Patent US5376409B1 successfully refreshed from Google Patents.
US5376409B1
Expired / Lapsed
US
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Process and apparatus for the use of solid precursor sources in liquid form for vapor deposition of materials
Assignee: Research Foundation of the State University of New York
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Filing: 1992-12-21
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Granted: 1997-06-03
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Expires: 2012-12-21
Abstract
No abstract record available.
Inventors
- 👤 Alain E Kaloyeros
- 👤 Eric T Eisenbraun
- 👤 Bo Zheng
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 20:48
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/06; C23C16/18; C23C16/44; C23C16/448; C23C16/4481; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/734
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-06-02 | 2000-12-02 | 2001-06-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-06-02 | 2004-12-02 | 2005-06-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-06-02 | 2008-12-02 | 2009-06-03 | $7700.00 | Window Closed / Lapsed |