Patent US5359148A successfully refreshed from Google Patents.
US5359148A
Expired / Lapsed
US
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Heat-treating apparatus
Assignee: Tokyo Electron Ltd
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Filing: 1993-07-26
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Granted: 1994-10-25
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Expires: 2013-07-26
Abstract
Abstract A heat-treating apparatus has a reaction vessel being adapted for performing a heat process for a workpiece to be treated and having a joint pipe portion and an outer pipe jointed to the joint pipe portion and of the reaction vessel. A sealing member is disposed between the outer pipe and the joint pipe portion. The sealing member has a relatively soft core member and a film harder than the core member. The film is disposed on the surface of the core member and has a heat resistance and a chemical resistance. Since the core member of the sealing portion has flexibility, it easily deforms corresponding to the shape of the sealing portion. The film provided on the core member prevents the sealing member from thermally adhering to the sealing portion and from thermally deteriorating.
Inventors
- 👤 Wataru Okase
- 👤 Takashi Tanahashi
- 👤 Takenobu Matsuo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:57
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/4401; C23C16/4409; C30; C30B; C30B25/00; C30B25/02; C30B25/14; C30B31/00; C30B31/06; C30B31/16; F; F16; F16J; F16J15/00; F16J15/02; F16J15/021; F16J15/022; F16L; F16L23/00; F16L23/16; F16L23/18; F16L23/22; H; H10; H10P; H10P72/00; H10P72/04; H10P72/0431; H10P72/0436; Y; Y10; Y10S; Y10S285/00; Y10S285/911
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
105 words
A heat-treating apparatus, comprising: a reaction vessel being adapted for performing a heat-treating for a workpiece to be treated and having a joint pipe portion; an outer pipe jointed to said joint pipe portion of said reaction vessel; and a sealing member disposed between said outer pipe and said joint pipe portion and adapted for tightly closing a passage defined inside said outer pipe and said joint pipe portion, wherein said sealing member having a relatively soft core member and a film disposed on the surface of said core member and harder than said core member, said film having heat resistance and a chemical resistance.
Claim 2
Dependent Claim
105 words
A heat-treating apparatus, comprising: a reaction vessel being adapted for performing a heat-treating for a workpiece to be treated and having a joint pipe portion; an outer pipe jointed to said joint pipe portion of said reaction vessel; and a sealing member disposed between said outer pipe and said joint pipe portion and adapted for tightly closing a passage defined inside said outer pipe and said joint pipe portion, wherein said sealing member having a relatively soft core member and a film disposed on the surface of said core member and harder than said core member, said film having heat resistance and a chemical resistance.
Claim 3
Dependent Claim
19 words
The heat-treating apparatus as set forth in claim 1, wherein said core member of said sealing member is hollow.
Claim 4
Dependent Claim
45 words
The heat-treating apparatus as set forth in claim 2, wherein said core member of said sealing member has a rectangular section, at least one of side portions of said core member abutting against said outer pipe and said joint pipe portion having a convex portion.
Claim 5
Dependent Claim
24 words
The heat-treating apparatus as set forth in claim 2, wherein said film of said sealing member covers the entire surface of said core member.
Claim 6
Dependent Claim
30 words
The heat-treating apparatus as set forth in claim 1, wherein said core member of said sealing member has a bracket-shaped section with one side open, said open side facing outward.
Claim 7
Dependent Claim
27 words
The heat-treating apparatus as set forth in claim 5, wherein said film of said sealing member covers portions other than said open side of said core member.
Claim 8
Dependent Claim
37 words
The heat-treating apparatus as set forth in claim 5, wherein said sealing member has a coil spring disposed in a space defined by said bracket-shaped section of said core member, said coil spring widening said open side.
Claim 9
Dependent Claim
21 words
The heat-treating apparatus as set forth in claim 1, wherein said core member of said sealing member has a ring-shaped section.
Claim 10
Dependent Claim
30 words
The heat-treating apparatus as set forth in claim 8, wherein said film of said sealing member covers portions other than the outer side of the surface of said core member.
Claim 11
Dependent Claim
41 words
The heat-treating apparatus as set forth in claim 1, wherein the HS hardness of said core member is approximately 32, and wherein the compression permanent distortion ratio of said core member at a temperature of 100° C. is 65% or less.
Claim 12
Dependent Claim
20 words
The heat-treating apparatus as set forth in claim 10, wherein said core member is made of an ethylene tetrafluoride resin.
Claim 13
Dependent Claim
21 words
The heat-treating apparatus as set forth in claim 1, wherein said film has a heat resistance of 150° to 250° C.
Claim 14
Dependent Claim
19 words
The heat-treating apparatus as set forth in claim 12, wherein said film is made of an ethylene tetrafluoride rubber.
Claim 15
Dependent Claim
31 words
The heat-treating apparatus as set forth in claim 1, wherein said core member is made of an ethylene tetrafluoride resin, and wherein said film is made of an ethylene tetrafluoride rubber.
Claim 16
Dependent Claim
23 words
The heat-treating apparatus as set forth in claim 1, wherein said outer pipe is connected to a pipe which supplies a corrosive gas.
Claim 17
Dependent Claim
23 words
The heat-treating apparatus as set forth in claim 1, wherein said sealing member is heated at a temperature of 100° to 250° C.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-10-24 | 1998-04-25 | 1998-10-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-10-24 | 2002-04-25 | 2002-10-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-10-24 | 2006-04-25 | 2006-10-25 | $7700.00 | Window Closed / Lapsed |