Patent US5358901A successfully refreshed from Google Patents.
US5358901A
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Process for forming an intermetallic layer
Assignee: NXP USA Inc
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Filing: 1993-03-01
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Granted: 1994-10-25
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Expires: 2013-03-01
Abstract
Abstract The present invention includes a process for forming an intermetallic layer and a device formed by the process. The process includes a reaction step where a metal-containing layer reacts with a metal-containing gas, wherein the metals of the layer and gas are different. In one embodiment of the present invention, titanium aluminide may be formed on the sides of an interconnect. The process may be performed in a variety of equipment, such as a furnace, a rapid thermal processor, a plasma etcher, and a sputter deposition machine. The reaction to form the intermetallic layer is typically performed while the substrate is at a temperature no more than 700 degrees Celsius.
Inventors
- 👤 Robert W. Fiordalice
- 👤 Stanley M. Filipiak
- 👤 Johnson O. Olowolafe
- 👤 Hisao Kawasaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 19:19
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/056; H10W20/032; H10W20/038; H10W20/039; H10P; H10P14/00; H10P14/40; H10P14/412; H10P95/00; H10W20/033; H10W20/035; H10W20/055; H10W20/064; H10W20/40; H10W20/41; H10W20/425; Y; Y10; Y10S; Y10S257/00; Y10S257/915
Claims Analysis
Total Claims: 46
Claim 1
Independent Claim
142 words
A process for forming an intermetallic layer over a semiconductor substrate comprising the steps of: forming a first layer over the substrate, wherein the first layer is a solid and includes a first metal that has first metal atoms; and reacting the first layer with a gas to form products including the intermetallic layer and a gaseous product, wherein: the gas includes a second metal that has second metal atoms, which are different from the first metal atoms; the intermetallic layer includes intermetallic molecules that include the first and second metals atoms; all of the first metal atoms in the intermetallic layer are supplied by the first layer and all of the second metal atoms in the intermetallic layer are supplied by the gas; and the substrate is at a temperature no higher than 700 degrees Celsius during the step of reacting.
Claim 2
Dependent Claim
142 words
A process for forming an intermetallic layer over a semiconductor substrate comprising the steps of: forming a first layer over the substrate, wherein the first layer is a solid and includes a first metal that has first metal atoms; and reacting the first layer with a gas to form products including the intermetallic layer and a gaseous product, wherein: the gas includes a second metal that has second metal atoms, which are different from the first metal atoms; the intermetallic layer includes intermetallic molecules that include the first and second metals atoms; all of the first metal atoms in the intermetallic layer are supplied by the first layer and all of the second metal atoms in the intermetallic layer are supplied by the gas; and the substrate is at a temperature no higher than 700 degrees Celsius during the step of reacting.
Claim 3
Dependent Claim
50 words
The process of claim 1, wherein: the step of reacting forms products consisting of the intermetallic layer and at least one other product; the other product is a gas during the step of reacting; the intermetallic layer is a solid; and the step of reacting occurs as a solid-gas reaction.
Claim 4
Dependent Claim
115 words
The process of claim 1, wherein: the first metal is aluminum and the first layer includes at least 95 percent aluminum; the intermetallic layer includes titanium aluminide and the second metal is titanium; the substrate is at a temperature no higher than 550 degrees Celsius during the step of reacting; the step of reacting is performed in a piece of equipment selected from a group consisting of a rapid thermal processor, a plasma etcher, and a sputter deposition machine; the step of reacting is performed at a pressure no higher than atmospheric pressure; and the gas includes a titanium source and a diluent selected from a group consisting of hydrogen, argon, nitrogen, helium, and chlorine.
Claim 5
Dependent Claim
72 words
The process of claim 3, wherein: the step of reacting is performed: in a rapid thermal processor; at a pressure less than 500 millitorr; while the substrate is at a temperature in a range of 300-450 degrees Celsius; and for a time between 30-60 seconds; the titanium source is titanium tetrachloride and comprises less than 25 percent of the gas; and the intermetallic layer has a thickness no thicker than 1000 angstroms.
