US5368437A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Substrate transfer method
Assignee: Canon Inc
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Filing: 1993-06-07
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Granted: 1994-11-29
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Expires: 2013-06-07
Abstract
Abstract A method of transferring a substrate between a stage for holding a substrate thereon and a conveying hand for conveying the substrate is disclosed. In one aspect, the method includes the steps of: moving the conveying hand having the substrate held thereon to a stage attraction starting position; starting attraction, through the stage, of the substrate held by the conveying hand; moving the conveying hand to a transfer position on a side of an attracting surface of the stage remote from the stage attraction starting position; and releasing the attraction of the substrate through the conveying hand.
Inventors
- 👤 Mitsutoshi Kuno
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 21:07
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; H; H10; H10P; H10P72/00; H10P72/30; H10P72/34; H10P72/3411
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
186 words
In a substrate transfer method for transferring a substrate from a substrate conveying hand, for holding the substrate with its back attracted to the conveying hand, to a stage having an attraction surface on which the substrate is to be placed, the method comprising the steps of: moving the conveying hand at a predetermined speed to a stage attraction starting position which is preset between the attraction surface of the stage and an uninterferred position where the substrate is opposed to the attraction surface of the stage without contact thereto; starting the attraction of the substrate through the stage; moving the conveying hand at a speed lower than the predetermined speed to a transfer position which is preset on an opposite side of the attraction surface than the uninterferred position at a predetermined pressing distance from the attraction surface of the stage; checking the attraction of the substrate through the stage; releasing the attraction of the substrate through the conveying hand; and moving the conveying hand to a retracted position which is preset on the opposite side of the attraction surface, away from the transfer position.
Claim 2
Dependent Claim
186 words
In a substrate transfer method for transferring a substrate from a substrate conveying hand, for holding the substrate with its back attracted to the conveying hand, to a stage having an attraction surface on which the substrate is to be placed, the method comprising the steps of: moving the conveying hand at a predetermined speed to a stage attraction starting position which is preset between the attraction surface of the stage and an uninterferred position where the substrate is opposed to the attraction surface of the stage without contact thereto; starting the attraction of the substrate through the stage; moving the conveying hand at a speed lower than the predetermined speed to a transfer position which is preset on an opposite side of the attraction surface than the uninterferred position at a predetermined pressing distance from the attraction surface of the stage; checking the attraction of the substrate through the stage; releasing the attraction of the substrate through the conveying hand; and moving the conveying hand to a retracted position which is preset on the opposite side of the attraction surface, away from the transfer position.
Claim 3
Dependent Claim
173 words
In a substrate transfer method for transferring a substrate from a stage having an attraction surface for holding the substrate to a substrate conveying hand for holding the substrate with its back attracted to the conveying hand, the method comprising the steps of: moving the conveying hand at a predetermined speed from an extracted position to a hand attraction starting position which is preset between the extracted position and the attraction surface of the stage; starting the attraction of the substrate through the conveying hand; moving the conveying hand at a speed lower than the predetermined speed to a transfer position which is preset on a side of the attraction surface opposite to the hand attraction starting position at a predetermined pressing distance from the attraction surface of the stage; checking the attraction of the substrate through the conveying hand; releasing the attraction of the substrate through the stage; and moving the conveying hand to an uninterferred position where the substrate is opposed to the attraction surface of the stage without contact thereto.
Claim 4
Dependent Claim
173 words
In a substrate transfer method for transferring a substrate from a stage having an attraction surface for holding the substrate to a substrate conveying hand for holding the substrate with its back attracted to the conveying hand, the method comprising the steps of: moving the conveying hand at a predetermined speed from an extracted position to a hand attraction starting position which is preset between the extracted position and the attraction surface of the stage; starting the attraction of the substrate through the conveying hand; moving the conveying hand at a speed lower than the predetermined speed to a transfer position which is preset on a side of the attraction surface opposite to the hand attraction starting position at a predetermined pressing distance from the attraction surface of the stage; checking the attraction of the substrate through the conveying hand; releasing the attraction of the substrate through the stage; and moving the conveying hand to an uninterferred position where the substrate is opposed to the attraction surface of the stage without contact thereto.
Claim 5
Dependent Claim
30 words
A method according to claim 1 or 2, wherein each of the conveying hand and the stage holds the substrate in a plane inclined with respect to a horizontal plane.
