US5376790A — Scanning probe microscope

Claim 1

Independent Claim 37 words

A method of mounting a probe in a scanning probe microscope, said probe comprising a cantilever and a chip, said method comprising the step of kinematically mounting said probe in a head of said scanning probe microscope.

Claim 2

Independent Claim 37 words

A method of mounting a probe in a scanning probe microscope, said probe comprising a cantilever and a chip, said method comprising the step of kinematically mounting said probe in a head of said scanning probe microscope.

Claim 3

Dependent Claim 39 words

The method of claim 1, said probe being included in a package, said method further comprising the steps of: mounting said package removably on a cartridge; and mounting said cartridge removably in the head of said scanning probe microscope.

Claim 4

Dependent Claim 23 words

The method of claim 2 wherein said package is mounted kinematically on said cartridge and said cartridge is mounted kinematically in said head.

Claim 5

Dependent Claim 22 words

The method of claim 3 wherein said package comprises the cantilever, the chip and a plate, said cantilever projecting from said chip.

Claim 6

Dependent Claim 16 words

The method of claim 4, further comprising the step of attaching said chip to said plate.

Claim 7

Dependent Claim 17 words

The method of claim 4, further comprising the step of kinematically mounting said chip on said plate.

Claim 8

Dependent Claim 79 words

In a scanning probe microscope, a head, said head being adapted to hold an SFM probe or an STM probe and comprising a deflection sensor for detecting the deflection of a cantilever in the SFM probe, said head further comprising a first amplification means for amplifying a signal from said deflection sensor, said signal representing the deflection of said cantilever, and a second amplification means for amplifying a signal derived from a tunneling current flowing in the STM probe.

Claim 9

Dependent Claim 79 words

In a scanning probe microscope, a head, said head being adapted to hold an SFM probe or an STM probe and comprising a deflection sensor for detecting the deflection of a cantilever in the SFM probe, said head further comprising a first amplification means for amplifying a signal from said deflection sensor, said signal representing the deflection of said cantilever, and a second amplification means for amplifying a signal derived from a tunneling current flowing in the STM probe.

Claim 10

Dependent Claim 26 words

The head of claim 7, said head being adapted to hold a combined SFM/STM probe, said first and second amplification means being capable of operating simultaneously.

Claim 11

Dependent Claim 108 words

In a scanning probe microscope, a probe comprising a cantilever and a tip, and a deflection sensor for detecting the deflection of said cantilever, said deflection sensor comprising a light source for directing a beam of light against a reflective surface on said cantilever and a linear position-sensitive photodetector for detecting the position of said light beam after it strikes said reflective surface, said light beam striking said linear position-sensitive photodetector at different positions as said cantilever deflects, said linear position-sensitive photodetector providing a continuous, substantially linear output signal in response to the displacement of said beam of light as a result of the deflection of said cantilever.

Claim 12

Dependent Claim 108 words

In a scanning probe microscope, a probe comprising a cantilever and a tip, and a deflection sensor for detecting the deflection of said cantilever, said deflection sensor comprising a light source for directing a beam of light against a reflective surface on said cantilever and a linear position-sensitive photodetector for detecting the position of said light beam after it strikes said reflective surface, said light beam striking said linear position-sensitive photodetector at different positions as said cantilever deflects, said linear position-sensitive photodetector providing a continuous, substantially linear output signal in response to the displacement of said beam of light as a result of the deflection of said cantilever.

Claim 13

Independent Claim 133 words

A method of scanning a sample surface with a scanning probe microscope, said microscope comprising a feedback loop for controlling the relative positions of a probe and a sample along an axis perpendicular to a surface, said feedback loop being adjustable by varying one or more parameters, said method comprising the steps of: scanning said sample along a series of adjacent lines, each of said lines being scanned first in a forward direction and then in a reverse direction; sensing and storing data while scanning said line in said forward direction; using said data to adjust said one or more parameters; scanning said line in said reverse direction under control of said one or more parameters as adjusted; and generating a representation of said surface while scanning said line in said reverse direction.