Claim 6
Dependent Claim
82 words
A process for forming an intermetallic layer including titanium aluminide over a semiconductor substrate comprising the steps of: forming an aluminum-containing layer over the substrate, wherein the aluminum-containing layer is a solid; and reacting the aluminum-containing layer with a gas to form the intermetallic layer, wherein the gas includes a titanium source, and wherein all of the aluminum in the titanium aluminide is supplied by the aluminum-containing layer and all of the titanium in the titanium aluminide is supplied by the gas.
Claim 7
Dependent Claim
82 words
A process for forming an intermetallic layer including titanium aluminide over a semiconductor substrate comprising the steps of: forming an aluminum-containing layer over the substrate, wherein the aluminum-containing layer is a solid; and reacting the aluminum-containing layer with a gas to form the intermetallic layer, wherein the gas includes a titanium source, and wherein all of the aluminum in the titanium aluminide is supplied by the aluminum-containing layer and all of the titanium in the titanium aluminide is supplied by the gas.
Claim 8
Dependent Claim
35 words
The process of claim 5, wherein the step of reacting is performed in a piece of equipment selected from a group consisting of a rapid thermal processor, a plasma etcher, and a sputter deposition machine.
Claim 9
Dependent Claim
15 words
The process of claim 5, wherein the aluminum-containing layer includes at least 95 percent aluminum.
Claim 10
Dependent Claim
64 words
The process of claim 5, wherein: the step of reacting is performed at a temperature no higher than 550 degrees Celsius; the step of reacting is performed at a pressure no higher than atmospheric pressure; and the gas further includes a diluent selected from a group consisting of hydrogen, argon, nitrogen, helium, and chlorine; and the step of reacting occurs as a solid-gas reaction.
Claim 11
Dependent Claim
27 words
The process of claim 8, wherein the titanium source is a material selected from a group consisting of titanium tetrachloride, a titanium-halide compound, and an organotitanium compound.
Claim 12
Dependent Claim
74 words
The process of claim 9, wherein: the step of reacting is performed: in a rapid thermal processor; at a pressure no higher than 500 millitorr; while the substrate is at a temperature in a range of 300-450 degrees Celsius; and for a time between 30-60 seconds; the titanium source is titanium tetrachloride and comprises less than 25 volume percent of the gas; and the intermetallic layer has a thickness no thicker than 1000 angstroms.
Claim 13
Dependent Claim
169 words
A process for forming an intermetallic layer including titanium aluminide over a semiconductor substrate comprising the steps of: depositing an aluminum-containing layer over a first insulating layer, wherein: the aluminum-containing layer includes at least 95 weight percent aluminum and an impurity selected from a group consisting of silicon and copper; and the first insulating layer lies over the substrate; patterning the aluminum-containing layer to form an interconnect; reacting the interconnect with a gas to form the intermetallic layer, wherein: the ambient includes titanium tetrachloride and a diluent selected from a group consisting of hydrogen, argon, helium, and nitrogen; wherein all of the aluminum in the titanium aluminide is supplied by the aluminum-containing layer and all of the titanium in the titanium aluminide is supplied by the gas; the step of reacting is performed at a pressure no higher than about atmospheric pressure; the substrate is at a temperature no higher than 550 degrees Celsius during the step of reacting; and the step of reacting occurs as a solid-gas reaction.
Claim 14
Dependent Claim
169 words
A process for forming an intermetallic layer including titanium aluminide over a semiconductor substrate comprising the steps of: depositing an aluminum-containing layer over a first insulating layer, wherein: the aluminum-containing layer includes at least 95 weight percent aluminum and an impurity selected from a group consisting of silicon and copper; and the first insulating layer lies over the substrate; patterning the aluminum-containing layer to form an interconnect; reacting the interconnect with a gas to form the intermetallic layer, wherein: the ambient includes titanium tetrachloride and a diluent selected from a group consisting of hydrogen, argon, helium, and nitrogen; wherein all of the aluminum in the titanium aluminide is supplied by the aluminum-containing layer and all of the titanium in the titanium aluminide is supplied by the gas; the step of reacting is performed at a pressure no higher than about atmospheric pressure; the substrate is at a temperature no higher than 550 degrees Celsius during the step of reacting; and the step of reacting occurs as a solid-gas reaction.
