US5370737A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vacuum treatment apparatus comprising annular treatment chamber
Assignee: OC Oerlikon Balzers AG
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Filing: 1992-12-28
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Granted: 1994-12-06
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Expires: 2012-12-28
Abstract
Abstract A vacuum treatment apparatus for workpieces includes an annular treatment chamber having inner and outer surrounding walls and top and bottom walls. A carrier for a multitude of workpieces is provided. The carrier is arranged in a carousel-like manner in the annular treatment chamber. A drive mechanism linked to the carrier, drives the carrier. At least one part of at least one of the walls may be opened to open the annular treatment chamber for charging and discharging. The at least one part is of such an extent so as to allow charging and discharging with a plurality of the multitude of workpieces simultaneously.
Inventors
- 👤 Reinhard Mathis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 12:23
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/50; C23C14/505; C23C14/56
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
101 words
Vacuum treatment apparatus for workpieces, comprising: an annular treatment chamber comprising inner and outer surrounding walls and top and bottom walls; a carrier for a multitude of workpieces, said carrier projecting in a carousel-like manner into said annular treatment chamber; drive means, linked to said carrier, for driving said carrier; wherein at least one part of at least one of said walls may be opened to open said annular treatment chamber for charging and discharging, said at least one part being of such an extent so as to allow charging and discharging with a plurality of said multitude of workpieces simultaneously.
Claim 2
Dependent Claim
101 words
Vacuum treatment apparatus for workpieces, comprising: an annular treatment chamber comprising inner and outer surrounding walls and top and bottom walls; a carrier for a multitude of workpieces, said carrier projecting in a carousel-like manner into said annular treatment chamber; drive means, linked to said carrier, for driving said carrier; wherein at least one part of at least one of said walls may be opened to open said annular treatment chamber for charging and discharging, said at least one part being of such an extent so as to allow charging and discharging with a plurality of said multitude of workpieces simultaneously.
Claim 3
Dependent Claim
17 words
The apparatus of claim 1, wherein said inner and outer surrounding walls are cylindric and mutually coaxial.
Claim 4
Dependent Claim
46 words
The apparatus of claim 1, wherein said annular treatment chamber comprises along at least one of said inner and of said outer surrounding walls a surrounding electrode surface extending along said annular treatment chamber for the generation of a plasma discharge in said annular treatment chamber.
Claim 5
Dependent Claim
30 words
The apparatus of claim 1, wherein at least a part of said inner surrounding wall is connected to an rf-generator for generating an rf-plasma discharge in said annular treatment chamber.
Claim 6
Dependent Claim
27 words
The apparatus of claim 1, wherein inside said inner surrounding wall of said annular treatment chamber, a space is provided for arranging additional systems for said apparatus.
Claim 7
Dependent Claim
21 words
The apparatus of claim 5, wherein said further arrangements comprise at least one of said drive means and a pumping means.
Claim 8
Dependent Claim
14 words
The apparatus of claim 1, wherein said drive means provides for a continuous drive.
Claim 9
Dependent Claim
30 words
The apparatus of claim 1, wherein said carrier defines a cylindrical surface arranged in said annular treatment chamber, having a plurality of workpiece holders being distributed along said cylindrical surface.
Claim 10
Dependent Claim
19 words
The apparatus of claim 1, wherein said at least one part is a portion of said outer surrounding wall.
Claim 11
Dependent Claim
24 words
The apparatus of claim 1, wherein said at least one part is a portion of at least one of said bottom and top walls.
Claim 12
Dependent Claim
36 words
The apparatus of claim 1, wherein said carrier comprises several carrier rods being disposed substantially parallel to a central axis of said annular treatment chamber, each of said rods carrying one or several additional workpiece carriers.
Claim 13
Dependent Claim
40 words
The apparatus of claim 1, wherein said annular treatment chamber is arranged with its central axis disposed vertical and comprising bearing means for rotatably bearing said carrier, said bearing means being disposed at the bottom of said annular treatment chamber.
