Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
110 words
A method for removing particulate matter from a workpiece, comprising the steps of: placing the workpiece on a support plate; rotating the support plate in a first direction; and directing a stream of a cleaning material towards the workpiece to impact on the workpiece in a region radially displaced from a center of the support plate and disposed between said center and an edge of the workpiece, said stream of cleaning material having a lateral component of velocity that is directed in a second direction, opposite the first direction, PG,15 rotation of the workpiece in the first direction increasing an effective velocity with which the cleaning material impacts the workpiece.
Claim 2
Independent Claim
110 words
A method for removing particulate matter from a workpiece, comprising the steps of: placing the workpiece on a support plate; rotating the support plate in a first direction; and directing a stream of a cleaning material towards the workpiece to impact on the workpiece in a region radially displaced from a center of the support plate and disposed between said center and an edge of the workpiece, said stream of cleaning material having a lateral component of velocity that is directed in a second direction, opposite the first direction, PG,15 rotation of the workpiece in the first direction increasing an effective velocity with which the cleaning material impacts the workpiece.
Claim 3
Dependent Claim
47 words
The method of claim 1, wherein the step of directing the stream of the cleaning material towards the workpiece further comprises the step of: directing the cleaning material under pressure through a sprayhead such that the cleaning material exits the sprayhead in the form of a spray.
Claim 4
Dependent Claim
16 words
The method of claim 2, further comprising the step of: accelerating the spray towards the workpiece.
Claim 5
Dependent Claim
41 words
The method of claim 2, further comprising the step of: moving the sprayhead radially from the center of the support plate to an outer edge of the support plate such that the spray of cleaning material is directed over the workpiece.
Claim 6
Dependent Claim
40 words
The method of claim 4, further comprising the steps of: monitoring a position of the sprayhead with respect to the support plate; and adjusting the speed of rotation of the support plate in response to the position of the sprayhead.
Claim 7
Dependent Claim
49 words
The method of claim 5, wherein the speed of rotation of the support plate is varied that the spray impacts the support plate with a substantially constant velocity as the sprayhead is moved radially from the center of the support plate to the outer edge of the support plate.
Claim 8
Independent Claim
109 words
A method for removing particulate matter from a workpiece, comprising the steps of: placing the workpiece on a support plate; rotating the support plate in a first direction; and directing a stream of cleaning material towards the workpiece to impact in a region of the workpiece that is radially offset from a center of the support plate and disposed between said center and an edge of the workpiece, said stream of cleaning material having a lateral component of velocity that is directed in the first direction in which the support plate rotates, rotation of the support plate decreasing an effective velocity with which the cleaning material impacts the workpiece.
Claim 9
Independent Claim
109 words
A method for removing particulate matter from a workpiece, comprising the steps of: placing the workpiece on a support plate; rotating the support plate in a first direction; and directing a stream of cleaning material towards the workpiece to impact in a region of the workpiece that is radially offset from a center of the support plate and disposed between said center and an edge of the workpiece, said stream of cleaning material having a lateral component of velocity that is directed in the first direction in which the support plate rotates, rotation of the support plate decreasing an effective velocity with which the cleaning material impacts the workpiece.
Claim 10
Independent Claim
88 words
A method for removing particulate matter from a workpiece, comprising the steps of: rotating the workpiece in a first direction about a longitudinal axis of the workpiece; selecting a point on the rotating workpiece that is radially spaced from the longitudinal axis of the workpiece; and directing a stream of cleaning material onto the rotating workpiece in a second direction that is substantially opposite the first direction at the point so as to achieve an increased effective velocity of the cleaning material as the stream impacts the workpiece.
Claim 11
Independent Claim
88 words
A method for removing particulate matter from a workpiece, comprising the steps of: rotating the workpiece in a first direction about a longitudinal axis of the workpiece; selecting a point on the rotating workpiece that is radially spaced from the longitudinal axis of the workpiece; and directing a stream of cleaning material onto the rotating workpiece in a second direction that is substantially opposite the first direction at the point so as to achieve an increased effective velocity of the cleaning material as the stream impacts the workpiece.