US5374328A
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Method of fabricating group III-V compound
Assignee: Qorvo US Inc
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Filing: 1993-03-25
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Granted: 1994-12-20
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Expires: 2013-03-25
Abstract
Abstract A solution of hydrogen peroxide [H2O2], citric acid [HOC(CH2COOH)2COOH.H2O], and a salt of citric acid such as potassium citrate [HOC(CH2COOK)2COOK.H2O], and hydrogen peroxide [H2O2], in a proper pH range, selectively etches GaAs-containing Group III-V compounds in the presence of other Group III-V compounds. As an illustration, AlyGa1-yAs is selectively etched in the presence of AlxGa1-xAs (0</=y<0.2 & x>0.2) when the pH range of the etchant solution is between approximately 3 and 6. The etchant solution described herein may be utilized in the fabrication of, for example, high-frequency transistors exhibiting improved saturated current (Idss) and threshold voltage (Vth) uniformity.
Inventors
- 👤 Ronald D. Remba
- 👤 Paul E. Brunemeier
- 👤 Bruce C. Schmukler
- 👤 Walter A. Strifler
- 👤 Daniel H. Rosenblatt
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 10:51
CPC Classifications
G; G03; G03F; G03F7/00; H; H10; H10D; H10D30/00; H10D30/01; H10D30/015; H10P; H10P50/00; H10P50/60; H10P50/64; H10P50/642; H10P50/646
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
126 words
A method of making a semiconductor device comprising the steps of: fabricating a structure having first and second Group III-V compound regions of differing composition, said first compound region including GaAs; subjecting said structure to an etchant comprising a solution of a citrate buffer and H 2 O 2 with a pH in the range of approximately 3 to 6 so that said first region is selectively etched with respect to the second region, said citrate buffer including citric acid and a salt of citric acid, wherein the concentration by volume of hydrogen peroxide in said solution is greater than the concentration by volume of citric acid in said solution and greater than the concentration by volume of said salt of citric acid in said solution.
Claim 2
Independent Claim
126 words
A method of making a semiconductor device comprising the steps of: fabricating a structure having first and second Group III-V compound regions of differing composition, said first compound region including GaAs; subjecting said structure to an etchant comprising a solution of a citrate buffer and H 2 O 2 with a pH in the range of approximately 3 to 6 so that said first region is selectively etched with respect to the second region, said citrate buffer including citric acid and a salt of citric acid, wherein the concentration by volume of hydrogen peroxide in said solution is greater than the concentration by volume of citric acid in said solution and greater than the concentration by volume of said salt of citric acid in said solution.
Claim 3
Dependent Claim
44 words
The method of claim 1 further including the step of formulating said etchant such that said concentration of H 2 O 2 is in the range of approximately 1-2.5 moles/liter when said concentration of citric acid is in the range of approximately 0.2-0.7 moles/liter.
Claim 4
Dependent Claim
46 words
The method of claim 2 further including the step of formulating said etchant such that said concentration of H 2 O 2 is in the range of approximately 1-2.5 moles/liter when said concentration of said salt of citric acid is approximately in the range 0.2-0.7 moles/liter.
Claim 5
Dependent Claim
61 words
The method of claim 1 further including the step of formulating said etchant such that: said concentration of said salt of citric acid in said solution is in the range of 0.2-0.7 moles/liter, and one-half of the sum of said concentrations of said citric acid and said salt of citric acid is greater than 0.3 moles/liter and less than 1.0 moles/liter.
Claim 6
Dependent Claim
33 words
The method of claim 1 wherein said first compound region consists of Al y Ga 1-y As and said second compound region consists of Al x Ga 1-x As wherein (0≦y<0.2) and (0.2<x≦1.0).
Claim 7
Independent Claim
170 words
A method of making a semiconductor device comprising the steps of: fabricating a structure by (i) growing one or more layers of the type X a Y 1-a As, where X is an atom selected from the group of IIIA atoms and Y is a different atom selected from the group of IIIA atoms, and where (0<a≦1) upon a semiconductor substrate, and (ii) growing first and second Group III-V compound regions of differing composition upon said one or more layers, said first compound region including GaAs; and subjecting said structure to an etchant comprising a solution of a citrate buffer and H 2 O 2 with a pH in the range of approximately 3 to 6 so that said first region is selectively etched, said citrate buffer including citric acid and a salt of citric acid, wherein the concentration of hydrogen peroxide in said solution is greater than the concentration of citric acid in said solution and greater than the concentration of said salt of citric acid in said solution.