Claim 14
Dependent Claim
34 words
The apparatus of claim 1, wherein said annular treatment chamber is disposed with its central axis vertical and wherein said drive means act on said carrier at the bottom of said annular treatment chamber.
Claim 15
Dependent Claim
27 words
The apparatus of claim 1, further comprising bearing means for rotatably bearing said carrier, said bearing means being arranged centrally with respect to said annular treatment chamber.
Claim 16
Dependent Claim
24 words
The apparatus of claim 1, wherein said drive means is operatively connected at a bottom of said annular treatment chamber to drive said carrier.
Claim 17
Dependent Claim
58 words
The apparatus of claim 1, further comprising first bearing means for radially bearing said carrier, said first bearing means being arranged coaxially to a central axis of said annular treatment chamber and comprising second bearing means for axially bearing said carrier, said second bearing means being disposed one of radially outwards and inwards of said first bearing means.
Claim 18
Dependent Claim
54 words
The apparatus of claim 1, wherein said drive means is operatively coupled to said carrier at one of a central location with respect to a central axis of said annular treatment chamber and a radially distant location from said central axis, said drive means thereby being part of a bearing means for said carrier.
Claim 19
Dependent Claim
24 words
The apparatus of claim 1, wherein said carrier comprises a rotatable carrier plate, said carrier plate being formed so as to be elastically deformable.
Claim 20
Dependent Claim
13 words
The apparatus of claim 18, wherein said carrier plate has a spoked structure.
Claim 21
Dependent Claim
20 words
The apparatus of claim 19, wherein said carrier plate rests on bearing means along the periphery of said carrier plate.
Claim 22
Dependent Claim
20 words
The apparatus of claim 1, wherein said drive means for driving carrier act via a driving wheel on said carrier.
Claim 23
Dependent Claim
25 words
The apparatus of claim 1, wherein said carrier comprises additional workpiece carriers, said additional workpiece carriers being electrically isolated from other parts of said apparatus.
Claim 24
Dependent Claim
21 words
The apparatus of claim 22, wherein electrical source means are provided for selectively applying electrical potential to said isolated workpiece carriers.
Claim 25
Dependent Claim
41 words
The apparatus of claim 1, wherein said carrier means comprises means for holding said workpieces, said means for holding being movable along said annular treatment chamber at an equal distance from said inner surrounding wall and from said outer surrounding wall.
Claim 26
Dependent Claim
22 words
The apparatus of claim 1, wherein said carrier comprises means for carrying workpieces, said means for carrying being at floating electrical potential.
Claim 27
Dependent Claim
137 words
The apparatus of claim 1, wherein parts of at least two of said inner surrounding wall, outer surrounding wall, and of said carrier are electrically mutually isolated, so as to allow respective electrical potentials to be applied independently to said parts, and to generate one of a single plasma discharge between said parts at said inner surrounding wall and said parts at said outer surrounding wall, or a single plasma discharge between said parts at said inner surrounding wall and said parts at said carrier, or a single plasma discharge between said parts at said outer surrounding wall and said parts at said carrier, or two plasma discharges between said parts at said inner surrounding wall and said parts at said carrier and between said parts at said outer surrounding wall and said parts at said carrier.
Claim 28
Dependent Claim
15 words
The apparatus of claim 1, wherein said apparatus is a coating apparatus for said workpieces.
Claim 29
Dependent Claim
20 words
The apparatus of claim 1, wherein said workpieces are flat optical workpieces simultaneously treated on both of their flat sides.
Claim 30
Dependent Claim
23 words
The apparatus of claim 1, wherein said workpieces are flat optical workpieces being simultaneously and equally treated on both of their flat sides.
Claim 31
Dependent Claim
17 words
The apparatus of claim 1, wherein said treatment is a plasma polymerization coating treatment of optical workpieces.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-12-05 | 1998-06-06 | 1998-12-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-12-05 | 2002-06-06 | 2002-12-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-12-05 | 2006-06-06 | 2006-12-06 | $7700.00 | Window Closed / Lapsed |