Claim 6
Independent Claim
96 words
A method of transferring a substrate between a stage having an attraction surface for holding a substrate thereon and a conveying hand for conveying the substrate, said method comprising the steps of: moving the conveying hand having the substrate held thereon to a stage attraction starting position; starting attraction, through the stage, of the substrate held by the conveying hand; moving the conveying hand to a transfer position on a side of the attraction surface of the stage opposite from the stage attraction starting position; and releasing the attraction of the substrate through the conveying hand.
Claim 7
Independent Claim
96 words
A method of transferring a substrate between a stage having an attraction surface for holding a substrate thereon and a conveying hand for conveying the substrate, said method comprising the steps of: moving the conveying hand having the substrate held thereon to a stage attraction starting position; starting attraction, through the stage, of the substrate held by the conveying hand; moving the conveying hand to a transfer position on a side of the attraction surface of the stage opposite from the stage attraction starting position; and releasing the attraction of the substrate through the conveying hand.
Claim 8
Dependent Claim
27 words
A method according to claim 4, wherein, after the conveying hand is moved to the transfer position, the attraction of the substrate through the stage is checked.
Claim 9
Dependent Claim
28 words
A method according to claim 5, wherein each of the conveying hand and the stage holds the substrate in a plane inclined with respect to a horizontal plane.
Claim 10
Independent Claim
91 words
A method of transferring a substrate between a stage having an attraction surface for holding a substrate thereon and a conveying hand for conveying the substrate, said method comprising the steps of: moving the conveying hand to a hand attraction starting position; starting attraction, through the conveying and, of the substrate held by the stage; moving the conveying hand to a transfer position on a side of a substrate supporting surface of the stage opposite from the hand attraction starting position; and releasing the attraction of the substrate through the stage.
Claim 11
Independent Claim
91 words
A method of transferring a substrate between a stage having an attraction surface for holding a substrate thereon and a conveying hand for conveying the substrate, said method comprising the steps of: moving the conveying hand to a hand attraction starting position; starting attraction, through the conveying and, of the substrate held by the stage; moving the conveying hand to a transfer position on a side of a substrate supporting surface of the stage opposite from the hand attraction starting position; and releasing the attraction of the substrate through the stage.
Claim 12
Dependent Claim
27 words
A method according to claim 7, wherein, after the conveying hand is moved to the transfer position, the attraction of the substrate through the hand is checked.
Claim 13
Dependent Claim
28 words
A method according to claim 8, wherein each of the conveying hand and the stage holds the substrate in a plane inclined with respect to a horizontal plane.
Claim 14
Dependent Claim
13 words
A method according to claim 4, wherein the substrate comprises a semiconductor wafer.
Claim 15
Dependent Claim
13 words
A method according to claim 9, wherein the substrate comprises a semiconductor wafer.
Claim 16
Independent Claim
146 words
A method of transferring an article, held by attraction of first attracting means, to second attracting means, said method comprising the steps of: moving the first attracting means relative to the second attracting means so that the article held by the first attracting means contacts an attracting surface of the second attracting means, wherein the attracting surface is inclined with respect to a horizontal plane; causing both the first and second attracting means to attract the article; moving the first attracting means relative to the second attracting means, while the article is being attracted to both of the first attracting means and the second attracting means such that the article is deformed thereby; releasing the attraction of the first attracting means; and moving the first attracting means relative to the second attracting means, wherein the article is held by the attraction of the second attracting means.
Claim 17
Independent Claim
146 words
A method of transferring an article, held by attraction of first attracting means, to second attracting means, said method comprising the steps of: moving the first attracting means relative to the second attracting means so that the article held by the first attracting means contacts an attracting surface of the second attracting means, wherein the attracting surface is inclined with respect to a horizontal plane; causing both the first and second attracting means to attract the article; moving the first attracting means relative to the second attracting means, while the article is being attracted to both of the first attracting means and the second attracting means such that the article is deformed thereby; releasing the attraction of the first attracting means; and moving the first attracting means relative to the second attracting means, wherein the article is held by the attraction of the second attracting means.
Claim 18
Dependent Claim
31 words
A method according to claim 12, wherein the attraction of at least one of the first and second attracting means is provided by one of either vacuum attraction and electrostatic attraction.
References Cited (Backward Citations)
US4319864A
Cited
US4451197A
Cited
EP0129731A1
Cited
US4589184A
Cited
JPS61288954A
Cited
EP0244950A2
Cited
US4874076A
Cited
US4785528A
Cited
JPH02100311A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-11-28 | 1998-05-30 | 1998-11-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-11-28 | 2002-05-30 | 2002-11-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-11-28 | 2006-05-30 | 2006-11-29 | $7700.00 | Window Closed / Lapsed |