Claim 14

Independent Claim 133 words

A method of scanning a sample surface with a scanning probe microscope, said microscope comprising a feedback loop for controlling the relative positions of a probe and a sample along an axis perpendicular to a surface, said feedback loop being adjustable by varying one or more parameters, said method comprising the steps of: scanning said sample along a series of adjacent lines, each of said lines being scanned first in a forward direction and then in a reverse direction; sensing and storing data while scanning said line in said forward direction; using said data to adjust said one or more parameters; scanning said line in said reverse direction under control of said one or more parameters as adjusted; and generating a representation of said surface while scanning said line in said reverse direction.

Claim 15

Dependent Claim 43 words

The method of claim 10 wherein at least one of said one or more scanning parameters is selected from the group including scan direction, scan location, scan area, dynamic range, tip contact force, tunneling current, tunneling voltage, scanning rate and feedback filtering parameters.

Claim 16

Independent Claim 110 words

A method of scanning a sample surface with a scanning probe microscope, said method comprising the steps of: using a controller and a scanner to scan said sample along a series of adjacent lines in an x,y plane, each line in said series being scanned in an opposite direction from the lines preceding and following said line, each of said lines being scanned only once in a single direction; detecting the position of said sample in said x,y plane; delivering to said controller a signal representative of said position of said sample; and obtaining information concerning said surface during each of said scans to generate a representation of said surface.

Claim 17

Independent Claim 110 words

A method of scanning a sample surface with a scanning probe microscope, said method comprising the steps of: using a controller and a scanner to scan said sample along a series of adjacent lines in an x,y plane, each line in said series being scanned in an opposite direction from the lines preceding and following said line, each of said lines being scanned only once in a single direction; detecting the position of said sample in said x,y plane; delivering to said controller a signal representative of said position of said sample; and obtaining information concerning said surface during each of said scans to generate a representation of said surface.

Claim 18

Dependent Claim 117 words

A scanning probe microscope comprising: a probe for sensing information relating to a surface of a sample; first means for causing said probe to scan said surface generally in an x,y plane; second means for receiving said information from said probe and generating in response thereto a signal representing a desired change in the spatial relationship of said probe and said sample in a z direction perpendicular to said x,y plane; third means for adjusting the spatial relationship of said probe and said sample in said z direction; and fourth means for detecting a position of said sample in said z direction, an output of said fourth means being used to generate a representation of said surface.

Claim 19

Dependent Claim 117 words

A scanning probe microscope comprising: a probe for sensing information relating to a surface of a sample; first means for causing said probe to scan said surface generally in an x,y plane; second means for receiving said information from said probe and generating in response thereto a signal representing a desired change in the spatial relationship of said probe and said sample in a z direction perpendicular to said x,y plane; third means for adjusting the spatial relationship of said probe and said sample in said z direction; and fourth means for detecting a position of said sample in said z direction, an output of said fourth means being used to generate a representation of said surface.

Claim 20

Dependent Claim 58 words

The scanning probe microscope of claim 13 wherein said output of said fourth means is delivered as an input to said second means, said output of said fourth means being used by said second means to cause said third means to vary the adjustment of the spatial relationship of said probe and said sample in said z direction.

Claim 21

Dependent Claim 35 words

The scanning probe microscope of claim 13 wherein said output of said fourth means is delivered as an input to said first means for varying the manner in which said probe scans said sample surface.

Claim 22

Dependent Claim 96 words

The scanning probe microscope of claim 13 wherein said first and third means comprise a piezoelectric tube having a central axis and two ends, said central axis being aligned in said z direction, one of said ends being fixed, said piezoelectric tube bending in response to a signal from an x,y controller to cause said probe to scan said sample surface, and said piezoelectric tube expanding or contracting along said central axis in response to a signal from a z controller to adjust the spatial relationship of said probe and said sample in said z direction.

Claim 23

Dependent Claim 26 words

The scanning probe microscope of claim 16 wherein said fourth means comprises at least two position-sensitive detectors mounted at diametrically opposed positions on said piezoelectric tube.

Claim 24

Dependent Claim 25 words

The scanning probe microscope of claim 16 wherein said fourth means comprises two position-sensitive detectors mounted opposite two diametrically opposed positions on said piezoelectric tube.

Claim 25

Dependent Claim 34 words

The scanning probe microscope of claim 16, further comprising fifth means for detecting the position of said sample in said x,y plane, an output of said fifth means being delivered to said first means.

