US5364493A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus and process for the production of fine line metal traces
Assignee: LITEL INTERCONNECT Inc
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Filing: 1993-05-06
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Granted: 1994-11-15
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Expires: 2013-05-06
Abstract
Abstract A metallic substrate such a copper foil has an etch barrier such polyimide, Saran Wrap®, or other plastic applied. This barrier is thereafter selectively etched or ablated with a laser, for example by passing the light through a phase reticle or phase mask having at least the image information for the fine metallic lines thereon. The remaining barrier then acts in a second etch process to remove the underlying metallic layer. A wet or dry (such as RIE) etch may be employed. Over conventional photoresist exposure methods, the developer and resist steps are eliminated. The laser can precisely pattern the barrier in a single step with the remainder of the production of the required metallic fine lines relying on a simple wet etch, a process whose control parameters are well understood and consume little time. Alternately, a process for the direct ablation of metallic layers is disclosed.
Inventors
- 👤 Robert O. Hunter, Jr.
- 👤 Adlai H. Smith
- 👤 Bruce B. McArthur
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 03:56
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/02; H05K3/06; H05K3/061; B; B23; B23K; B23K26/00; B23K26/02; B23K26/06; B23K26/064; B23K26/066; C; C23; C23F; C23F1/00; C23F1/02; H01; H01Q; H01Q15/00; H01Q15/0006; H05K3/027; H05K2203/00; H05K2203/05; H05K2203/0562; H05K2203/0571; H05K2203/15; H05K2203/1545; H05K3/0011; H05K3/0017; H05K3/0026; H05K3/0032; H05K3/10; H05K3/108; H05K3/46; H05K3/4644
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
135 words
A process for forming a collection of fine metallic features comprising the steps of: providing a mask; providing said mask with gratings in a pattern to produce in light projected through said mask which is selected from a class including the positive and negative of said collection of metal features, said mask including first areas for transmitting light and second areas for scattering light transmitted through said mask; providing a substrate having an exposed metal layer; applying an etch barrier over said exposed metallic layer; passing light through said mask with sufficient energy to remove said barrier at locations corresponding to said first areas of said mask exposing said metallic layer underneath said barrier in a pattern which is selected from a class including the positive and negative of said collection of fine metal features.
Claim 2
Dependent Claim
135 words
A process for forming a collection of fine metallic features comprising the steps of: providing a mask; providing said mask with gratings in a pattern to produce in light projected through said mask which is selected from a class including the positive and negative of said collection of metal features, said mask including first areas for transmitting light and second areas for scattering light transmitted through said mask; providing a substrate having an exposed metal layer; applying an etch barrier over said exposed metallic layer; passing light through said mask with sufficient energy to remove said barrier at locations corresponding to said first areas of said mask exposing said metallic layer underneath said barrier in a pattern which is selected from a class including the positive and negative of said collection of fine metal features.
Claim 3
Dependent Claim
24 words
The process of forming fine metallic features according to claim 1 including the step of: etching said substrate to remove said exposed metallic layer.
Claim 4
Dependent Claim
25 words
The process of forming fine metallic features according to claim 1 and including: removing said remaining barrier to expose remaining metallic layer under said barrier.
Claim 5
Dependent Claim
18 words
The process of forming fine metallic features according to claim 1 and including: plating said exposed metallic layer.
Claim 6
Dependent Claim
14 words
The process of claim 1 and wherein said provided substrate is a copper substrate.
Claim 7
Dependent Claim
23 words
The process of claim 1 and wherein said applied etch barrier is selected from a class including polyimide, vinylidene chloride polymers, and plastic.
Claim 8
Dependent Claim
26 words
The process of claim 1 and wherein said step of passing light through said mask includes the step of passing coherent light energy through said mask.
Claim 9
Dependent Claim
26 words
The process of claim 1 and wherein said step of passing light through said mask includes the step of: scanning said mask with said light energy.
Claim 10
Dependent Claim
17 words
The process of claim 2 wherein said step of etching said substrate is a wet etching process.
Claim 11
Dependent Claim
22 words
The process of claim 1 and wherein said step of passing light through said mask includes emitting said light from a laser.
Claim 12
Dependent Claim
129 words
Apparatus for creation of a collection of fine metallic features on a substrate comprising: a substrate having an exposed metal layer; an etch barrier over said exposed metal layer; a light source having light energy sufficient to selectively remove said etch barrier and expose said metallic layer underneath said barrier; a mask, said mask provided with gratings in a pattern to produce by light projected through said mask which is selectred from a class including a positive and negative image of said collection of metal features in said etch barrier, said mask including first areas for transmitting light and second areas for scattering light incident on said mask; means for directing light from said light source onto said mask; means for imaging light from said mask to said substrate.
