US5355568A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of making a surface acoustic wave device
Assignee: Seiko Epson Corp
•
Filing: 1993-11-29
•
Granted: 1994-10-18
•
Expires: 2013-11-29
Abstract
Abstract A surface acoustic wave device having a diamond layer, a piezoelectric layer and a comb-like electrode, in which the piezoelectric layer and the comb-like electrode are formed on a surface of the diamond layer, which surface has been contacted to a substrate used in the formation of the diamond layer by a vapor phase growth method, which device has high stability and can be produced economically.
Inventors
- 👤 Takahiro Imai
- 👤 Hideaki Nakahata
- 👤 Akihiro Hachigo
- 👤 Naoji Fujimori
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 14:35
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/02; H03H9/02535; H03H9/02543; H03H9/02582; H03H9/02614; H03H9/02622; Y; Y10; Y10T; Y10T29/00; Y10T29/42
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
53 words
A method for producing a surface acoustic wave device comprising the steps of: forming a diamond layer on a substrate by a vapor phase growth method, removing said substrate, and forming a piezoelectric layer and a comb-like electrode on a surface of said diamond layer that had been in contact with said substrate.
Claim 2
Independent Claim
53 words
A method for producing a surface acoustic wave device comprising the steps of: forming a diamond layer on a substrate by a vapor phase growth method, removing said substrate, and forming a piezoelectric layer and a comb-like electrode on a surface of said diamond layer that had been in contact with said substrate.
Claim 3
Independent Claim
70 words
A method for producing a surface acoustic wave device comprising the steps of: forming a diamond layer on a substrate by a vapor phase growth method, providing support means on a first surface of said grown diamond layer, removing said substrate, and forming a piezoelectric layer and a comb-like electrode on a second surface of said diamond layer that had been in contact with said substrate during said formation step.
Claim 4
Independent Claim
70 words
A method for producing a surface acoustic wave device comprising the steps of: forming a diamond layer on a substrate by a vapor phase growth method, providing support means on a first surface of said grown diamond layer, removing said substrate, and forming a piezoelectric layer and a comb-like electrode on a second surface of said diamond layer that had been in contact with said substrate during said formation step.
References Cited (Backward Citations)
US4025954A
Cited
JPS50154088A
Cited
JPS5891100A
Cited
JPS58110494A
Cited
JPS58135117A
Cited
JPS61251158A
Cited
JPS6420714A
Cited
JPS6462911A
Cited
US4817102A
Cited
US4978879A
Cited
US5061870A
Cited
US4952832A
Cited
US5160869A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-10-17 | 1998-04-18 | 1998-10-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-10-17 | 2002-04-18 | 2002-10-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-10-17 | 2006-04-18 | 2006-10-18 | $7700.00 | Window Closed / Lapsed |