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US5362328A
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US
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Apparatus and method for delivering reagents in vapor form to a CVD reactor, incorporating a cleaning subsystem
Assignee: Entegris Inc
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Filing: 1994-01-07
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Granted: 1994-11-08
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Expires: 2014-01-07
Abstract
Abstract A means and method for protecting a source reagent vaporizer structure from the harmful effects of solid build-up occurring during its use in chemical vapor deposition (CVD). Vaporizer structures may be used to provide a means of transferring relatively involatile source reagents or reagent solutions into CVD reactors and often are high surface area, highly efficient heat transfer structures. When vaporizers are used in CVD, often some premature decomposition of the source reagent occurs on the vaporizer element as well as some oxidative decomposition to produce solid products which cause clogging and inefficient vaporization. The invention provides both apparatus and method to periodically flush clean such vaporizer elements to increase their consistency, reliability, and average time between servicings.
Inventors
- 👤 Robin A. Gardiner
- 👤 Peter Van Buskirk
- 👤 Peter S. Kirlin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 14:46
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/448; C23C16/4481; C23C16/4483; C23C16/06; C23C16/18; C23C16/22; C23C16/30; C23C16/40; C23C16/408; C23C16/409; C23C16/455; C23C16/45561; H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0436; H10N60/0464; Y; Y10; Y10S; Y10S261/00; Y10S261/65; Y10S261/88
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
193 words
An apparatus for vaporizing a source reagent of non-vapor character to produce a vapor for transport to a locus of use in a downstream deposition chamber, said apparatus comprising: a vaporization chamber including a housing defining therewithin an enclosed interior vaporization volume; means for feeding source reagent to the interior volume of the housing; vaporization means disposed within the interior volume of said housing and in receiving relationship to the feed means, for receiving source reagent and effecting vaporization thereof; a deposition chamber to which the vaporization chamber housing is joined in vaporized reagent flow relationship; and means for selectively feeding to the interior volume, for contact with the vaporization means and interior surfaces of the housing, a cleaning fluid which is cleaningly effect to at least partially remove vaporization deposits from said vaporization means and interior surfaces of the housing; wherein the flow of cleaning fluid, source reagent, and vaporized reagent are selectively controlled with flow control means of a selectively actuatable character, and wherein the cleaning fluid feeding means and flow control means are constructed and arranged to be operated while the vaporization chamber housing remains connected to the deposition chamber.
Claim 2
Independent Claim
193 words
An apparatus for vaporizing a source reagent of non-vapor character to produce a vapor for transport to a locus of use in a downstream deposition chamber, said apparatus comprising: a vaporization chamber including a housing defining therewithin an enclosed interior vaporization volume; means for feeding source reagent to the interior volume of the housing; vaporization means disposed within the interior volume of said housing and in receiving relationship to the feed means, for receiving source reagent and effecting vaporization thereof; a deposition chamber to which the vaporization chamber housing is joined in vaporized reagent flow relationship; and means for selectively feeding to the interior volume, for contact with the vaporization means and interior surfaces of the housing, a cleaning fluid which is cleaningly effect to at least partially remove vaporization deposits from said vaporization means and interior surfaces of the housing; wherein the flow of cleaning fluid, source reagent, and vaporized reagent are selectively controlled with flow control means of a selectively actuatable character, and wherein the cleaning fluid feeding means and flow control means are constructed and arranged to be operated while the vaporization chamber housing remains connected to the deposition chamber.
Claim 3
Dependent Claim
66 words
An apparatus according to claim 1, wherein the flow control means are interconnected with automatic cycle timer means, to produce a sequence of vaporization of source reagent and delivery of same to the downstream deposition chamber for a predetermined first portion of the cycle, followed by cessation of flow of source reagent and vaporized reagent, and flow of cleaning fluid into the chamber for cleaning thereof.
Claim 4
Dependent Claim
71 words
Apparatus according to claim 2, wherein the cycle timer means comprise means for sensing a system variable selected from the group consisting of a pressure differential across the vaporizer, the fluid conductance through the vaporizer, light reflectance off the vaporizer structure at a wavelength where such reflectance is altered by the build up of solids, the radial thermal conductance of the vaporizer, and feedback from the properties of the growing films.
Claim 5
Dependent Claim
29 words
An apparatus according to claim 1, wherein the housing and deposition chamber are joined by a vapor supply conduit containing a selectively openable and selectively closable flow control valve.
Claim 6
Dependent Claim
24 words
An apparatus according to claim 4, wherein the vaporization chamber housing is coupled to a cleaning fluid collection reservoir for collection of cleaning fluid.
Claim 7
Dependent Claim
35 words
An apparatus according to claim 5, wherein the cleaning fluid collection reservoir is coupled by gravity-flow liquid flow means to the vaporization chamber housing, for collection of liquid-phase cleaning fluid in the cleaning collection reservoir.
Claim 8
Dependent Claim
17 words
An apparatus according to claim 6, wherein the gravity-flow liquid flow means comprises a gravity flow conduit.
Claim 9
Dependent Claim
38 words
An apparatus according to claim 7, further comprising a scrubber joined to the deposition chamber, and a bypass conduit joined at one end thereof to the scrubber and joined at the other end thereof to the gravity-flow conduit.
Claim 10
Dependent Claim
19 words
An apparatus according to claim 8, wherein the scrubber is joined to the deposition chamber by an effluent conduit.
Claim 11
Dependent Claim
29 words
An apparatus according to claim 9, further comprising flow control valves in the vapor supply conduit, gravity flow conduit, and effluent conduit, for selectively controlling flow of fluids therethrough.
