EP0244950A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Method and apparatus for handling and processing wafer-like materials
Assignee: Tokyo Electron Ltd
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Filing: 1987-04-03
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Granted: —
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Expires: 2007-04-03
Abstract
Abstract Apparatus and method for handling and processing wafer-like materials The apparatus comprises a plenum or main chamber which is divided into two chamber halves. A rotatable index plate is disposed in the chamber. An article to be processed is inserted into a load-lock station formed in the main chamber. After the article is inserted into the load-lock, it is engaged by an article holding device mounted in a position of the rotatable index plate. The index plate is then rotated to a second station, at which a process can be performed upon the substrate, for example, an etching or sputtering process. The process is performed in a processing chamber which is fully isolated from the main chamber and other processing chambers. After rotation by one position, a processed substrate is removed from the load-lock and a new substrate inserted into the load-lock for processing. After a process step is carried out on a substrate, the index plate is again rotated to the next station where another process or removal through the load-lock may be performed.
Inventors
- 👤 Miroslav Eror
- 👤 Richard E. Biehl
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-30 07:33
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7618; H10P72/04; H10P72/0451; H10P72/0466; H10P72/30; H10P72/33; H10P72/3304; H10P72/3306; H10P72/3308; H10P72/7621; H10P72/7624; H10P72/78
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
118 words
Apparatus for transporting a wafer-like article between first and second locations comprising: carrier means at the first location for supporting a plurality of said articles; means for retrieving an article from said carrier means and for placing the article on a movable support means, said movable support means comprising means for transferring said article to a first intermediate position; first arm means movable in a first plane for receiving the article from said movable support means at said first intermediate position; and second arm means movable in said first plane or a plane parallel thereto for receiving said article from said first arm means at a second intermediate position and for delivering said article to said second location.
Claim 2
Dependent Claim
118 words
Apparatus for transporting a wafer-like article between first and second locations comprising: carrier means at the first location for supporting a plurality of said articles; means for retrieving an article from said carrier means and for placing the article on a movable support means, said movable support means comprising means for transferring said article to a first intermediate position; first arm means movable in a first plane for receiving the article from said movable support means at said first intermediate position; and second arm means movable in said first plane or a plane parallel thereto for receiving said article from said first arm means at a second intermediate position and for delivering said article to said second location.
Claim 3
Dependent Claim
45 words
The apparatus recited in claim 1, wherein said first and second arm means are disposed in chamber means isolated from the external environment, said first location being in the external environment and said second location being in communication with the environment in said chamber means.
Claim 4
Dependent Claim
56 words
The apparatus recited in claim 1, wherein said second arm means comprises means pivotable in said first plane or a plane parallel to said first plane and defining an arcuate path for receiving the article at said second intermediate position along said path and further being rotatable about a longitudinal extent of said second arm means.
Claim 5
Dependent Claim
42 words
The apparatus recited in claim 1, wherein said movable support means comprises means for vertically moving said article to the first intermediate position, and further comprising means for centering the article with respect to a center axis of said movable support means.
Claim 6
Dependent Claim
136 words
Apparatus adapted for moving a wafer-like article between first and second locations comprising: bi-directional longitudinally extending arm means having an end movable in a first plane along a path for receiving an article at said first location along the path and transferring the article to the second location and for receiving an article at the second location along the path and transferring the article to the first location; at least two engaging means disposed at the end of said arm means, said first and second engaging means being rotatable about said longitudinally extending arm means between said first plane and any of a plurality of further planes; whereby the article can be transferred between said first and second lcoations by a combination of movement in said first plane and rotation about said longitudinally extending arm means.
Claim 7
Dependent Claim
136 words
Apparatus adapted for moving a wafer-like article between first and second locations comprising: bi-directional longitudinally extending arm means having an end movable in a first plane along a path for receiving an article at said first location along the path and transferring the article to the second location and for receiving an article at the second location along the path and transferring the article to the first location; at least two engaging means disposed at the end of said arm means, said first and second engaging means being rotatable about said longitudinally extending arm means between said first plane and any of a plurality of further planes; whereby the article can be transferred between said first and second lcoations by a combination of movement in said first plane and rotation about said longitudinally extending arm means.
Claim 8
Independent Claim
100 words
A method for transporting a wafer-like article between first and second lcoations comprising: supporting a plurality of said articles in carrier means at the first location; retrieving an article from said carrier means and transporting said article to a first intermediate position; receiving the article in first arm means movable in a first plane at said first intermediate position; and transferring the article from said first arm means to second arm means movable in said first plane or a plane parallel thereto at a second intermediate position and delivering said article via said second arm means to said second location.
Claim 9
Independent Claim
100 words
A method for transporting a wafer-like article between first and second lcoations comprising: supporting a plurality of said articles in carrier means at the first location; retrieving an article from said carrier means and transporting said article to a first intermediate position; receiving the article in first arm means movable in a first plane at said first intermediate position; and transferring the article from said first arm means to second arm means movable in said first plane or a plane parallel thereto at a second intermediate position and delivering said article via said second arm means to said second location.
Claim 10
Dependent Claim
45 words
The method recited in claim 6, wherein said first and second arm means are disposed in chamber means isolated from the external environment, said first location being in the external environment and said second location being in communication with the environment in said chamber means.
Claim 11
Independent Claim
156 words
A method for moving a wafer-like article between first and second locations comprising: moving an end of longitudinally extending arm means in a first plane along a path in a first direction so as to receive the article at said first location along the path and transfer the article to the second location and further so as to receive an article at the second location along the path in a second direction and transfer the article to the first location; said longitudinally extending arm means having at least two engaging means disposed at the end of said arm means, said step of moving further comprising rotating said engaging means about said longitudinally extending arm means between said first plane and any of a plurality of further planes; whereby the article can be transferred between said first and second locations by a combination of pivoting in said first plane and rotation about said longitudinally extending arm means.
Claim 12
Independent Claim
156 words
A method for moving a wafer-like article between first and second locations comprising: moving an end of longitudinally extending arm means in a first plane along a path in a first direction so as to receive the article at said first location along the path and transfer the article to the second location and further so as to receive an article at the second location along the path in a second direction and transfer the article to the first location; said longitudinally extending arm means having at least two engaging means disposed at the end of said arm means, said step of moving further comprising rotating said engaging means about said longitudinally extending arm means between said first plane and any of a plurality of further planes; whereby the article can be transferred between said first and second locations by a combination of pivoting in said first plane and rotation about said longitudinally extending arm means.
Claim 13
Dependent Claim
84 words
The method recited in claim 8, wherein a carrier means for holding a plurality of articles is disposed adjacent the first location and the article is subjected to a process step at the second location and, wherein either one of said first and second engaging means engages an article at said first location to be processed at said second location and the other engaging means engages an article which has been processed at the second location and returns the article to the first location.
References Cited (Backward Citations)
No citation records indexed.
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