US5373192A
Expired / Lapsed
US
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Electromigration resistance metal interconnect
Assignee: Mitsubishi Electric Corp
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Filing: 1992-08-28
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Granted: 1994-12-13
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Expires: 2012-08-28
Abstract
Abstract A semiconductor device is provided which includes a conductive layer, an insulating film formed on the surface of the conductive layer, and a conductive metal interconnection layer formed on the insulating film and electrically connected to the conductive layer through a contact hole formed in a predetermined position of the insulating film. The conductive metal interconnection and the surface of the conductive layer are directly joined together and a silicon layer including a single crystal or polycrystalline silicon having a grain size of at least about 10 μm is interposed between the conductive metal interconnection layer and the insulating film. The conductive metal interconnection layer becomes a single crystal or a polycrystal having a grain size of about 10 μm or above under the influence of the crystalline properties of the underlying crystal of the silicon layer. Therefore, in the conductive metal interconnection layer in the entire region including the inside portion of the contact hole, essentially no grain boundaries exist. Thus, electromigration of conductive metal ions is controlled.
Inventors
- 👤 Koji Eguchi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 14:06
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/42; H10W20/01; H10W20/031; H10W20/056; H10W20/425; Y; Y10; Y10S; Y10S438/00; Y10S438/927
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
73 words
A semiconductor device, comprising: a conductive layer; an insulating film formed on a surface of the conductive layer and having a contact hole formed over the conductive layer; a conductive metal interconnection layer formed on the insulating film and electrically connected to the conductive layer through the contact hole of the insulating film; and a single-crystal silicon layer outside the contact hole, interposed between the conductive metal interconnection layer and the insulating film.
Claim 2
Dependent Claim
73 words
A semiconductor device, comprising: a conductive layer; an insulating film formed on a surface of the conductive layer and having a contact hole formed over the conductive layer; a conductive metal interconnection layer formed on the insulating film and electrically connected to the conductive layer through the contact hole of the insulating film; and a single-crystal silicon layer outside the contact hole, interposed between the conductive metal interconnection layer and the insulating film.
Claim 3
Dependent Claim
29 words
The semiconductor device according to claim 1, wherein: said conductive layer and said conductive metal interconnection layer are directly joined together in the bottom portion of said contact hole.
Claim 4
Dependent Claim
35 words
The semiconductor device according to claim 1, wherein: a polysilicon layer and a metal silicide layer are stacked and interposed in the electrically connecting portion of said conductive layer and said conductive metal interconnection layer.
Claim 5
Dependent Claim
47 words
The semiconductor device according to claim 1, wherein: said conductive layer is a layer of a selected conductivity type formed on the surface of the semiconductor substrate, and said conductive metal interconnection layer is an aluminum interconnection layer for electrically connecting said well and an external element.
Claim 6
Dependent Claim
40 words
The semiconductor device according to claim 1, wherein: said conductive layer includes source/drain regions of a MOS type field-effect transistor, and said conductive metal interconnection layer is a conductive interconnection layer for electrically connecting said source/drain regions and external element.
Claim 7
Dependent Claim
42 words
The semiconductor device according to claim 1, wherein: said conductive layer is a first conductive aluminum interconnection layer and said conductive metal interconnection layer is a second conductive aluminum interconnection layer formed with said insulating film and said silicon layer interposed therebetween.
Claim 8
Dependent Claim
87 words
A semiconductor device, comprising: a conductive layer; an insulating film formed on a surface of the conductive layer and having a contact hole formed over the conductive layer; a conductive metal interconnection layer formed on the insulating film and electrically connected to the conductive layer through the contact hole of the insulating film; and a polycrystal silicon layer outside the contact hole, interposed between the conductive metal interconnection layer and the insulating film, the polycrystal silicon layer having a grain size of at least about 10 μm.
Claim 9
Dependent Claim
87 words
A semiconductor device, comprising: a conductive layer; an insulating film formed on a surface of the conductive layer and having a contact hole formed over the conductive layer; a conductive metal interconnection layer formed on the insulating film and electrically connected to the conductive layer through the contact hole of the insulating film; and a polycrystal silicon layer outside the contact hole, interposed between the conductive metal interconnection layer and the insulating film, the polycrystal silicon layer having a grain size of at least about 10 μm.
Claim 10
Dependent Claim
44 words
The semiconductor device according to claim 1, wherein: said conductive layer is an impurity layer formed on the surface of the semiconductor substrate; and said conductive metal interconnection layer is an aluminum interconnection layer for electrically connecting said impurity layer and an external element.
Claim 11
Dependent Claim
42 words
The semiconductor device according to claim 7, wherein: said conductive layer is a first conductive aluminum interconnection layer and said conductive metal interconnection layer is a second conductive aluminum interconnection layer formed with said insulating film and said silicon layer interposed therebetween.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1997-12-12 | 1998-06-13 | 1998-12-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-12-12 | 2002-06-13 | 2002-12-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-12-12 | 2006-06-13 | 2006-12-13 | $7700.00 | Window Closed / Lapsed |