Claim 8
Independent Claim
170 words
A method of making a semiconductor device comprising the steps of: fabricating a structure by (i) growing one or more layers of the type X a Y 1-a As, where X is an atom selected from the group of IIIA atoms and Y is a different atom selected from the group of IIIA atoms, and where (0<a≦1) upon a semiconductor substrate, and (ii) growing first and second Group III-V compound regions of differing composition upon said one or more layers, said first compound region including GaAs; and subjecting said structure to an etchant comprising a solution of a citrate buffer and H 2 O 2 with a pH in the range of approximately 3 to 6 so that said first region is selectively etched, said citrate buffer including citric acid and a salt of citric acid, wherein the concentration of hydrogen peroxide in said solution is greater than the concentration of citric acid in said solution and greater than the concentration of said salt of citric acid in said solution.
Claim 9
Dependent Claim
39 words
The method of claim 6 wherein said second region comprises Al x Ga 1-x As where (0.2<x≦1), said second region being grown upon said one or more layers to a thickness selected in accordance with the value of x.
Claim 10
Independent Claim
162 words
A method of making a field-effect transistor comprising the steps of: fabricating a structure by (i) growing one or more active channel layers comprised of group III-V compounds upon a semiconductor substrate, (ii) growing a thin etch stop region of Al x Ga 1-x As upon said active channel layers where (0.2<x≦1), and (iii) growing a cap region including GaAs upon said thin etch stop region; and subjecting said structure to an etchant comprising a solution of a citrate buffer and H 2 O 2 with a pH in the range of approximately 3 to 6 so that said cap region is selectively etched and said etch stop region prevents etching of said active channel layers, said citrate buffer including citric acid and a salt of citric acid, wherein the concentration of hydrogen peroxide in said solution is greater than the concentration of citric acid in said solution and greater than the concentration of said salt of citric acid in said solution.
Claim 11
Independent Claim
162 words
A method of making a field-effect transistor comprising the steps of: fabricating a structure by (i) growing one or more active channel layers comprised of group III-V compounds upon a semiconductor substrate, (ii) growing a thin etch stop region of Al x Ga 1-x As upon said active channel layers where (0.2<x≦1), and (iii) growing a cap region including GaAs upon said thin etch stop region; and subjecting said structure to an etchant comprising a solution of a citrate buffer and H 2 O 2 with a pH in the range of approximately 3 to 6 so that said cap region is selectively etched and said etch stop region prevents etching of said active channel layers, said citrate buffer including citric acid and a salt of citric acid, wherein the concentration of hydrogen peroxide in said solution is greater than the concentration of citric acid in said solution and greater than the concentration of said salt of citric acid in said solution.
Claim 12
Dependent Claim
14 words
The method of claim 1 wherein said salt of citric acid comprises potassium citrate.
Claim 13
Dependent Claim
14 words
The method of claim 6 wherein said salt of citric acid comprises potassium citrate.
Claim 14
Independent Claim
150 words
A method of making a semiconductor transistor device comprising the steps of: fabricating a structure having first and second active channel layers respectively comprised of first and second Group III-V compound regions of differing composition, said first compound region including GaAs and said second compound region being of a thickness of less than 100 angstroms; subjecting said structure to an etchant comprising a solution of a citrate buffer and H 2 O 2 with a pH in the range of approximately 3 to 6 so that said first region is selectively etched with respect to the second region, said citrate buffer including citric acid and a salt of citric acid, wherein the concentration by volume of hydrogen peroxide in said solution is greater than the concentration by volume of citric acid in said solution and greater than the concentration by volume of said salt of citric acid in said solution.
Claim 15
Independent Claim
150 words
A method of making a semiconductor transistor device comprising the steps of: fabricating a structure having first and second active channel layers respectively comprised of first and second Group III-V compound regions of differing composition, said first compound region including GaAs and said second compound region being of a thickness of less than 100 angstroms; subjecting said structure to an etchant comprising a solution of a citrate buffer and H 2 O 2 with a pH in the range of approximately 3 to 6 so that said first region is selectively etched with respect to the second region, said citrate buffer including citric acid and a salt of citric acid, wherein the concentration by volume of hydrogen peroxide in said solution is greater than the concentration by volume of citric acid in said solution and greater than the concentration by volume of said salt of citric acid in said solution.
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