Patent US5370371A successfully refreshed from Google Patents.
US5370371A
Expired / Lapsed
US
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Heat treatment apparatus
Assignee: Toshiba Corp
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Filing: 1993-06-10
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Granted: 1994-12-06
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Expires: 2013-06-10
Abstract
Abstract A heat treatment apparatus having a heat treatment boat with a plurality of wafers held thereon, which is to be loaded in a reaction vessel which has one end opened. Once loaded, the boat effects a seal of the reaction vessel, in preparation for subjecting the wafers to heat treatment. The boat also has a heat-insulator disposed on its lower end for heat-insulating the interior of the reaction vessel during the heat-treatment. The heat-insulator includes composite plates having a metal film layer on an upper surface for reflecting heat rays generated during the heat treatment of the reaction vessel, and a cylinder enclosing the composite plates. Thus, sufficient heat-insulating effect for the heat treatment can be obtained, and stable heat-treatment can be conducted with the sufficient heat-insulating effect secured. Furthermore, the generation of particles can be suppressed, and yields of the heat treatment can be improved.
Inventors
- 👤 Katsushin Miyagi
- 👤 Shingo Watanabe
- 👤 Yuuichi Mikata
- 👤 Katsuya Okumura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 18:57
CPC Classifications
H; H10; H10P; H10P95/00; H10P95/90; H10P72/00; H10P72/04; H10P72/0431; H10P72/0432; C; C23; C23C; C23C16/00; C23C16/44; C23C16/458; C23C16/4582; C23C16/4583; C23C16/46; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C30B31/00; C30B31/06; C30B31/12
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
94 words
A heat treatment apparatus comprising: a reaction vessel having an open lower end; an object holder for holding a plurality of objects to be heat treated, said holder being moveable into said reaction vessel whereby said holder effects a seal of said reaction vessel; and a heat insulator portion disposed at a lower end of said object holder, said heat insulator comprising a cylinder enclosing at least one composite plate, said plate comprising a base layer formed on a substrate, and a reflective layer formed on said base layer said reflective layer for reflecting.
Claim 2
Dependent Claim
94 words
A heat treatment apparatus comprising: a reaction vessel having an open lower end; an object holder for holding a plurality of objects to be heat treated, said holder being moveable into said reaction vessel whereby said holder effects a seal of said reaction vessel; and a heat insulator portion disposed at a lower end of said object holder, said heat insulator comprising a cylinder enclosing at least one composite plate, said plate comprising a base layer formed on a substrate, and a reflective layer formed on said base layer said reflective layer for reflecting.
Claim 3
Dependent Claim
110 words
A heat treatment apparatus comprising: a holder to be loaded into a reaction vessel, said reaction vessel having lower end opened, said holder having a plurality of objects to be heat treated held thereon and, when placed in said reaction vessel, effecting a seal of the reaction vessel so as to subject the objects to heat-treatment; a heat-insulator disposed at a lower end of the holder for heat-insulating the reaction vessel from the heat-treatment reaction vessel; and said heat-insulator having at least one composite plate disposed therein, and said plate having a reflecting surface for reflecting heat rays radiated during the heat treatment of the objects in the reaction vessel.
Claim 4
Dependent Claim
110 words
A heat treatment apparatus comprising: a holder to be loaded into a reaction vessel, said reaction vessel having lower end opened, said holder having a plurality of objects to be heat treated held thereon and, when placed in said reaction vessel, effecting a seal of the reaction vessel so as to subject the objects to heat-treatment; a heat-insulator disposed at a lower end of the holder for heat-insulating the reaction vessel from the heat-treatment reaction vessel; and said heat-insulator having at least one composite plate disposed therein, and said plate having a reflecting surface for reflecting heat rays radiated during the heat treatment of the objects in the reaction vessel.
Claim 5
Dependent Claim
126 words
A heat treatment apparatus comprising: a holder to be loaded into a reaction vessel, said reaction vessel having a lower end opened, said holder having a plurality of objects to be heat treated held thereon and, when placed in said reaction vessel, effecting a seal of the reaction vessel so as to subject the objects to heat-treatment; a heat-insulator disposed at a lower end of the holder for heat-insulating the reaction vessel from the heat-treatment reaction vessel; and said heat-insulator further comprising a cylindrical closed body having a reflecting surface for reflecting heat rays radiated during the heat treatment of the objects in the reaction vessel; and means for feeding cooling water through a passage formed in proximity to an O-ring used to seal said apparatus.
Claim 6
Dependent Claim
126 words
A heat treatment apparatus comprising: a holder to be loaded into a reaction vessel, said reaction vessel having a lower end opened, said holder having a plurality of objects to be heat treated held thereon and, when placed in said reaction vessel, effecting a seal of the reaction vessel so as to subject the objects to heat-treatment; a heat-insulator disposed at a lower end of the holder for heat-insulating the reaction vessel from the heat-treatment reaction vessel; and said heat-insulator further comprising a cylindrical closed body having a reflecting surface for reflecting heat rays radiated during the heat treatment of the objects in the reaction vessel; and means for feeding cooling water through a passage formed in proximity to an O-ring used to seal said apparatus.
Claim 7
Dependent Claim
56 words
A heat treatment apparatus according to claim 1, wherein the composite plate comprises a substrate, a base protect metal base substrate film layer laid on the substrate, a metal film layer laid on the base film layer, and a protection film layer laid on the metal film layer, the metal film layer providing the reflecting surface.
Claim 8
Dependent Claim
34 words
A heat treatment apparatus according to claim 1, further comprising support means for supporting a plurality of the composite plates in a horizontal orientation, wherein said plates are disposed vertically equidistant from each other.
Claim 9
Dependent Claim
19 words
A heat treatment apparatus according to claim 1, wherein the composite plates are removably disposed in the heat insulator.
Claim 10
Dependent Claim
27 words
A heat treatment apparatus according to claim 1, wherein each composite plate has a thinner portion on peripheral edge by which the plate is to be supported.
Claim 11
Dependent Claim
16 words
A heat treatment apparatus according to claim 1, wherein the reaction vessel is is vertically oriented.
Claim 12
Dependent Claim
18 words
A heat treatment apparatus according to claim 1, wherein the heat treatment apparatus is a low-pressure CVD apparatus.
Claim 13
Dependent Claim
27 words
A heat treatment apparatus according to claim 4, wherein said substrate is comprised of a material selected from the group consisting of ceramics, quartz, and silicon nitride.
Claim 14
Dependent Claim
15 words
A heat treatment apparatus according to claim 4, wherein said substrate is formed of glass.
Claim 15
Dependent Claim
15 words
A heat treatment apparatus according to claim 4, wherein said object is a semiconductor wafer.
Claim 16
Dependent Claim
29 words
A heat treatment apparatus according to claim 4, wherein said base film layer is comprised of a material selected form the group consisting of ceramics, silicon nitride and metal.
Claim 17
Dependent Claim
17 words
A heat treatment apparatus according to claim 4, wherein the metal film layer is formed of aluminium.
Claim 18
Dependent Claim
28 words
A heat treatment apparatus according to claim 4, wherein the protection film layer is comprised of a material selected from the group consisting of ceramics, and silicon nitride.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-12-05 | 1998-06-06 | 1998-12-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-12-05 | 2002-06-06 | 2002-12-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-12-05 | 2006-06-06 | 2006-12-06 | $7700.00 | Window Closed / Lapsed |