Claim 26

Dependent Claim 45 words

The scanning probe microscope of claim 13 wherein said fourth means delivers an output representing said position of said sample in said z direction which is independent of any tilting of said sample with respect to said x,y plane as the surface is being scanned.

Claim 27

Dependent Claim 79 words

The scanning probe microscope of claims 13, 14 or 15 wherein said second means comprises a deflection sensor for receiving said information from said probe, said deflection sensor generating an error signal in response thereto, said scanning probe microscope further comprising means for applying a selected function to said error signal to provide a modified error signal and means for combining said modified error signal and said output of said fourth means to generate a representation of said surface.

Claim 28

Dependent Claim 34 words

The scanning probe microscope of claim 13 further comprising fifth means for detecting the position of said probe in said x,y plane, an output of said fifth means being delivered to said first means.

Claim 29

Independent Claim 318 words

A method of using a scanning probe microscope, said scanning probe microscope comprising: a probe for sensing information relating to a surface of a sample; first means for causing said probe to scan said surface generally in an x,y plane; second means for receiving said information from said probe and generating in response thereto a signal representing a desired change in the spatial relationship of said probe and said sample in a z direction perpendicular to said x,y plane; third means for adjusting the spatial relationship of said probe and said sample in said z direction; and fourth means for detecting a position of said sample in said z direction, an output of said fourth means being used to generate a representation of said surface, wherein said output of said fourth means is delivered as an input to said second means, said output of said fourth means being used by said second means to cause said third means to vary the adjustment of the spatial relationship of said probe and said sample in said z direction, and wherein said first and third means comprise a piezoelectric tube having a central axis and two ends, said central axis being aligned in said z direction, one of said ends being fixed, said piezoelectric tube bending in response to a signal from an x,y controller to cause said probe to scan said sample surface, and said piezoelectric tube expanding or contracting along said central axis in response to a signal from a z controller to adjust the spatial relationship of said probe and said sample in said z direction, said piezoelectric tube having a resonant frequency for vibrations parallel to said central axis, said method comprising the step of operating said scanning probe microscope at a scanning rate such that said z controller generates an oscillating signal in said piezoelectric tube at a frequency which is greater than said resonant frequency.

Claim 30

Independent Claim 318 words

A method of using a scanning probe microscope, said scanning probe microscope comprising: a probe for sensing information relating to a surface of a sample; first means for causing said probe to scan said surface generally in an x,y plane; second means for receiving said information from said probe and generating in response thereto a signal representing a desired change in the spatial relationship of said probe and said sample in a z direction perpendicular to said x,y plane; third means for adjusting the spatial relationship of said probe and said sample in said z direction; and fourth means for detecting a position of said sample in said z direction, an output of said fourth means being used to generate a representation of said surface, wherein said output of said fourth means is delivered as an input to said second means, said output of said fourth means being used by said second means to cause said third means to vary the adjustment of the spatial relationship of said probe and said sample in said z direction, and wherein said first and third means comprise a piezoelectric tube having a central axis and two ends, said central axis being aligned in said z direction, one of said ends being fixed, said piezoelectric tube bending in response to a signal from an x,y controller to cause said probe to scan said sample surface, and said piezoelectric tube expanding or contracting along said central axis in response to a signal from a z controller to adjust the spatial relationship of said probe and said sample in said z direction, said piezoelectric tube having a resonant frequency for vibrations parallel to said central axis, said method comprising the step of operating said scanning probe microscope at a scanning rate such that said z controller generates an oscillating signal in said piezoelectric tube at a frequency which is greater than said resonant frequency.

Claim 31

Independent Claim 276 words

A method of using a scanning probe microscope, said scanning probe microscope comprising: a probe for sensing information relating to a surface of a sample; first means for causing said probe to scan surface generally in an x,y plane; second means for receiving said information from said probe and generating in response thereto a signal representing a desired change in the spatial relationship of said probe and said sample in a z direction perpendicular to said x,y plane; third means for adjusting the spatial relationship of said probe and said sample in said z direction.; fourth means for detecting a position of said sample in said z direction, an output of said fourth means being used to generate a representation of said surface; and fifth means for detecting the position of said sample in said x,y plane, an output of said fifth means being delivered to said first means; wherein said first and third means comprise a piezoelectric tube having a central axis and two ends, said central axis being aligned in said z direction, one of said ends being fixed, said piezoelectric tube bending in response to a signal from an x,y controller to cause said probe to scan said sample surface, and said piezoelectric tube expanding or contracting along central axis in response to a signal from a z controller to adjust the spatial relationship of said probe and said sample in said z direction, said piezoelectric tube having a resonant frequency for vibrations in a direction parallel to said x,y plane, said method comprising the step of operating said probe microscope in a scanning pattern at a frequency greater than said resonant frequency.

