US5367584A — Integrated microelectromechanical polymeric photo…

Claim 1

Independent Claim 145 words

A microelectromechanical photonic switching array, comprising: a plurality of first optical waveguides; a plurality of second optical waveguides; insulative cladding between the first and second pluralities of waveguides, said insulative cladding having at least one patterned opening therein and having a lower refractive index than the refractive indices of the waveguides of said first and second pluralities, wherein each one of said first waveguides is positioned with predetermined first waveguide portions on one side of said at least one opening and each one of said second waveguides is positioned with predetermined second waveguide portions substantially parallel to respective ones of said predetermined first waveguide portions on an opposing side of said at least one opening; and means for moving a selected one of said predetermined second waveguide portions closer to a respective one of said predetermined first waveguide portions in response to an actuation force.

Claim 2

Dependent Claim 145 words

A microelectromechanical photonic switching array, comprising: a plurality of first optical waveguides; a plurality of second optical waveguides; insulative cladding between the first and second pluralities of waveguides, said insulative cladding having at least one patterned opening therein and having a lower refractive index than the refractive indices of the waveguides of said first and second pluralities, wherein each one of said first waveguides is positioned with predetermined first waveguide portions on one side of said at least one opening and each one of said second waveguides is positioned with predetermined second waveguide portions substantially parallel to respective ones of said predetermined first waveguide portions on an opposing side of said at least one opening; and means for moving a selected one of said predetermined second waveguide portions closer to a respective one of said predetermined first waveguide portions in response to an actuation force.

Claim 3

Dependent Claim 19 words

The switching array of claim 1, further including a silicon substrate supporting said first and second pluralities of waveguides.

Claim 4

Dependent Claim 19 words

The switching array of claim 1, wherein one of said first and second pluralities of waveguides comprises serpentine-shaped waveguides.

Claim 5

Dependent Claim 40 words

The switching array of claim 1, wherein one of said first and second pluralities of waveguides comprises substantially straight waveguides and the other of said pluralities of first and second waveguides comprises waveguides having bends therein of about ninety degrees.

Claim 6

Dependent Claim 36 words

The switching array of claim 4, wherein each respective bend of about ninety degrees includes a reflective joint at about a forty-five degree angle with respect to each of the waveguide portions of said respective bend.

Claim 7

Dependent Claim 85 words

The switching array of claim 1, wherein said means for moving comprises: a plurality of first electrodes, each of said first electrodes being situated on a respective portion of said one side of said at least one opening; an insulator layer situated between each of said first electrodes and each respective portion of said at least one opening; and a plurality of second electrodes, each of said second electrodes being situated on a respective portion of said opposing side of said at least one opening.

Claim 8

Dependent Claim 39 words

The switching array of claim 6, wherein the waveguides of said first and second pluralities are comprised of a polyimide material and wherein said first and second electrodes are comprised of a material which is at least partially transparent.

Claim 9

Dependent Claim 13 words

The switching array of claim 7, wherein said insulator layer comprises silicon dioxide.

Claim 10

Dependent Claim 163 words

The switching array of claim 1, wherein said means for moving comprises: a first cladding layer facing the plurality of said first waveguides and said insulative cladding, said first cladding layer having a lower refractive index than that of the waveguides of said first plurality; a second cladding layer facing the plurality of said second waveguides and said insulative cladding, said second cladding layer having a lower refractive index than the waveguides of said second plurality; a plurality of first electrodes, each of said first electrodes being situated over a portion of said second cladding layer situated above a respective portion of said at least one opening; a plurality of piezoelectric strip lines, each of said piezoelectric strip lines being situated between a respective first electrode and said first cladding layer; and a plurality of second electrodes, each of said second electrodes being situated between a respective portion of said second cladding layer and a respective portion of said at least one opening.

Claim 11

Dependent Claim 51 words

The switching array of claim 9, wherein the waveguides of said first and second pluralities are comprised of a polyimide material, said second electrodes are comprised of a material which is at least partially transparent, and said first electrodes are selected from the group consisting of of aluminum, platinum, and chromium.

Claim 12

Dependent Claim 30 words

The switching array of claim 10, wherein said first and second cladding layers are comprised of a polyimide and wherein said piezoelectric strip lines are comprised of lead zirconate titanate.

