US5368710A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of treating an article with a plasma apparatus in which a uniform electric field is induced by a dielectric window
Assignee: Lam Research Corp
•
Filing: 1993-03-29
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Granted: 1994-11-29
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Expires: 2013-03-29
Abstract
Abstract A method of plasma treating an article in a housing having a chamber in which the article such as a wafer can be treated with plasma. The housing includes at least one inlet port connected to an interior of the chamber through which process gas can be supplied to the chamber. A radiofrequency energy source is arranged to pass radiofrequency energy into the chamber and induce plasma in the interior of the chamber by activating, with an electric field induced by the radiofrequency energy source, process gas supplied to the chamber through the inlet port. A dielectric window having an inner surface thereof forms part of an inner wall of the chamber. Radiofrequency energy passes from the radiofrequency energy source to the interior of the chamber through the dielectric window. The dielectric window has a thickness which varies at different points along the inner surface thereof such that the thickness is largest at a central portion of the dielectric window. The dielectric window is effective to decrease the induced electric field in the interior of the chamber near the central portion of the dielectric window.
Inventors
- 👤 Ching-Hwa Chen
- 👤 David Liu
- 👤 Duc Tran
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 00:06
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32192; H01J37/32211; H01J37/32238; H01J37/32082; H01J37/321; H01J37/32119; C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/505; C23C16/507; C23C16/513; H01J37/32431; H01J37/32532; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0418; H10P72/0421
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
125 words
A method for treating an article with plasma comprising the steps of: placing an article within an interior of a chamber; introducing a process gas into the chamber; generating a uniform electric field in the chamber by passing radiofrequency energy through a dielectric window in the chamber and inducing an electric field in the interior of the chamber, the dielectric window having a configuration which reduces the induced electric field in the interior of the chamber near a central portion of the dielectric window, the uniform electric field generating a uniform electron flow in the process gas and thereby generating a plasma of uniform plasma density; and plasma treating the article by exposing a surface of the article to the plasma generated in the chamber.
Claim 2
Independent Claim
125 words
A method for treating an article with plasma comprising the steps of: placing an article within an interior of a chamber; introducing a process gas into the chamber; generating a uniform electric field in the chamber by passing radiofrequency energy through a dielectric window in the chamber and inducing an electric field in the interior of the chamber, the dielectric window having a configuration which reduces the induced electric field in the interior of the chamber near a central portion of the dielectric window, the uniform electric field generating a uniform electron flow in the process gas and thereby generating a plasma of uniform plasma density; and plasma treating the article by exposing a surface of the article to the plasma generated in the chamber.
Claim 3
Dependent Claim
27 words
The method of claim 1, wherein the article comprises a semiconductor substrate and the plasma treating step comprises etching of an aluminum layer on the semiconductor substrate.
Claim 4
Dependent Claim
31 words
The method of claim 1, wherein ion current density across the article in the chamber varies by no more than 5% across an area of at least 150 mm in diameter.
Claim 5
Dependent Claim
18 words
The method of claim 1, wherein the plasma treating step comprises etching an oxide on a semiconductor wafer.
Claim 6
Dependent Claim
18 words
The method of claim 1, wherein the plasma treating step comprises stripping a resist on a semiconductor wafer.
Claim 7
Dependent Claim
19 words
The method of claim 1, wherein the plasma treating step comprises deposition of a layer on a semiconductor wafer.
Claim 8
Dependent Claim
14 words
The method of claim 1, wherein the window comprises a single piece of quartz.
Claim 9
Dependent Claim
17 words
The method of claim 1, wherein the window comprises a plurality of layers of different dielectric materials.
Claim 10
Dependent Claim
15 words
The method of claim 1, wherein the window is thickest at the central portion thereof.
Claim 11
Dependent Claim
13 words
The method of claim 1, wherein the window includes a flat outer surface.
Claim 12
Dependent Claim
13 words
The method of claim 1, wherein the window is substantially circular in shape.
Claim 13
Dependent Claim
18 words
The method of claim 1, wherein the window includes a region of reduced thickness surrounding the central portion.
Claim 14
Dependent Claim
12 words
The method of claim 1, wherein the window is convex in shape.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-11-28 | 1998-05-30 | 1998-11-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-11-28 | 2002-05-30 | 2002-11-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-11-28 | 2006-05-30 | 2006-11-29 | $7700.00 | Window Closed / Lapsed |