Claim 32

Independent Claim 276 words

A method of using a scanning probe microscope, said scanning probe microscope comprising: a probe for sensing information relating to a surface of a sample; first means for causing said probe to scan surface generally in an x,y plane; second means for receiving said information from said probe and generating in response thereto a signal representing a desired change in the spatial relationship of said probe and said sample in a z direction perpendicular to said x,y plane; third means for adjusting the spatial relationship of said probe and said sample in said z direction.; fourth means for detecting a position of said sample in said z direction, an output of said fourth means being used to generate a representation of said surface; and fifth means for detecting the position of said sample in said x,y plane, an output of said fifth means being delivered to said first means; wherein said first and third means comprise a piezoelectric tube having a central axis and two ends, said central axis being aligned in said z direction, one of said ends being fixed, said piezoelectric tube bending in response to a signal from an x,y controller to cause said probe to scan said sample surface, and said piezoelectric tube expanding or contracting along central axis in response to a signal from a z controller to adjust the spatial relationship of said probe and said sample in said z direction, said piezoelectric tube having a resonant frequency for vibrations in a direction parallel to said x,y plane, said method comprising the step of operating said probe microscope in a scanning pattern at a frequency greater than said resonant frequency.

Claim 33

Dependent Claim 121 words

A scanning probe microscope comprising: a probe for sensing information relating to a sample surface; a sensor for receiving said information and generating an error signal in response thereto; a controller for receiving said error signal and generating in response thereto a z control signal, said z control signal being delivered to a fine sample movement stage in order to create a desired change in the spatial relationship of said probe and said sample; means for applying a selected function to said error signal to provide a modified error signal, means for combining said z control signal and said modified error signal to provide an output signal; and means for generating a representation of said sample surface from said output signal.

Claim 34

Dependent Claim 121 words

A scanning probe microscope comprising: a probe for sensing information relating to a sample surface; a sensor for receiving said information and generating an error signal in response thereto; a controller for receiving said error signal and generating in response thereto a z control signal, said z control signal being delivered to a fine sample movement stage in order to create a desired change in the spatial relationship of said probe and said sample; means for applying a selected function to said error signal to provide a modified error signal, means for combining said z control signal and said modified error signal to provide an output signal; and means for generating a representation of said sample surface from said output signal.

Claim 35

Dependent Claim 29 words

The scanning probe microscope of claim 25, wherein said output signal is approximately equal to (i) said z control signal plus (ii) said error signal multiplied by a constant.

Claim 36

Dependent Claim 119 words

A scanning probe microscope comprising a head containing a probe; a base an x,y coarse movement stage including a platform for holding a sample, said x,y coarse movement stage being in movable contact with said base at three contact points; a first motorized drive means for moving said x,y coarse movement stage along a first axis parallel to a surface of said sample, a second motorized drive means for moving said x,y coarse movement stage along a second axis parallel to said surface of said sample and perpendicular to said first axis; said first motorized drive means and said second motorized drive means being in movable contact with said x,y coarse stage at a total of three contact points.

Claim 37

Dependent Claim 119 words

A scanning probe microscope comprising a head containing a probe; a base an x,y coarse movement stage including a platform for holding a sample, said x,y coarse movement stage being in movable contact with said base at three contact points; a first motorized drive means for moving said x,y coarse movement stage along a first axis parallel to a surface of said sample, a second motorized drive means for moving said x,y coarse movement stage along a second axis parallel to said surface of said sample and perpendicular to said first axis; said first motorized drive means and said second motorized drive means being in movable contact with said x,y coarse stage at a total of three contact points.

Claim 38

Dependent Claim 94 words

The scanning probe microscope of claim 27 wherein said first motorized drive means comprises a pushing member, a first motor, a first driving member, and a first reference member fixed to said base, said first driving member extending from said first motor through said first reference member to said pushing member, and wherein said second motorized drive means comprises a second motor, a second driving member, and a second reference member fixed to said base, said second driving member extending from said second motor through said second reference member to said x,y coarse stage.