Claim 15
Dependent Claim
71 words
The process of claim 11, wherein: the step of reacting is performed: in a rapid thermal processor; at a pressure no higher than 500 millitorr; while the substrate is at a temperature in a range of 300-450 degrees Celsius; and for a time between 30-60 seconds; the titanium tetrachloride comprises no more than 25 volume percent of the gas; and the intermetallic layer has a thickness no thicker than 1000 angstroms.
Claim 16
Dependent Claim
23 words
The process of claim 1, further comprising a step of patterning the first layer to form sides prior to the step of reacting.
Claim 17
Dependent Claim
81 words
The process of claim 1, further comprising a step of forming a patterned insulating layer over the layer including the first metal, wherein: the patterned insulating layer includes an opening; a portion of the layer including the first metal is exposed and underlies the opening; the step of forming the patterned insulating layer is performed prior to the step of reacting; and the step of reacting forms the intermetallic layer from the exposed portion of the layer including the first metal.
Claim 18
Dependent Claim
23 words
The process of claim 5, further comprising a step of patterning the aluminum-containing layer to form sides prior to the step of reacting.
Claim 19
Dependent Claim
73 words
The process of claim 5, further comprising a step of forming a patterned insulating layer over the aluminum-containing layer, wherein: the patterned insulating layer includes an opening; a portion of the aluminum-containing layer is exposed and underlies the opening; and the step of forming the patterned insulating layer is performed prior to the step of reacting; and the step of reacting forms the intermetallic layer from the exposed portion of the aluminum-containing layer.
Claim 20
Dependent Claim
151 words
A process for forming a titanium aluminide layer over a semiconductor substrate comprising the steps of: forming an aluminum-containing interconnect over the substrate, wherein the aluminum-containing interconnect includes at least 95 weight percent aluminum and an impurity selected from a group consisting of silicon and copper; forming a patterned insulating layer, wherein: the patterned insulating layer includes an opening; a portion of the aluminum-containing interconnect is exposed and underlies the opening; and reacting the exposed portion of the aluminum-containing interconnect with a gas to form the titanium aluminide layer, wherein: the ambient includes titanium tetrachloride and a diluent selected from a group consisting of hydrogen, argon, helium, and nitrogen; the step of reacting is performed at a pressure no higher than about atmospheric pressure; the substrate is at a temperature no higher than 550 degrees Celsius: during the step of reacting; and the step of reacting occurs as a solid-gas reaction.
Claim 21
Dependent Claim
151 words
A process for forming a titanium aluminide layer over a semiconductor substrate comprising the steps of: forming an aluminum-containing interconnect over the substrate, wherein the aluminum-containing interconnect includes at least 95 weight percent aluminum and an impurity selected from a group consisting of silicon and copper; forming a patterned insulating layer, wherein: the patterned insulating layer includes an opening; a portion of the aluminum-containing interconnect is exposed and underlies the opening; and reacting the exposed portion of the aluminum-containing interconnect with a gas to form the titanium aluminide layer, wherein: the ambient includes titanium tetrachloride and a diluent selected from a group consisting of hydrogen, argon, helium, and nitrogen; the step of reacting is performed at a pressure no higher than about atmospheric pressure; the substrate is at a temperature no higher than 550 degrees Celsius: during the step of reacting; and the step of reacting occurs as a solid-gas reaction.
Claim 22
Dependent Claim
72 words
The process of claim 17, wherein: the step of reacting is performed: in a rapid thermal processor; at a pressure no higher than 500 millitorr; while the substrate is at a temperature in a range of 300-450 degrees Celsius; and for a time between 30-60 seconds; the titanium tetrachloride comprises no more than 25 volume percent of the gas; and the titanium aluminide layer has a thickness no thicker than 1000 angstroms.
