Patent US5364187A successfully refreshed from Google Patents.
US5364187A
Expired / Lapsed
US
⏱️ 0.0 years remaining
System for repeatable temperature measurement using surface reflectivity
Assignee: Round Rock Research LLC
•
Filing: 1993-03-08
•
Granted: 1994-11-15
•
Expires: 2013-03-08
Abstract
Abstract A system is disclosed for externally measuring the temperature of a substrate having a reflective surface within a chamber. The system comprises a first light source having sufficient intensity for bombarding the reflective surface with photons, thereby heating the surface. The first light source has an output level and a wavelength substantially in the absorption band of silicon. The system also comprises means for exposing the substrate to a gas in order to form a layer superjacent the reflective surface. A sensor, preferably a photo detector, for sensing changes in the reflectivity of the surface is included. In one embodiment of the present invention, the sensor comprises a second light source and a sensor, for sensing the reflectivity of the surface caused by the reflecting photons. Furthermore, the system comprises control circuitry for controlling the first light source in response to the sensor; the control circuitry being coupled to the sensor by a feedback loop.
Inventors
- 👤 Randhir P. S. Thakur
- 👤 Gurtej S. Sandhu
- 👤 Annette L. Martin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 23:27
CPC Classifications
G; G01; G01K; G01K11/00
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
91 words
A system for measuring the temperature of a substrate, said substrate having a reflective surface, said system comprising: a. means for sensing changes in the reflectivity of said surface while a layer is formed on said surface as said surface is exposed to light energy and a gas: b. a first light source for bombarding said reflective surface with photons; c. means for exposing said surface to a gas thereby forming said layer superjacent said substrate; and d. means for controlling said first light source in response to said sensing means.
Claim 2
Independent Claim
91 words
A system for measuring the temperature of a substrate, said substrate having a reflective surface, said system comprising: a. means for sensing changes in the reflectivity of said surface while a layer is formed on said surface as said surface is exposed to light energy and a gas: b. a first light source for bombarding said reflective surface with photons; c. means for exposing said surface to a gas thereby forming said layer superjacent said substrate; and d. means for controlling said first light source in response to said sensing means.
Claim 3
Dependent Claim
29 words
A system for measuring the temperature of a substrate, according to claim 1, wherein said sensing means comprises at least one of a photo detector, spectrophotometer, and light sensor.
Claim 4
Dependent Claim
74 words
A system for measuring the temperature of a substrate, according to claim 1, wherein said surface has an initial reflectivity, and said sensing means is coupled to said controlling means by a feedback loop, said feedback loop comprising: a) means for differentiating between said initial reflectivity and said changes in the reflectivity, said differentiating means generating a signal; and b) a control system for controlling said first light source in response to said signal.
Claim 5
Dependent Claim
31 words
A system for measuring the temperature of a substrate, according to claim 1, wherein said first light source emits photons having a wavelength range substantially in the absorption band of silicon.
Claim 6
Dependent Claim
27 words
A system for measuring the temperature of a substrate, according to claim 4, wherein said wavelength range is substantially between substantially low ultraviolet to substantially high infrared.
Claim 7
Dependent Claim
25 words
A system for measuring the temperature of a substrate, according to claim 5, wherein said wavelength range is substantially between 0.2 μm and 2.2 μm.
Claim 8
Dependent Claim
66 words
A system for measuring the temperature of a substrate, according to claim 4, wherein said sensing means comprises: a) a second light source for reflecting photons off said reflective surface, said second light source having an initial transmissivity and a wavelength range substantially spaced from said wavelength range of said first light source; and b) a sensor for sensing the reflectivity of said second light source.
Claim 9
Dependent Claim
66 words
A system for measuring the temperature of a substrate, according to claim 7, wherein said sensing means is coupled to said controlling means by a feedback loop, said loop comprising: a) means for differentiating between said initial transmissivity and said changes in the reflectivity, said differentiating means generating a signal; and b) a control system for controlling said first light source in response to said signal.
Claim 10
Dependent Claim
36 words
A system for measuring the temperature of a substrate, according to claim 8, wherein said second light source comprises laser, said laser comprising at least one of a CO 2 laser, He-Ne laser, and semiconductor diode.
Claim 11
Dependent Claim
37 words
A system for measuring the temperature of a substrate, according to claim 1, wherein said first light source comprises a lamp, said lamp being at least one of an arc discharge lamp and a Xe discharge lamp.