Claim 13

Dependent Claim 192 words

A microelectromechanical photonic switching array, comprising: a plurality of first optical waveguides; a plurality of second optical waveguides, each of said second waveguides intersecting respective portions of each of said first waveguides at respective intersection points; a plurality of waveguide couplers, each of said waveguide couplers having one waveguide coupler portion situated substantially parallel to a first coupler portion of a respective one of said first waveguides and another waveguide coupler portion situated substantially parallel to a second coupler portion of a respective one of said second waveguides, said first and second coupler portions forming cross-over portions; means for distancing said waveguide couplers and the first and second pluralities of waveguides, said means for distancing including at least one patterned opening therein, wherein each one of said cross-over portions is situated on one side of said at least one opening and each one of said waveguide couplers is situated on an opposing side of said at least one opening; and means for moving a predetermined one of said plurality of waveguide couplers closer to a respective intersection point in response to a force of the group consisting of electrostatically-generated and piezoelectrically-generated forces.

Claim 14

Dependent Claim 192 words

A microelectromechanical photonic switching array, comprising: a plurality of first optical waveguides; a plurality of second optical waveguides, each of said second waveguides intersecting respective portions of each of said first waveguides at respective intersection points; a plurality of waveguide couplers, each of said waveguide couplers having one waveguide coupler portion situated substantially parallel to a first coupler portion of a respective one of said first waveguides and another waveguide coupler portion situated substantially parallel to a second coupler portion of a respective one of said second waveguides, said first and second coupler portions forming cross-over portions; means for distancing said waveguide couplers and the first and second pluralities of waveguides, said means for distancing including at least one patterned opening therein, wherein each one of said cross-over portions is situated on one side of said at least one opening and each one of said waveguide couplers is situated on an opposing side of said at least one opening; and means for moving a predetermined one of said plurality of waveguide couplers closer to a respective intersection point in response to a force of the group consisting of electrostatically-generated and piezoelectrically-generated forces.

Claim 15

Dependent Claim 46 words

The switching array of claim 12, wherein each of said waveguide couplers includes a bend of approximately ninety degrees and each of said bends includes a reflective joint at about a forty-five degree angle with respect to each of the waveguide portions of said respective bend.

Claim 16

Dependent Claim 65 words

The switching array of claim 12, wherein said means for moving comprises: a plurality of first electrodes, each of said first electrodes being situated on a respective portion of said one side of said at least one opening; and a plurality of second electrodes, each of said second electrodes being situated on a respective portion of said opposing side of said at least one opening.

Claim 17

Dependent Claim 35 words

The switching array of claim 14, further including an insulator layer situated between each of said first electrodes and each one of said respective portions of said one side of said at least one opening.

Claim 18

Dependent Claim 42 words

The switching array of claim 15, wherein said waveguide couplers and the waveguides of said first and second pluralities are comprised of a polyimide material and wherein said first and second electrodes are comprised of material which is at least partially transparent.

Claim 19

Dependent Claim 13 words

The switching array of claim 16, wherein said insulator layer comprises silicon dioxide.

Claim 20

Dependent Claim 144 words

The switching array of claim 12, wherein said means for moving comprises: a first cladding layer facing said first and second waveguides and said at least one opening, said first cladding layer having a lower refractive index than that of the waveguides of said first and second pluralities; a plurality of movable plates, each of said movable plates facing a respective waveguide coupler and said at least one opening and having a lower refractive index than that of said respective waveguide coupler; a plurality of first electrodes, each of said first electrodes being situated over a portion of a respective one of said movable plates situated above a respective portion of said at least one opening; and a plurality of second electrodes, each of said second electrodes being situated between said first cladding layer and a respective portion of said at least one opening.

Claim 21

Dependent Claim 38 words

The switching array of claim 18, further including a plurality of piezoelectric strip lines, each of said piezoelectric strip lines being situated between a respective one of said first electrodes and a respective one of said movable plates.

Claim 22

Dependent Claim 36 words

The switching array of claim 19, wherein each of said first, second, and waveguide couplers comprises a polyimide material, said first electrode comprises aluminum, and said second electrode comprises material which is at least partially transparent.

Claim 23

Dependent Claim 15 words

The switching array of claim 20, wherein said piezoelectric strip lines comprise lead zirconate titanate.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1997-11-21	1998-05-23	1998-11-22	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2001-11-21	2002-05-23	2002-11-22	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2005-11-21	2006-05-23	2006-11-22	$7700.00	Window Closed / Lapsed

Integrated microelectromechanical polymeric photonic switching arrays

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