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Visible-spectrum anti-reflection coating including electrically-conductive metal oxide layers

Assignee: Photran Corp
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Filing: 1993-09-23
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Granted: 1994-11-08
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Expires: 2013-09-23
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Abstract

Abstract A six-layer anti-reflection coating (20 and 20A) includes three layers (24, 28, and 34) which may be formed from an electrically-conductive metal oxide having a refractive index between about 1.9 and 2.1 at a wavelength of 520 nanometers. Up to a total optical thickness of about one-wavelength of visible light of the electrically-conductive metal oxide may be included in the coating, while still providing less than 0.25 percent photopic reflection.

Inventors

  • 👤 R. Russel Austin

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 04:58
CPC Classifications
G; G02; G02B; G02B1/00; G02B1/10; G02B1/11; G02B1/113; G02B1/115; G02B1/116; B; B32; B32B; B32B17/00; B32B17/06; C; C03; C03C; C03C17/00; C03C17/34; C03C17/3411; C03C17/3417; Y; Y10; Y10S; Y10S428/00; Y10S428/913; Y10T; Y10T428/00; Y10T428/24; Y10T428/24942; Y10T428/2495; Y10T428/24967; Y10T428/24975; Y10T428/26; Y10T428/263; Y10T428/264; Y10T428/265