Claim 12
Dependent Claim
39 words
A system for measuring the temperature of a substrate, according to claim 1, wherein said first light source comprises a lamp array, said lamp array being at least one of a Halogen, a Ultra Violet, and an Infrared lamp.
Claim 13
Dependent Claim
32 words
A system for measuring the temperature of a substrate, according to claim 1, wherein said sensing means continuously senses changes in the reflectivity of said surface until said layer is substantially formed.
Claim 14
Independent Claim
132 words
A system for measuring the temperature of a substrate within a chamber, said substrate having a reflective surface, said chamber having a reflective interior, comprising: a) a light source for bombarding said reflective surface and said reflective interior with photons, said light source having an output with a wavelength range substantially in the absorption band of silicon; b) means for exposing said surface to a gas within said interior to form a layer superjacent said substrate; c) means for continuously sensing changes in the reflectivities of said surface and said interior caused by bombarding with said surface within said interior with photons and exposing said substrate to said gas within said interior until said layer is substantially formed; and d) means for controlling said light source in response to said sensing means.
Claim 15
Independent Claim
132 words
A system for measuring the temperature of a substrate within a chamber, said substrate having a reflective surface, said chamber having a reflective interior, comprising: a) a light source for bombarding said reflective surface and said reflective interior with photons, said light source having an output with a wavelength range substantially in the absorption band of silicon; b) means for exposing said surface to a gas within said interior to form a layer superjacent said substrate; c) means for continuously sensing changes in the reflectivities of said surface and said interior caused by bombarding with said surface within said interior with photons and exposing said substrate to said gas within said interior until said layer is substantially formed; and d) means for controlling said light source in response to said sensing means.
Claim 16
Dependent Claim
32 words
A system for measuring the temperature of a substrate within a chamber, according to claim 13, wherein said sensing means comprises at least one of a photo detector, spectrophotometer, and light sensor.
Claim 17
Dependent Claim
28 words
A system for measuring the temperature of a substrate within a chamber, according to claim 13, wherein said wavelength range is substantially between 0.2 μm and 2.2 μm.
Claim 18
Dependent Claim
38 words
A system for measuring the temperature of a substrate within a chamber, according to claim 13, wherein said light source comprises a lamp, said lamp being at least one of an arc discharge lamp and Xe discharge lamp.
Claim 19
Dependent Claim
41 words
A system for measuring the temperature of a substrate within a chamber, according to claim 13, wherein said light source comprises a lamp array, said lamp array being at least one of a Halogen, a Ultra Violet, and an Infrared lamp.
Claim 20
Dependent Claim
82 words
A system for measuring the temperature of a substrate within a chamber, according to claim 13, wherein said surface has an initial reflectivity, said interior has an initial reflectivity, and said sensing means is coupled to said controlling means by a feedback loop, said feedback loop comprising: a) means for differentiating between said initial reflectivities and said changes in the reflectivities, said differentiating means generating a signal; and b) a control system for controlling said light source in response to said signal.
Claim 21
Independent Claim
140 words
A system for measuring the temperature of a substrate within a chamber, said substrate having a reflective surface, comprising: a) a light source for bombarding said reflective surface with photons, said light source having an output level with a wavelength range substantially in the absorption band of silicon, said light source having a transmissivity; b) means for exposing said surface to a gas to form a layer superjacent said substrate; c) means for measuring the transmissivity of said light source; d) means for sensing changes in the reflectivity of said surface caused by bombarding with said surface with photons and exposing said substrate to said gas; e) means for differentiating between said transmissivity and said changes in the reflectivity, said differentiating means generating a signal; and f) a control system for controlling said output level in response to said signal.
Claim 22
Independent Claim
140 words
A system for measuring the temperature of a substrate within a chamber, said substrate having a reflective surface, comprising: a) a light source for bombarding said reflective surface with photons, said light source having an output level with a wavelength range substantially in the absorption band of silicon, said light source having a transmissivity; b) means for exposing said surface to a gas to form a layer superjacent said substrate; c) means for measuring the transmissivity of said light source; d) means for sensing changes in the reflectivity of said surface caused by bombarding with said surface with photons and exposing said substrate to said gas; e) means for differentiating between said transmissivity and said changes in the reflectivity, said differentiating means generating a signal; and f) a control system for controlling said output level in response to said signal.