Claim 23
Dependent Claim
137 words
A process for forming an intermetallic layer over a semiconductor substrate comprising the steps of: forming a layer over the substrate, wherein the layer includes at least 95 percent aluminum; and reacting the layer with a gas at a pressure less than 500 millitorr in a rapid thermal processor for a time between 30-60 seconds to form products including the intermetallic layer and a gaseous product, wherein: the gas includes titanium tetrachloride and a diluent selected from a group consisting of hydrogen, argon, nitrogen, helium, and chlorine, wherein the titanium tetrachloride comprises less than 25 percent of the gas; the substrate is at a temperature is at a temperature in a range of 300-450 degrees Celsius during the step of reacting; and the intermetallic layer includes titanium aluminide and has a thickness no thicker than 1000 angstroms.
Claim 24
Dependent Claim
137 words
A process for forming an intermetallic layer over a semiconductor substrate comprising the steps of: forming a layer over the substrate, wherein the layer includes at least 95 percent aluminum; and reacting the layer with a gas at a pressure less than 500 millitorr in a rapid thermal processor for a time between 30-60 seconds to form products including the intermetallic layer and a gaseous product, wherein: the gas includes titanium tetrachloride and a diluent selected from a group consisting of hydrogen, argon, nitrogen, helium, and chlorine, wherein the titanium tetrachloride comprises less than 25 percent of the gas; the substrate is at a temperature is at a temperature in a range of 300-450 degrees Celsius during the step of reacting; and the intermetallic layer includes titanium aluminide and has a thickness no thicker than 1000 angstroms.
Claim 25
Dependent Claim
122 words
A process for forming an intermetallic layer including titanium aluminide over a semiconductor substrate comprising the steps of: forming an aluminum-containing layer over the substrate; and reacting the aluminum-containing layer with a gas at a pressure no higher than 500 millitorr in a rapid thermal processor for a time between 30-60 seconds to form the intermetallic layer having a thickness no thicker than 1000 angstroms, wherein: the gas includes titanium tetrachloride and a diluent selected from a group consisting of hydrogen, argon, nitrogen, helium, and chlorine, wherein the titanium tetrachloride comprises less than 25 volume percent of the gas; the substrate is at a temperature in a range of 300-450 degrees Celsius; and the step of reacting occurs as a solid-gas reaction.
Claim 26
Dependent Claim
122 words
A process for forming an intermetallic layer including titanium aluminide over a semiconductor substrate comprising the steps of: forming an aluminum-containing layer over the substrate; and reacting the aluminum-containing layer with a gas at a pressure no higher than 500 millitorr in a rapid thermal processor for a time between 30-60 seconds to form the intermetallic layer having a thickness no thicker than 1000 angstroms, wherein: the gas includes titanium tetrachloride and a diluent selected from a group consisting of hydrogen, argon, nitrogen, helium, and chlorine, wherein the titanium tetrachloride comprises less than 25 volume percent of the gas; the substrate is at a temperature in a range of 300-450 degrees Celsius; and the step of reacting occurs as a solid-gas reaction.
Claim 27
Dependent Claim
167 words
A process for forming an intermetallic layer including titanium aluminide over a semiconductor substrate comprising the steps of: depositing an aluminum-containing layer over a first insulating layer, wherein: the aluminum-containing layer includes at least 95 weight percent aluminum and an impurity selected from a group consisting of silicon and copper; and the first insulating layer lies over the substrate; patterning the aluminum-containing layer to form an interconnect; reacting the interconnect with a gas at a pressure no higher than 500 millitorr in a rapid thermal processor for a time between 30-60 seconds to form the intermetallic layer having a thickness no thicker than 1000 angstroms, wherein: the gas includes titanium tetrachloride and a diluent selected from a group consisting of hydrogen, argon, helium, and nitrogen, wherein the titanium tetrachloride comprises no more than 25 volume percent of the gas; the substrate is at a temperature in a range of 300-450 degrees Celsius during the step of reacting; and the step of reacting occurs as a solid-gas reaction.
