US5373359A
Expired / Lapsed
US
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Ellipsometer
Assignee: JA Woollam Co Inc
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Filing: 1992-09-18
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Granted: 1994-12-13
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Expires: 2012-09-18
Abstract
Abstract To sense characteristics of a sample, an ellipsometer includes a pivotal diffraction grating positioned to receive white light from the analyzer without further focusing of the light after the light leaves the sample. The diffraction grating is focused on the sensor at a predetermined angle with a precision of at least plus or minus one-half degree using an alignment-sensing means positioned between the analyzer and diffraction grating. The sensor includes an aperture through which the incident beam of light is transmitted, light-sensitive areas on opposite sides of said sensor and a comparator for comparing the signal from said light-sensitive areas. Equality of the light from the light-sensitive areas indicates that the incident beam of light is perpendicular to the diffraction grating. A second diffraction grating and a second sensing means may receive the specularly reflected white light from a first diffraction grating and reflect it to another diffraction grating to investigate another spectrum of light. A spectroscopic ellipsometer uses a stacked photodiode in which the first photodiode and second photodiode have overlapping spectral ranges.
Inventors
- 👤 John A. Woollam
- 👤 Blaine D. Johs
- 👤 David W. Doerr
- 👤 Reed A. Christenson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 22:11
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/17; G01N21/21; G01N21/211; G01J; G01J3/00; G01J3/28; G01J3/30; G01J3/36; G01J3/447; G01J4/00; G01J2003/2866; G01J3/02; G01J3/0289
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
91 words
A spectroscopic ellipsometer adapted to sense characteristics of a sample comprising: a light source; a polarization-state generator; an analyzer; and a diffraction grating and a collimator positioned so that the diffraction grating receives collimated white light passing through the analyzer without further focusing after the light leaves the sample and transmits the white light to a detector; wherein the diffraction grating reflects incident light onto the detector at a predetermined angle with respect to a normal to the diffraction grating with a precision of at least plus or minus one-half degree.
Claim 2
Dependent Claim
91 words
A spectroscopic ellipsometer adapted to sense characteristics of a sample comprising: a light source; a polarization-state generator; an analyzer; and a diffraction grating and a collimator positioned so that the diffraction grating receives collimated white light passing through the analyzer without further focusing after the light leaves the sample and transmits the white light to a detector; wherein the diffraction grating reflects incident light onto the detector at a predetermined angle with respect to a normal to the diffraction grating with a precision of at least plus or minus one-half degree.
Claim 3
Dependent Claim
15 words
A spectroscopic ellipsometer in accordance with claim 1 in which said diffraction grating is pivotable.
Claim 4
Dependent Claim
141 words
A spectroscopic ellipsometer in accordance with claim 1 further including: an alignment-sensing means for sensing an alignment of an incident beam of light from the analyzer to the surface of the diffraction grating; said alignment-sensing means including an aperture through which the incident beam of light is transmitted and an alignment light sensor having at least first and second light-sensitive areas on opposite sides of said alignment light sensor; means for comparing the signal from said light-sensitive areas; said alignment-sensing means being positioned between the analyzer and the diffraction grating whereby it receives light specularly reflected from the diffraction grating; said alignment-sensing means being adapted to sense light specularly reflected from the diffraction grating, whereby an equality of the light from the light-sensitive areas indicates that the incident beam of light is aligned at a predetermined angle to the diffraction grating.
Claim 5
Dependent Claim
36 words
A spectroscopic ellipsometer in accordance with claim 3 further including a second diffraction grating and a second detector whereby specularly reflected white light from the first mentioned diffraction grating is reflected to the second diffraction grating.
Claim 6
Dependent Claim
17 words
A spectroscopic ellipsometer in accordance with claim 1 in which said sensor is a silicon diode array.
Claim 7
Dependent Claim
48 words
A spectroscopic ellipsometer in accordance with claim 1 in which the collimator is positioned to receive light from a light source and transmit it to the polarization-state generator without either divergence or convergence of the light by more than ten degrees between the collimator and the diffraction grating.
Claim 8
Dependent Claim
27 words
A spectroscopic ellipsometer in accordance with claim 1 in which the light is transmitted from the light source to the polarization-state generator without passing through a monochromator.
