates the wafer translating structure through the processing chamber with reduced friction and reduced particulate generation in the chamber.
Claim 34
Independent Claim
232 words
A method of transporting wafers along a path through a wafer processing chamber having a wall comprising the steps of: a.) supporting a wafer in a support structure which is movable along the path within the processing chamber proximate a chamber wall, the structure including at least one magnetic thread segment disposed thereon facing the wall; b.) positioning the support structure so that the thread segment is opposite an elongated cylindrical shaft mounted externally of the chamber proximate the wall to rotate on an axis which extends generally parallel to the path, the shaft including an elongated magnetic drive comprising successive sections wound spirally around the shaft to rotate with the shaft so that sections of the drive face the wall opposite the magnetic thread segment of the translating structure, the drive section imposing magnetic fields within the chamber in proximity to the thread segment so that the thread segment magnetically couples to a drive section; c.) rotating the shaft so that the thread segment is opposite and coupled to a different successive section of the spiral drive, which is disposed further along the length of the shaft such that the structure moves linearly along the shaft and along the path through the chamber when the shaft rotates; whereby the rotating spiral drive translates the wafer translating structure through the processing chamber with reduced friction and reduced particulate generation in the chamber.
Claim 35
Dependent Claim
30 words
The method of claim 30, the spiral drive comprising a plurality of successive magnetic elements disposed generally side-by-side on the shaft to collectively form a generally continuous spiral magnetic drive.
Claim 36
Dependent Claim
26 words
The method of claim 31 wherein each successive magnetic drive element has an opposite magnetic polarity at its outer extremity to its adjacent magnetic drive elements.
Claim 37
Dependent Claim
106 words
The method of claim 30, wherein the thread segment provides a plurality of magnetic elements disposed generally side-by-side on the wafer support structure to form a generally continuous magnetic thread segment, each magnetic thread segment element having an opposite magnetic polarity at its outer extremity to its adjacent magnetic thread segment elements, the method further comprising the step of exposing at least one thread segment element to successive magnetic drive elements of the opposite polarity located further along the shaft by rotating the shaft so that the magnetic coupling between the thread segment elements and the successive drive elements moves the support structure along the path.
Claim 38
Dependent Claim
47 words
The method of claim 30 wherein the wafer support structure includes a plurality of magnetic thread segments and at least two thread segments are magnetically coupled to the spiral magnetic drive to more smoothly move the wafer support structure linearly along the path through the processing chamber.
Claim 39
Dependent Claim
25 words
The method of claim 30 wherein a non-magnetic sleeve is placed over the shaft and spiral magnetic drive to protect the magnetic drive from damage.
Claim 40
Dependent Claim
41 words
The method of claim 30 wherein the shaft further includes a plurality of elongated magnetic drives, the drives wound spirally to interleave with one another and maintain approximately the same lead angle so that adjacent drives do not intersect one another.
Claim 41
Independent Claim
153 words
A method of transporting wafers along a path through a wafer processing chamber having a wall comprising the steps of: a) supporting a wafer in a support which is moveable along the path through the processing chamber, the support including a magnetic coupling device disposed on the support proximate one side of the chamber wall; b) positioning the support in the chamber so that the magnetic coupling device is opposite a magnetic driver mounted externally of the chamber, the driver including successive magnetic drive sections disposed proximate the other side of the chamber wall to impose magnetic fields in the chamber and magnetically couple the driver to the coupling device; c) exposing different successive magnetic drive sections to the coupling device so that the coupling device magnetically couples to the successive drive sections, the successive sections located further along the path to move the support along the path through the wafer processing chamber.
Claim 42
Independent Claim
153 words
A method of transporting wafers along a path through a wafer processing chamber having a wall comprising the steps of: a) supporting a wafer in a support which is moveable along the path through the processing chamber, the support including a magnetic coupling device disposed on the support proximate one side of the chamber wall; b) positioning the support in the chamber so that the magnetic coupling device is opposite a magnetic driver mounted externally of the chamber, the driver including successive magnetic drive sections disposed proximate the other side of the chamber wall to impose magnetic fields in the chamber and magnetically couple the driver to the coupling device; c) exposing different successive magnetic drive sections to the coupling device so that the coupling device magnetically couples to the successive drive sections, the successive sections located further along the path to move the support along the path through the wafer processing chamber.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-01-02 | 1998-07-04 | 1999-01-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-01-02 | 2002-07-04 | 2003-01-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-01-02 | 2006-07-04 | 2007-01-03 | $7700.00 | Window Closed / Lapsed |