Claim 28
Dependent Claim
167 words
A process for forming an intermetallic layer including titanium aluminide over a semiconductor substrate comprising the steps of: depositing an aluminum-containing layer over a first insulating layer, wherein: the aluminum-containing layer includes at least 95 weight percent aluminum and an impurity selected from a group consisting of silicon and copper; and the first insulating layer lies over the substrate; patterning the aluminum-containing layer to form an interconnect; reacting the interconnect with a gas at a pressure no higher than 500 millitorr in a rapid thermal processor for a time between 30-60 seconds to form the intermetallic layer having a thickness no thicker than 1000 angstroms, wherein: the gas includes titanium tetrachloride and a diluent selected from a group consisting of hydrogen, argon, helium, and nitrogen, wherein the titanium tetrachloride comprises no more than 25 volume percent of the gas; the substrate is at a temperature in a range of 300-450 degrees Celsius during the step of reacting; and the step of reacting occurs as a solid-gas reaction.
Claim 29
Dependent Claim
122 words
A process for forming an intermetallic layer over a semiconductor substrate comprising the steps of: forming a first layer over the substrate, wherein the first layer includes a first metal; forming a patterned insulating layer including an opening over the first layer prior to reacting the first layer to form the intermetallic layer, wherein a portion of the first layer is exposed and underlies the opening; and reacting the exposed portion of the first layer with a gas to form products including the intermetallic layer and a gaseous product, wherein the gas includes a second metal that is different from the first metal, and wherein the substrate is at a temperature no higher than 700 degrees Celsius during the step of reacting.
Claim 30
Dependent Claim
122 words
A process for forming an intermetallic layer over a semiconductor substrate comprising the steps of: forming a first layer over the substrate, wherein the first layer includes a first metal; forming a patterned insulating layer including an opening over the first layer prior to reacting the first layer to form the intermetallic layer, wherein a portion of the first layer is exposed and underlies the opening; and reacting the exposed portion of the first layer with a gas to form products including the intermetallic layer and a gaseous product, wherein the gas includes a second metal that is different from the first metal, and wherein the substrate is at a temperature no higher than 700 degrees Celsius during the step of reacting.
Claim 31
Dependent Claim
51 words
The process of claim 22, wherein: the step of reacting forms products consisting of the intermetallic layer and at least one other product; the other product is a gas during the step of reacting; the first and intermetallic layers are solids; and the step of reacting occurs as a solid-gas reaction.
Claim 32
Dependent Claim
114 words
The process of claim 22, wherein: the first metal is aluminum and the first layer includes at least 95 percent aluminum; the intermetallic layer includes titanium aluminide and the second metal is titanium; the substrate is at a temperature no higher than 550 degrees Celsius during the step of reacting; the step of reacting is performed in a piece of equipment selected from a group consisting of a furnace, a rapid thermal processor, a plasma etcher, and a sputter deposition machine. the step of reacting is performed at a pressure no higher than atmospheric pressure; and the gas further includes a diluent selected from a group consisting of hydrogen, argon, nitrogen, helium, and chlorine.
Claim 33
Dependent Claim
66 words
A process for forming an intermetallic layer including titanium aluminide over a semiconductor substrate comprising the steps of: forming an aluminum-containing layer over the substrate; and patterning the aluminum-containing layer to form sides prior reacting the aluminum-containing layer with a gas to form the intermetallic layer; and reacting the aluminum-containing layer with a gas to form the intermetallic layer, wherein the gas includes a titanium source.
Claim 34
Dependent Claim
66 words
A process for forming an intermetallic layer including titanium aluminide over a semiconductor substrate comprising the steps of: forming an aluminum-containing layer over the substrate; and patterning the aluminum-containing layer to form sides prior reacting the aluminum-containing layer with a gas to form the intermetallic layer; and reacting the aluminum-containing layer with a gas to form the intermetallic layer, wherein the gas includes a titanium source.