Claim 9
Dependent Claim
70 words
A spectroscopic ellipsometer comprising: a light source including a monochromator; a polarization-state generator; an analyzer; and a detector positioned so that light from a monochromator is transmitted through the polarization-state generator, reflected from a sample and transmitted through the analyzer to the detector; said detector including a stacked photodiode in which the light transmitted through a first photodiode impinges on a second photodiode, said photodiodes having partly overlapping spectral ranges.
Claim 10
Dependent Claim
70 words
A spectroscopic ellipsometer comprising: a light source including a monochromator; a polarization-state generator; an analyzer; and a detector positioned so that light from a monochromator is transmitted through the polarization-state generator, reflected from a sample and transmitted through the analyzer to the detector; said detector including a stacked photodiode in which the light transmitted through a first photodiode impinges on a second photodiode, said photodiodes having partly overlapping spectral ranges.
Claim 11
Dependent Claim
21 words
A spectroscopic ellipsometer in accordance with claim 8 in which a spectrum covers a wavelength range between 0.25 to 1.7 microns.
Claim 12
Dependent Claim
17 words
A spectroscopic ellipsometer in accordance with claim 8 in which the light source includes a xenon lamp.
Claim 13
Independent Claim
80 words
A method of aligning a diffraction grating with incident light comprising the steps of: transmitting the incident light through an aperture having light-sensitive areas on at least two of its sides to the diffraction grating; and sensing the light specularly reflected from the diffraction grating on the at least two adjacent light sensitive areas a known distance from the aperture: and adjusting the position of the diffraction grating until the light on said at least two light-sensitive areas is balanced.
Claim 14
Independent Claim
80 words
A method of aligning a diffraction grating with incident light comprising the steps of: transmitting the incident light through an aperture having light-sensitive areas on at least two of its sides to the diffraction grating; and sensing the light specularly reflected from the diffraction grating on the at least two adjacent light sensitive areas a known distance from the aperture: and adjusting the position of the diffraction grating until the light on said at least two light-sensitive areas is balanced.
Claim 15
Independent Claim
71 words
A method of aligning a diffraction grating with incident light comprising the steps of: transmitting the incident light through an aperture to the diffraction grating; sensing light specularly reflected from the diffraction grating with a sensing means having at least two adjacent light sensitive areas a known distance from the aperture; and adjusting the position of the diffraction grating until the light on said at least two light-sensitive areas is balanced.
Claim 16
Independent Claim
71 words
A method of aligning a diffraction grating with incident light comprising the steps of: transmitting the incident light through an aperture to the diffraction grating; sensing light specularly reflected from the diffraction grating with a sensing means having at least two adjacent light sensitive areas a known distance from the aperture; and adjusting the position of the diffraction grating until the light on said at least two light-sensitive areas is balanced.
Claim 17
Independent Claim
52 words
A method of spectroscopic analysis comprising the steps of: transmitting collimated light through a polarization-state generator; reflecting the collimated light from a sample; transmitting the reflected light to an analyzer; and transmitting the light from the analyzer to a diffraction grating without further focusing after the light is reflected from the sample.
Claim 18
Independent Claim
52 words
A method of spectroscopic analysis comprising the steps of: transmitting collimated light through a polarization-state generator; reflecting the collimated light from a sample; transmitting the reflected light to an analyzer; and transmitting the light from the analyzer to a diffraction grating without further focusing after the light is reflected from the sample.
Claim 19
Dependent Claim
68 words
A method of spectroscopic analysis in accordance with claim 13 further comprising the steps of: transmitting one spectrum of light from said diffraction grating to a first detector and reflecting a second spectrum of light to a second diffraction grating, wherein said second spectrum includes at least a white light band; and transmitting the second spectrum of diffracted light from the second diffraction grating to a second detector.
Claim 20
Independent Claim
50 words
A method of performing ellipsometry comprising the steps of: transmitting monochromatic light through a polarization-state generator to a sample; and receiving reflected light from the sample after it passes through an analyzer onto a two-stacked photodiodes, whereby two separate wavelength ranges of light may be received, said wavelength ranges overlapping.
Claim 21
Independent Claim
50 words
A method of performing ellipsometry comprising the steps of: transmitting monochromatic light through a polarization-state generator to a sample; and receiving reflected light from the sample after it passes through an analyzer onto a two-stacked photodiodes, whereby two separate wavelength ranges of light may be received, said wavelength ranges overlapping.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-12-12 | 1998-06-13 | 1998-12-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-12-12 | 2002-06-13 | 2002-12-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-12-12 | 2006-06-13 | 2006-12-13 | $7700.00 | Window Closed / Lapsed |