Claim 39

Dependent Claim 62 words

The scanning probe microscope of claim 28 wherein said first and second reference members comprise first and second fixed nuts, respectively, said first and second driving members comprise first and second screws threaded through said first and second fixed nuts, respectively, and said first and second motors are slidably mounted on said base and coupled to said first and second screws, respectively.

Claim 40

Dependent Claim 41 words

The scanning probe microscope of claim 27 wherein said first motorized drive means makes contact with said x,y coarse stage at two contact points and said second motorized drive means makes contact with said x,y coarse stage at one contact point.

Claim 41

Dependent Claim 56 words

The scanning probe microscope of claim 30, further comprising first biasing means for maintaining said contact between said x,y coarse stage and said first motorized drive means at said two contact points and second biasing means for maintaining said contact between said x,y coarse stage and said second motorized drive means at said one contact point.

Claim 42

Dependent Claim 40 words

The scanning probe microscope of claim 27 wherein each of said three contact points between said x,y coarse stage and said base is between a convex surface formed on said x,y coarse stage and a flat surface on said base.

Claim 43

Dependent Claim 138 words

A coarse movement stage for positioning a sample in relation to a probe in a scanning probe microscope, said probe being contained in a head of said scanning probe microscope, said coarse movement stage comprising first, second and third approach means, said first, second and third approach means making contact with first, second and third contact points, respectively, on the head of said scanning probe microscope, said contact points describing a triangle, each of said approach means being connected to one of a plurality of motors, each of said motors being for driving one of said approach means so as to elevate or lower one of said contact points and thereby alter a position of said head in relation to said sample wherein said first, second and third contact points constitute a kinematic mounting arrangement for said head.

Claim 44

Dependent Claim 138 words

A coarse movement stage for positioning a sample in relation to a probe in a scanning probe microscope, said probe being contained in a head of said scanning probe microscope, said coarse movement stage comprising first, second and third approach means, said first, second and third approach means making contact with first, second and third contact points, respectively, on the head of said scanning probe microscope, said contact points describing a triangle, each of said approach means being connected to one of a plurality of motors, each of said motors being for driving one of said approach means so as to elevate or lower one of said contact points and thereby alter a position of said head in relation to said sample wherein said first, second and third contact points constitute a kinematic mounting arrangement for said head.

Claim 45

Dependent Claim 159 words

A coarse movement stage for positioning a sample in relation to a probe in a scanning probe microscope, said probe being contained in a head of said scanning probe microscope, said coarse movement stage comprising first, second and third approach means said first, second and third approach means making contact with first, second and third contact points, respectively, on the head of said scanning probe microscope, said contact points describing a triangle, each of said approach means being connected to one of a plurality of motors, each of said motors being for driving one of said approach means so as to elevate or lower one of said contact points and thereby alter a position of said head in relation to said sample, wherein each of said first, second and third approach means comprises a screw threaded through one of a plurality of fixed nuts, each of said fixed nuts being mounted in a base of said scanning probe microscope.

Claim 46

Dependent Claim 159 words

A coarse movement stage for positioning a sample in relation to a probe in a scanning probe microscope, said probe being contained in a head of said scanning probe microscope, said coarse movement stage comprising first, second and third approach means said first, second and third approach means making contact with first, second and third contact points, respectively, on the head of said scanning probe microscope, said contact points describing a triangle, each of said approach means being connected to one of a plurality of motors, each of said motors being for driving one of said approach means so as to elevate or lower one of said contact points and thereby alter a position of said head in relation to said sample, wherein each of said first, second and third approach means comprises a screw threaded through one of a plurality of fixed nuts, each of said fixed nuts being mounted in a base of said scanning probe microscope.

Claim 47

Dependent Claim 25 words

The coarse movement stage of claim 34 wherein each of said motors is coupled to one of said screws and slidably mounted on said base.

Claim 48

Dependent Claim 20 words

The coarse movement stage of claim 35, further comprising means for sensing the position of each of said approach means.

Claim 49

Dependent Claim 35 words

The coarse movement stage of claim 36 wherein said first, second and third contact points lie in a horizontal plane when each of said motors has reached a position detected by said means of sensing.