Claim 13
Dependent Claim
129 words
Apparatus for creation of a collection of fine metallic features on a substrate comprising: a substrate having an exposed metal layer; an etch barrier over said exposed metal layer; a light source having light energy sufficient to selectively remove said etch barrier and expose said metallic layer underneath said barrier; a mask, said mask provided with gratings in a pattern to produce by light projected through said mask which is selectred from a class including a positive and negative image of said collection of metal features in said etch barrier, said mask including first areas for transmitting light and second areas for scattering light incident on said mask; means for directing light from said light source onto said mask; means for imaging light from said mask to said substrate.
Claim 14
Dependent Claim
13 words
The apparatus of claim 11 and wherein said substrate is a copper substrate.
Claim 15
Dependent Claim
21 words
The apparatus of claim 11 and wherein said barrier is selected from a class including polyimide, vinylidene chloride polymers and plastic.
Claim 16
Dependent Claim
23 words
The apparatus of claim 11 and wherein said means for etching said barrier includes: a light source which is a coherent light source.
Claim 17
Dependent Claim
25 words
The apparatus of claim 14 and wherein said selectively etching said barrier includes the step of: means for scanning said mask with said light energy.
Claim 18
Dependent Claim
23 words
The apparatus of claim 11 and wherein said step of etching said barrier with light energy includes emitting said light from a laser.
Claim 19
Dependent Claim
117 words
Apparatus for creation of fine metallic features on a substrate comprising: a substrate having a metal layer covered with a barrier; a light source having light energy sufficient to selectively remove said barrier and expose said metallic layer underneath said barrier; a mask having image information of said fine metallic features, said mask positioned between said light source and substrate and including first areas on said mask for transmitting light and second areas on said mask for scattering light; means for optically projecting said mask to said substrate including an imaging system for relaying light incident on said mask from said light source and passing through said first areas and rejecting light scattered by said second areas.
Claim 20
Dependent Claim
117 words
Apparatus for creation of fine metallic features on a substrate comprising: a substrate having a metal layer covered with a barrier; a light source having light energy sufficient to selectively remove said barrier and expose said metallic layer underneath said barrier; a mask having image information of said fine metallic features, said mask positioned between said light source and substrate and including first areas on said mask for transmitting light and second areas on said mask for scattering light; means for optically projecting said mask to said substrate including an imaging system for relaying light incident on said mask from said light source and passing through said first areas and rejecting light scattered by said second areas.
Claim 21
Dependent Claim
22 words
The apparatus of claim 17 and wherein material comprising said mask is selected from a group including quartz glass and fused silica.
Claim 22
Dependent Claim
28 words
The apparatus of claim 17 and wherein said means for optically projecting said light includes stop means for intercepting light scattered by said second areas in said mask.
Claim 23
Dependent Claim
108 words
A process of forming fine metallic lines comprising the steps of: providing a substrate having an exposed metal layer; providing a light source having light energy sufficient to selectively remove said exposed metal layer; providing a mask having image information of said fine metallic features, said mask positioned between said light source and substrate and including first areas in said mask for transmitting light and second areas in said mask for scattering light; and selectively etching said metal of said substrate with light energy sufficient to remove said metal and expose said substrate underneath, the remaining metal being in the pattern of said collection of fine metal features.
Claim 24
Dependent Claim
108 words
A process of forming fine metallic lines comprising the steps of: providing a substrate having an exposed metal layer; providing a light source having light energy sufficient to selectively remove said exposed metal layer; providing a mask having image information of said fine metallic features, said mask positioned between said light source and substrate and including first areas in said mask for transmitting light and second areas in said mask for scattering light; and selectively etching said metal of said substrate with light energy sufficient to remove said metal and expose said substrate underneath, the remaining metal being in the pattern of said collection of fine metal features.
Claim 25
Dependent Claim
19 words
A process of forming fine metallic features according to claim 20 and including: plating metal remaining on said substrate.
Claim 26
Dependent Claim
20 words
A process of forming fine metallic features according to claim 20 and wherein said selective etch utilizes chemically enhanced etching.
Claim 27
Dependent Claim
21 words
A process of forming fine metallic features according to claim 20 and wherein: said selective etch utilizes a single laser pulse.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-11-14 | 1998-05-16 | 1998-11-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-11-14 | 2002-05-16 | 2002-11-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-11-14 | 2006-05-16 | 2006-11-15 | $7700.00 | Window Closed / Lapsed |