Claim 12
Dependent Claim
15 words
An apparatus according to claim 10, further comprising a vacuum pump coupled to said scrubber.
Claim 13
Independent Claim
166 words
An apparatus for vaporizing a source reagent of non-vapor character, to produce a vapor for transport to a locus of use in a downstream deposition chamber, said apparatus comprising: a vaporization chamber including a housing defining therewithin an enclosed interior vaporization volume; means for feeding source reagent to the interior volume of the housing; vaporization means disposed within the interior volume of said housing and in receiving relationship to the feed means, for receiving source reagent and effecting vaporization thereof; and a downstream deposition chamber joined in vaporized reagent flow relationship to the vaporization chamber housing; means for automatically selectively feeding to the interior volume, for contact with the vaporization means and interior surfaces of the housing, a cleaning fluid which is cleaningly effective to at least partially remove vaporization deposits from said vaporization means and interior surfaces of the housing; wherein the flow of cleaning fluid, source fluid, and vaporized reagent are selectively controlled with automatic flow control means of a selectively automatically actuatable character.
Claim 14
Independent Claim
166 words
An apparatus for vaporizing a source reagent of non-vapor character, to produce a vapor for transport to a locus of use in a downstream deposition chamber, said apparatus comprising: a vaporization chamber including a housing defining therewithin an enclosed interior vaporization volume; means for feeding source reagent to the interior volume of the housing; vaporization means disposed within the interior volume of said housing and in receiving relationship to the feed means, for receiving source reagent and effecting vaporization thereof; and a downstream deposition chamber joined in vaporized reagent flow relationship to the vaporization chamber housing; means for automatically selectively feeding to the interior volume, for contact with the vaporization means and interior surfaces of the housing, a cleaning fluid which is cleaningly effective to at least partially remove vaporization deposits from said vaporization means and interior surfaces of the housing; wherein the flow of cleaning fluid, source fluid, and vaporized reagent are selectively controlled with automatic flow control means of a selectively automatically actuatable character.
Claim 15
Independent Claim
313 words
A method of vaporizing a non-vapor source reagent for subsequent use of the vaporized reagent in a downstream deposition chamber, and at least partially removing decomposition by-products of such vaporization, said process comprising: (a) providing an apparatus for vaporizing a source reagent of non-vapor character, to produce a vapor for transport to a locus of use, for deposition in the downstream deposition chamber, said apparatus comprising: (i) a vaporization chamber including a housing defining therewithin an enclosed interior vaporization volume; (ii) means for feeding source reagent to the interior volume of the housing; (iii) vaporization means disposed within the interior volume of said housing and in receiving relationship to the feed means, for receiving source reagent and effecting vaporization thereof; (iv) a downstream deposition chamber to which the vaporization chamber housing is joined in vaporized reagent flow relationship; (v) means for selectively feeding to the interior volume, for contact with the vaporization means and interior surfaces of the housing, a cleaning fluid which is cleaningly effective to at least partially remove vaporization deposits from said vaporization means and interior surfaces of the housing; wherein the flow of cleaning fluid, source reagent, and vaporized reagent are selectively controlled with flow control means of a selectively actuatable character, and wherein the cleaning fluid feeding means and said flow control means are constructed and arranged to be operated while the vaporization chamber housing remains connected to the downstream deposition chamber; (b) vaporizing the source reagent in the housing for a predetermined time, and flowing resulting vaporized reagent out of the housing and to the downstream deposition chamber; and (c) after said predetermined time, terminating flow of source reagent and vaporized reagent, and flowing into said housing a cleaning fluid which is cleaningly effective for at least partial removal of deposits produced by said vaporization, while said vaporization housing chamber remains connected to the downstream deposition chamber.
Claim 16
Independent Claim
313 words
A method of vaporizing a non-vapor source reagent for subsequent use of the vaporized reagent in a downstream deposition chamber, and at least partially removing decomposition by-products of such vaporization, said process comprising: (a) providing an apparatus for vaporizing a source reagent of non-vapor character, to produce a vapor for transport to a locus of use, for deposition in the downstream deposition chamber, said apparatus comprising: (i) a vaporization chamber including a housing defining therewithin an enclosed interior vaporization volume; (ii) means for feeding source reagent to the interior volume of the housing; (iii) vaporization means disposed within the interior volume of said housing and in receiving relationship to the feed means, for receiving source reagent and effecting vaporization thereof; (iv) a downstream deposition chamber to which the vaporization chamber housing is joined in vaporized reagent flow relationship; (v) means for selectively feeding to the interior volume, for contact with the vaporization means and interior surfaces of the housing, a cleaning fluid which is cleaningly effective to at least partially remove vaporization deposits from said vaporization means and interior surfaces of the housing; wherein the flow of cleaning fluid, source reagent, and vaporized reagent are selectively controlled with flow control means of a selectively actuatable character, and wherein the cleaning fluid feeding means and said flow control means are constructed and arranged to be operated while the vaporization chamber housing remains connected to the downstream deposition chamber; (b) vaporizing the source reagent in the housing for a predetermined time, and flowing resulting vaporized reagent out of the housing and to the downstream deposition chamber; and (c) after said predetermined time, terminating flow of source reagent and vaporized reagent, and flowing into said housing a cleaning fluid which is cleaningly effective for at least partial removal of deposits produced by said vaporization, while said vaporization housing chamber remains connected to the downstream deposition chamber.
References Cited (Backward Citations)
US5204314A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-11-07 | 1998-05-09 | 1998-11-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-11-07 | 2002-05-09 | 2002-11-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-11-07 | 2006-05-09 | 2006-11-08 | $7700.00 | Window Closed / Lapsed |