Claim 50

Dependent Claim 29 words

The coarse movement stage of claim 37, further comprising a means for controlling each of said motors separately so as to alter the tilt and pitch of said probe.

Claim 51

Independent Claim 147 words

A method for operating a scanning probe microscope for examining a surface of a sample, said microscope having a sample stage movable under motor control along an x axis and along a y axis, said x and y axes being generally parallel to said surface, said microscope further comprising a probe and a scanner, said method comprising the steps of: loading the sample onto the sample stage; positioning the probe at a predetermined distance from the sample stage; causing the probe and the sample to move relative to each other along a z axis perpendicular to said x and y axes, until said probe is adjacent said sample surface; measuring the distance moved by the probe and/or the sample along the z axis in the preceding step; and using said measured distance to adjust a sensitivity of movement of said scanner along said x and y axes.

Claim 52

Independent Claim 147 words

A method for operating a scanning probe microscope for examining a surface of a sample, said microscope having a sample stage movable under motor control along an x axis and along a y axis, said x and y axes being generally parallel to said surface, said microscope further comprising a probe and a scanner, said method comprising the steps of: loading the sample onto the sample stage; positioning the probe at a predetermined distance from the sample stage; causing the probe and the sample to move relative to each other along a z axis perpendicular to said x and y axes, until said probe is adjacent said sample surface; measuring the distance moved by the probe and/or the sample along the z axis in the preceding step; and using said measured distance to adjust a sensitivity of movement of said scanner along said x and y axes.

Claim 53

Dependent Claim 22 words

The method of claim 39, wherein the step of loading includes the step of moving the sample stage along said x axis.

Claim 54

Dependent Claim 41 words

The method of claim 39, further comprising the step, after the probe is adjacent the sample surface, of tilting a support for the probe of the microscope to align the support in a plane parallel to the surface of the sample.

Claim 55

Independent Claim 136 words

A method of positioning a probe of a scanning probe microscope relative to a sample, said scanning probe microscope including an optical microscope, said method comprising the steps of: setting a focal plane of the optical microscope a selected distance below a tip of the probe by adjusting a lens of the optical microscope under motor control; moving the lens and probe relative to the sample at a first relatively high speed until an image of the sample is substantially in focus in the optical microscope, said focal plane being maintained at said selected distance below said tip during said movement; and causing the probe and the sample to move relative to one another at a second relatively low speed until said probe is at a desired location with respect to a surface of the sample.

Claim 56

Independent Claim 136 words

A method of positioning a probe of a scanning probe microscope relative to a sample, said scanning probe microscope including an optical microscope, said method comprising the steps of: setting a focal plane of the optical microscope a selected distance below a tip of the probe by adjusting a lens of the optical microscope under motor control; moving the lens and probe relative to the sample at a first relatively high speed until an image of the sample is substantially in focus in the optical microscope, said focal plane being maintained at said selected distance below said tip during said movement; and causing the probe and the sample to move relative to one another at a second relatively low speed until said probe is at a desired location with respect to a surface of the sample.

Claim 57

Dependent Claim 75 words

The method of claim 42, further comprising the steps of determining a tilt of the sample surface, comprising the steps of: moving the lens to bring into focus at least three locations on the surface of the sample; determining a slope of the surface of the sample at an area defined by the three locations, from the movement of the lens; and adjusting the head tilt in response to the slope of the sample surface.

Claim 58

Independent Claim 68 words

A method of operation for operating a scanning microscope, comprising the steps of: scanning a sample in accordance with particular scanning parameters; capturing data from the scanning; applying a selected mathematical function to the data; determining in real time a resonance in the captured data; and using the results of applying the mathematical function to the data to alter the particular scanning parameters and to attenuate the resonance.

Claim 59

Independent Claim 68 words

A method of operation for operating a scanning microscope, comprising the steps of: scanning a sample in accordance with particular scanning parameters; capturing data from the scanning; applying a selected mathematical function to the data; determining in real time a resonance in the captured data; and using the results of applying the mathematical function to the data to alter the particular scanning parameters and to attenuate the resonance.

Claim 60

Dependent Claim 32 words

A scanning probe microscope, said microscope comprising a head, a sample platform, and a probe, said probe comprising a cantilever and a tip, said probe being removably, kinematically mounted in said head.