Claims Analysis

Total Claims: 17
Claim 1
Independent Claim 248 words
An antireflection coating for a substrate, comprising: six-layers designated the first through the sixth in consecutive numerical order beginning with the layer furthest from the substrate, each of said layers having a physical thickness of at least about 9.0 nanometers, each of said layers having an extinction coefficient less than 0.1 for visible light and wherein one or more of said layers is formed of an electrically-conductive metal oxide which is transparent to visible light; said first layer having a refractive index between about 1.46 and 1.52 at a wavelength of about 520 nm and having an optical thickness of about one-quarter wavelength of visible light; said sixth layer having a refractive index greater than the refractive index of the substrate; said fifth layer having a refractive index less than the refractive index of said sixth layer; said fifth and sixth layers having a combined optical thickness between about one-tenth and one-quarter wavelength of visible light; said third layer having a refractive index greater than about 2.15 at a wavelength of about 520 nanometers; said second layer having a refractive index less than the refractive index of said third layer and greater than the refractive index of said first layer; said fourth layer having a refractive index less than the refractive index of said third layer and greater than the refractive index of said fifth layer; and said second, third, and fourth layers having a combined optical thickness between about one-half wavelength and one wavelength of visible light.
Claim 2
Dependent Claim 248 words
An antireflection coating for a substrate, comprising: six-layers designated the first through the sixth in consecutive numerical order beginning with the layer furthest from the substrate, each of said layers having a physical thickness of at least about 9.0 nanometers, each of said layers having an extinction coefficient less than 0.1 for visible light and wherein one or more of said layers is formed of an electrically-conductive metal oxide which is transparent to visible light; said first layer having a refractive index between about 1.46 and 1.52 at a wavelength of about 520 nm and having an optical thickness of about one-quarter wavelength of visible light; said sixth layer having a refractive index greater than the refractive index of the substrate; said fifth layer having a refractive index less than the refractive index of said sixth layer; said fifth and sixth layers having a combined optical thickness between about one-tenth and one-quarter wavelength of visible light; said third layer having a refractive index greater than about 2.15 at a wavelength of about 520 nanometers; said second layer having a refractive index less than the refractive index of said third layer and greater than the refractive index of said first layer; said fourth layer having a refractive index less than the refractive index of said third layer and greater than the refractive index of said fifth layer; and said second, third, and fourth layers having a combined optical thickness between about one-half wavelength and one wavelength of visible light.
Claim 3
Dependent Claim 50 words
The coating of claim 1, wherein at least one of said second and fourth layers is formed from a transparent electrically-conductive metal oxide selected from the group consisting of aluminum-doped zinc oxide, tin oxide, indium oxide, indium tin oxide, cadmium tin oxide, antimony- doped tin oxide, and fluorine-doped tin oxide.
Claim 4
Dependent Claim 17 words
The coating of claim 2, wherein the second and fourth layers are formed from indium tin oxide.
Claim 5
Dependent Claim 31 words
The coating of claim 3, wherein the combined optical thickness of said second, third, and fourth layers is about one half-wavelength and said fourth layer is thicker than said second layer.
Claim 6
Dependent Claim 17 words
The coating of claim 4, wherein said third layer has an optical thickness less than one-quarter wavelength.
Claim 7
Dependent Claim 16 words
The coating of claim 4, wherein said first and fifth layers are formed from silicon dioxide.
Claim 8
Dependent Claim 23 words
The coating of claim 6, wherein said third layer has a refractive index of about 2.35 at a wavelength of about 520 nanometers.
Claim 9
Dependent Claim 25 words
The coating of claim 6, wherein said third layer has a refractive index between about 2.15 and 2.25 at a wavelength of about 520 nanometers.
Claim 10
Dependent Claim 15 words
The coating of claim 3, wherein said sixth layer is formed from indium tin oxide.
Claim 11
Dependent Claim 33 words
The coating of claim 2, wherein the combined optical thickness of said second third and fourth layers is about one-wavelength of visible light and said second layer is thicker than said fourth layer.
Claim 12
Dependent Claim 29 words
The coating of claim 1, wherein said second fourth and sixth layers each has a refractive index between about 1.9 and 2.1 at a wavelength of about 520 nanometers.
Claim 13
Dependent Claim 207 words
An antireflection coating for a substrate, comprising: six-layers designated the first through the sixth in consecutive numerical order beginning with the layer furthest from the substrate, each of said layers having a physical thickness of at least about 9.0 nanometers, each of said layers having an extinction coefficient less than 0.1 for visible light and wherein one or more of said layers is formed of an electrically-conductive metal oxide which is transparent to visible light;; said first layer formed from silicon dioxide and having an optical thickness of about one-quarter wavelength of visible light; said sixth layer having a refractive index greater than the refractive index of the substrate; said fifth layer having a refractive index less than the refractive index of said fourth and sixth layers; said fifth and sixth layers having a combined optical thickness between about one-tenth and one-quarter wavelength of visible light; said third layer having a refractive index greater than about 2.1 at a wavelength of about 520 nanometers; said second and fourth layers having a refractive index between about 1.9 and 2.1 at a wavelength of about 520 nanometers; and said second, third and fourth layers having a combined optical thickness between about one-half wavelength and one wavelength of visible light.
Claim 14
Dependent Claim 207 words
An antireflection coating for a substrate, comprising: six-layers designated the first through the sixth in consecutive numerical order beginning with the layer furthest from the substrate, each of said layers having a physical thickness of at least about 9.0 nanometers, each of said layers having an extinction coefficient less than 0.1 for visible light and wherein one or more of said layers is formed of an electrically-conductive metal oxide which is transparent to visible light;; said first layer formed from silicon dioxide and having an optical thickness of about one-quarter wavelength of visible light; said sixth layer having a refractive index greater than the refractive index of the substrate; said fifth layer having a refractive index less than the refractive index of said fourth and sixth layers; said fifth and sixth layers having a combined optical thickness between about one-tenth and one-quarter wavelength of visible light; said third layer having a refractive index greater than about 2.1 at a wavelength of about 520 nanometers; said second and fourth layers having a refractive index between about 1.9 and 2.1 at a wavelength of about 520 nanometers; and said second, third and fourth layers having a combined optical thickness between about one-half wavelength and one wavelength of visible light.
Claim 15
Dependent Claim 49 words
The coating of claim 12, wherein at least one of said second, fourth, and sixth layers is formed from an electrically-conductive metal oxide selected from the group consisting of aluminum-doped zinc oxide, tin oxide, indium oxide, indium tin oxide, cadmium tin oxide, antimony-doped tin oxide, and fluorine-doped tin oxide.
Claim 16
Dependent Claim 21 words
The coating of claim 13, wherein each of said second, fourth, and sixth layers is formed from electrically-conductive indium tin oxide.
Claim 17
Dependent Claim 14 words
The coating of claim 14, wherein said fifth layer is formed from silicon dioxide.

References Cited (Backward Citations)

US3432225A Cited
US3799653A Cited
US4832448A Cited
US5147125A Cited
US5183700A Cited
US5270858A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1997-11-07 1998-05-09 1998-11-08 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2001-11-07 2002-05-09 2002-11-08 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2005-11-07 2006-05-09 2006-11-08 $7700.00 Window Closed / Lapsed

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