Claim 23
Dependent Claim
32 words
A system for measuring the temperature of a substrate within a chamber, according to claim 19, wherein said sensing means comprises at least one of a photo detector, spectrophotometer, and light sensor.
Claim 24
Dependent Claim
29 words
A system for measuring the temperature of a substrate within a chamber, according to claim 19, wherein said wavelength has a range substantially between 0.2 μm and 2.2 μm.
Claim 25
Dependent Claim
38 words
A system for measuring the temperature of a substrate within a chamber, according to claim 19, wherein said light source comprises a lamp, said lamp being at least one of an arc discharge lamp and Xe discharge lamp.
Claim 26
Dependent Claim
41 words
A system for measuring the temperature of a substrate within a chamber, according to claim 19, wherein said light source comprises a lamp array, said lamp array being at least one of a Halogen, a Ultra Violet, and an Infrared lamp.
Claim 27
Independent Claim
239 words
A system for externally measuring the temperature of a substrate within a chamber, said substrate having reflective top and bottom surfaces, comprising: a) a first light source for bombarding said reflective surfaces with photons, said first light source having an output level, said first light source having a wavelength substantially in the absorption band of silicon, said wavelength having a range substantially between 0.2 μm and 2.2 μm; b) means for exposing said substrate to a gas to form a layer superjacent said top surface; c) means for sensing changes in the reflectivity of said top surface caused by said first light source and said exposing means, said sensing means comprising: i. a second light source for reflecting photons off said top surface, said second light source having an initial transmissivity and a wavelength range substantially spaced from said first light source; and ii. a sensor for sensing the reflectivity of said surface caused by said second light source, said sensor comprising at least one of a photo detector, spectrophotometer, and light sensor; and d) means for controlling said first light source in response to said sensing means, said controlling means being coupled to said sensing means by a feedback loop, said loop comprising: i. means for differentiating between said initial transmissivity and said changes in the reflectivity, said differentiating means generating a signal; and ii. a control system for controlling said output level in response to said signal.
Claim 28
Independent Claim
239 words
A system for externally measuring the temperature of a substrate within a chamber, said substrate having reflective top and bottom surfaces, comprising: a) a first light source for bombarding said reflective surfaces with photons, said first light source having an output level, said first light source having a wavelength substantially in the absorption band of silicon, said wavelength having a range substantially between 0.2 μm and 2.2 μm; b) means for exposing said substrate to a gas to form a layer superjacent said top surface; c) means for sensing changes in the reflectivity of said top surface caused by said first light source and said exposing means, said sensing means comprising: i. a second light source for reflecting photons off said top surface, said second light source having an initial transmissivity and a wavelength range substantially spaced from said first light source; and ii. a sensor for sensing the reflectivity of said surface caused by said second light source, said sensor comprising at least one of a photo detector, spectrophotometer, and light sensor; and d) means for controlling said first light source in response to said sensing means, said controlling means being coupled to said sensing means by a feedback loop, said loop comprising: i. means for differentiating between said initial transmissivity and said changes in the reflectivity, said differentiating means generating a signal; and ii. a control system for controlling said output level in response to said signal.
Claim 29
Dependent Claim
165 words
A method for externally measuring the temperature of a substrate within a chamber using the system of claim 24, comprising the steps of: providing a substantially clean semiconductor substrate in said chamber, said substrate having a layer superjacent said substrate, said layer having a reflective surface; forming a film superjacent said surface by introducing a gas and photon energy in situ, said gas comprising at least one of N 2 , NH 3 , O 2 , N 2 O, Ar, Ar--H 2 , H 2 , GeH 4 , and a Fluorine based gas, said energy generating a temperature substantially within the range of 500° C. to 1250° C., said energy substantially in the absorption band of silicon; measuring the reflectivity of said surface prior to said forming and continuously during said forming until said film is substantially formed; and exposing said substrate to said photon energy, said energy having a power level, said power level responsive to the measured reflectivities of said film.
References Cited (Backward Citations)
US3672221A
Cited
US4136566A
Cited
US4583861A
Cited
US4956538A
Cited
US5208643A
Cited
US5102231A
Cited
US5213985A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-11-14 | 1998-05-16 | 1998-11-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-11-14 | 2002-05-16 | 2002-11-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-11-14 | 2006-05-16 | 2006-11-15 | $7700.00 | Window Closed / Lapsed |