Claim 61

Dependent Claim 32 words

A scanning probe microscope, said microscope comprising a head, a sample platform, and a probe, said probe comprising a cantilever and a tip, said probe being removably, kinematically mounted in said head.

Claim 62

Dependent Claim 25 words

The scanning probe microscope of claim 45, said probe being removably, kinematically mounted on a cartridge, said cartridge being removably, kinematically mounted in said head.

Claim 63

Dependent Claim 41 words

The scanning probe microscope of claim 46, said cartridge being mounted in said head by means of a first ball lodged in a conical depression, a second ball lodged in a slot, and a third ball resting on a flat surface.

Claim 64

Dependent Claim 42 words

The scanning probe microscope of claim 46, said probe being mounted on said cartridge by means of a first ball mounted in a first slot, a second ball mounted in a second slot, and a third ball mounted in a third slot.

Claim 65

Dependent Claim 25 words

The scanning probe microscope of claim 48 wherein said first, second, and third slots are angled with respect to each other at approximately 120 degrees.

Claim 66

Dependent Claim 29 words

The scanning probe microscope of claim 45, said probe further containing a chip, said cantilever being connected to said chip, said chip being removably, kinematically mounted on a plate.

Claim 67

Dependent Claim 45 words

The scanning probe microscope of claim 50, said chip being mounted on said plate by means of three balls and two slots, two of said balls being lodged in one of said slots and the third ball being lodged in the other of said slots.

Claim 68

Independent Claim 107 words

A method of generating a representation of a sample surface by means of a scanning probe microscope, said microscope comprising a probe for sensing characteristics of said sample surface, a sensor for detecting features of said sample surface and generating an error signal, a controller for receiving said error signal and generating a z control signal, said method comprising the steps of: (a) passing said error signal through a function generator to provide a modified error signal; (b) combining said z control signal and said modified error signal to produce an output signal; and (c) using said output signal to produce said representation of the sample surface.

Claim 69

Independent Claim 107 words

A method of generating a representation of a sample surface by means of a scanning probe microscope, said microscope comprising a probe for sensing characteristics of said sample surface, a sensor for detecting features of said sample surface and generating an error signal, a controller for receiving said error signal and generating a z control signal, said method comprising the steps of: (a) passing said error signal through a function generator to provide a modified error signal; (b) combining said z control signal and said modified error signal to produce an output signal; and (c) using said output signal to produce said representation of the sample surface.

Claim 70

Dependent Claim 47 words

The method of claim 52 wherein, Z c is approximately equal to Z v +αE, E being the value of the error signal, Z v being the value of the z control signal, Z c being the value of the output signal, and a being a constant.

Claim 71

Independent Claim 101 words

A method of analyzing a surface of a sample using a scanning probe microscope, said method comprising the steps of: scanning said surface with a probe in an x,y plane; using information from said probe to generate a first signal representing a desired change in the relationship of said probe and said sample in a z direction perpendicular to said x,y plane; using said first signal to effect said desired change; detecting a position of said sample in said z direction and generating a second signal representing said position; and using said second signal to generate a representation of said surface.

Claim 72

Independent Claim 101 words

A method of analyzing a surface of a sample using a scanning probe microscope, said method comprising the steps of: scanning said surface with a probe in an x,y plane; using information from said probe to generate a first signal representing a desired change in the relationship of said probe and said sample in a z direction perpendicular to said x,y plane; using said first signal to effect said desired change; detecting a position of said sample in said z direction and generating a second signal representing said position; and using said second signal to generate a representation of said surface.

Claim 73

Dependent Claim 28 words

The method of claim 54 further comprising the steps of using said second signal to effect said desired change in the relationship of said probe and said sample.

Claim 74

Dependent Claim 25 words

The method of claim 54 further comprising the step of using said second signal to vary the manner in which said probe scans said surface.

Claim 75

Dependent Claim 42 words

The method of claim 56 further comprising the step of detecting the position of said probe in said x,y plane, generating a third signal representative thereof, and using said third signal to vary the manner in which said probe scans said surface.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1997-12-26	1998-06-27	1998-12-27	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2001-12-26	2002-06-27	2002-12-27	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2005-12-26	2006-06-27	2006-12-27	$7700.00	Window Closed / Lapsed

Scanning probe microscope

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