Conveying device for wafer

Abstract

Abstract PURPOSE:To prevent the dust and to improve the yield of a wafer product by forming a conveying passage made of magnetic mateial for generating a repelling magnetic field on a wafer conveying base and forming a wefer conveying carrier of magnetic material, thereby eliminateing mechanically moving part. CONSTITUTION:The first and second conveying paths 8, 9 made of magnetic material so magnetized as to act repelling force of the same strength are formed on a wafer conveying base 7, a magnetic mateial carrier 11 is floated, an electromagnet 10 is provided on the base 7 to generate and erase a magnetic field, thereby controlling the floating of the carrier. In this manner, the dust can be prevented by eliminating the mechanically moving part, the yield is improved, and the device can be used in vaccum.

Inventors

• 👤 Kazunori Imai

Bibliographic Details