Claim 35
Dependent Claim
37 words
The process of claim 25, wherein the step of reacting is performed in a piece of equipment selected from a group consisting of a furnace, a rapid thermal processor, a plasma etcher, and a sputter deposition machine.
Claim 36
Dependent Claim
15 words
The process of claim 25, wherein the aluminum-containing layer includes at least 95 percent aluminum.
Claim 37
Dependent Claim
67 words
The process of claim 25, wherein: the step of reacting is performed at a temperature no higher than 550 degrees Celsius; the step of reacting is performed at a pressure no higher than atmospheric pressure; and the gas includes a titanium source and a diluent selected from a group consisting of hydrogen, argon, nitrogen, helium, and chlorine; and the step of reacting occurs as a solid-gas reaction.
Claim 38
Dependent Claim
27 words
The process of claim 28, wherein the titanium source is a material selected from a group consisting of titanium tetrachloride, a titanium-halide compound, and an organotitanium compound.
Claim 39
Dependent Claim
74 words
The process of claim 29, wherein: the step of reacting is performed: in a rapid thermal processor; at a pressure no higher than 500 millitorr; while the substrate is at a temperature in a range of 300-450 degrees Celsius; and for a time between 30-60 seconds; the titanium source is titanium tetrachloride and comprises less than 25 volume percent of the gas; and the intermetallic layer has a thickness no thicker than 1000 angstroms.
Claim 40
Dependent Claim
84 words
A process for forming an intermetallic layer including titanium aluminide over a semiconductor substrate comprising the steps of: forming an aluminum-containing layer over the substrate; forming a patterned insulating layer including an opening over the aluminum-containing layer prior to reacting the aluminum-containing layer to form the intermetallic layer, wherein a portion of the aluminum-containing layer is exposed and underlies the opening; and reacting the portion of the aluminum-containing layer with a gas to form the intermetallic layer, wherein the gas includes a titanium source.
Claim 41
Dependent Claim
84 words
A process for forming an intermetallic layer including titanium aluminide over a semiconductor substrate comprising the steps of: forming an aluminum-containing layer over the substrate; forming a patterned insulating layer including an opening over the aluminum-containing layer prior to reacting the aluminum-containing layer to form the intermetallic layer, wherein a portion of the aluminum-containing layer is exposed and underlies the opening; and reacting the portion of the aluminum-containing layer with a gas to form the intermetallic layer, wherein the gas includes a titanium source.
Claim 42
Dependent Claim
37 words
The process of claim 31, wherein the step of reacting is performed in a piece of equipment selected from a group consisting of a furnace, a rapid thermal processor, a plasma etcher, and a sputter deposition machine.
Claim 43
Dependent Claim
15 words
The process of claim 31, wherein the aluminum-containing layer includes at least 95 percent aluminum.
Claim 44
Dependent Claim
64 words
The process of claim 31, wherein: the step of reacting is performed at a temperature no higher than 550 degrees Celsius; the step of reacting is performed at a pressure no higher than atmospheric pressure; and the gas further includes a diluent selected from a group consisting of hydrogen, argon, nitrogen, helium, and chlorine; and the step of reacting occurs as a solid-gas reaction.
Claim 45
Dependent Claim
27 words
The process of claim 34, wherein the titanium source is a material selected from a group consisting of titanium tetrachloride, a titanium-halide compound, and an organotitanium compound.
Claim 46
Dependent Claim
74 words
The process of claim 35, wherein: the step of reacting is performed: in a rapid thermal processor; at a pressure no higher than 500 millitorr; while the substrate is at a temperature in a range of 300-450 degrees Celsius; and for a time between 30-60 seconds; the titanium source is titanium tetrachloride and comprises less than 25 volume percent of the gas; and the intermetallic layer has a thickness no thicker than 1000 angstroms.
References Cited (Backward Citations)
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