Patent US5374849A successfully refreshed from Google Patents.
US5374849A
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Conductive layer connection structure of semiconductor device
Assignee: Mitsubishi Electric Corp
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Filing: 1993-03-01
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Granted: 1994-12-20
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Expires: 2013-03-01
Abstract
Abstract A difference in level between a tungsten film and a barrier metal film is inevitably caused by the formation of barrier metal film and tungsten film in a through-hole. A tungsten film is formed to eliminate this difference in level. Tungsten film is embedded in an opening region surrounded by the sidewall of through-hole, an upper surface of barrier metal film and an upper surface of tungsten film. Therefore, the connection between an aluminum film and tungsten film cannot be broken by the expansion of the air in the space portion even through the step involving heat treatment.
Inventors
- 👤 Kenichi Tada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 18:47
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/032; H10W20/033; H10W20/037; H10W20/056; H10W20/40
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
223 words
A conductive layer connection structure of a semiconductor device electrically interconnecting an upper conductive layer and a lower conductive layer, comprising: an insulating layer formed on said lower conductive layer and having an upper main surface and a through-hole extending from said upper main surface to said lower conductive layer; a first conductive layer embedded in said through-hole and electrically connecting said upper conductive layer and said lower conductive layer; a barrier metal layer formed between the sidewall of said through-hole and said first conductive layer, and between a main surface of said lower conductive layer and a lower surface of said first conductive layer, an upper surface of said barrier metal layer in said through-hole being positioned lower from said upper main surface of said insulating layer than an upper surface of said first conductive layer; and. a step reducing structure formed on the upper surface of said barrier metal layer in said through-hole for reducing a difference in level from said upper main surface of said insulating layer between said upper surface of said barrier metal layer and said upper surface of said first conductive layer; wherein said first conductive layer, said barrier metal layer and said step reducing structure are different materials, respectively and said step reducing structure is formed on the exposed upper surface of said first conductive layer.
Claim 2
Dependent Claim
223 words
A conductive layer connection structure of a semiconductor device electrically interconnecting an upper conductive layer and a lower conductive layer, comprising: an insulating layer formed on said lower conductive layer and having an upper main surface and a through-hole extending from said upper main surface to said lower conductive layer; a first conductive layer embedded in said through-hole and electrically connecting said upper conductive layer and said lower conductive layer; a barrier metal layer formed between the sidewall of said through-hole and said first conductive layer, and between a main surface of said lower conductive layer and a lower surface of said first conductive layer, an upper surface of said barrier metal layer in said through-hole being positioned lower from said upper main surface of said insulating layer than an upper surface of said first conductive layer; and. a step reducing structure formed on the upper surface of said barrier metal layer in said through-hole for reducing a difference in level from said upper main surface of said insulating layer between said upper surface of said barrier metal layer and said upper surface of said first conductive layer; wherein said first conductive layer, said barrier metal layer and said step reducing structure are different materials, respectively and said step reducing structure is formed on the exposed upper surface of said first conductive layer.
Claim 3
Dependent Claim
27 words
The conductive layer connection structure of the semiconductor device according to claim 1, wherein said step reducing structure is electrically conductive and coats said first conductive layer.
Claim 4
Dependent Claim
26 words
The conductive layer connection structure of the semiconductor device according to claim 2, wherein said step reducing structure is a high melting point refractory metal film.
Claim 5
Dependent Claim
26 words
The conductive layer connection structure of the semiconductor device according to claim 1, wherein said step reducing structure is a high melting point refractory metal film.
Claim 6
Dependent Claim
28 words
The conductive layer connection structure of the semiconductor device according to claim 1, wherein said first conductive layer constitutes a part of a bit line of a DRAM.
Claim 7
Dependent Claim
22 words
The conductive layer connection structure of the semiconductor device according to claim 1, wherein said step reducing structure comprises an insulating film.
Claim 8
Dependent Claim
30 words
The conductive layer connection structure of the semiconductor device according to claim 1, wherein said step reducing structure comprises a high melting point refractory metal film and an insulating film.
References Cited (Backward Citations)
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