Patent US5354516A successfully refreshed from Google Patents.
US5354516A
Expired / Lapsed
US
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Gas feeder
Assignee: Shin-Etsu Handotai Co Ltd
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Filing: 1993-03-12
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Granted: 1994-10-11
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Expires: 2013-03-12
Abstract
Abstract A gas feeder for feeding a gas is disclosed. The gas feeder comprises a bubbler holding a source liquid and passing a carrier gas through the liquid, a first sensor provided upstream of the bubbler, sensing the volumetric flow of the carrier gas and producing a carrier gas flow signal, a second sensor provided downstream of the bubbler, sensing the volumetric flow of the mixture and producing a gas mixture flow signal, a valve provided downstream of the bubbler and controlling the volumetric flow of the mixture, and a computer. The computer computes the concentration of the source gas from the carrier gas flow signal and the gas mixture flow signal and estimates the mass flow of the source gas from a product of the computed concentration of the source gas and the volumetric flow of the carrier gas. The computer controls the valve in response to a difference from a predetermined mass flow and the estimated mass flow of the source gas to fix the mass flow of the source gas fed to a destination to the predetermined mass flow. The gas feeder accurately feedback controls an actual mass flow of the source gas to the fixed value without a substantial delay and is applicable to a chemical vapor deposition of single crystal layer.
Inventors
- 👤 Munenori Tomita
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:08
CPC Classifications
G; G05; G05D; G05D7/00; G05D7/06; G05D7/0617; G05D7/0629; G05D7/0635; G05D11/00; G05D11/02; G05D11/13; G05D11/131
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
177 words
A gas feeder, comprising: a bubbler holding a source liquid and passing a carrier gas through the source liquid to bubble the source liquid to produce a gas mixture of the carrier gas and a source gas derived from the source liquid; a first sensor sensing the flow of the carrier gas; a second sensor sensing the flow of the gas mixture; a computer comprising means for computing the concentration of the source gas from the carrier gas flow and the gas mixture flow; said computer comprising means for producing a product of the computed concentration of the source gas and the flow of the carrier gas; said computer comprising means for computing the flow of the source gas from said product; said computer comprising means for producing a difference from a predetermined flow of the source gas and the computed flow of the source gas; and means for controlling the flow of the gas mixture in response to said difference to adjust the flow of the source gas fed to a destination to the predetermined flow.
Claim 2
Dependent Claim
177 words
A gas feeder, comprising: a bubbler holding a source liquid and passing a carrier gas through the source liquid to bubble the source liquid to produce a gas mixture of the carrier gas and a source gas derived from the source liquid; a first sensor sensing the flow of the carrier gas; a second sensor sensing the flow of the gas mixture; a computer comprising means for computing the concentration of the source gas from the carrier gas flow and the gas mixture flow; said computer comprising means for producing a product of the computed concentration of the source gas and the flow of the carrier gas; said computer comprising means for computing the flow of the source gas from said product; said computer comprising means for producing a difference from a predetermined flow of the source gas and the computed flow of the source gas; and means for controlling the flow of the gas mixture in response to said difference to adjust the flow of the source gas fed to a destination to the predetermined flow.
Claim 3
Dependent Claim
25 words
The gas feeder as recited in claim 1, wherein said means for controlling the flow of the gas mixture is provided downstream of said bubbler.
Claim 4
Dependent Claim
30 words
The gas feeder as recited in claim 1, wherein said means for controlling the flow of the gas mixture comprises a valve provided in the flow of the gas mixture.
Claim 5
Dependent Claim
69 words
The gas feeder as recited in claim 1, wherein the computer computes the concentration of the source gas of the gas mixture from a flow ratio, defined as a ratio of the flow of gas mixture to the flow of carrier gas, and from an empirical constant, by the following equation: R=A×log.sub.10 (flow ratio) wherein R is the concentration of the source gas and A is said empirical constant.
Claim 6
Dependent Claim
32 words
The gas feeder as recited in claim 4, wherein said empirical constant is determined based on at least one of a pressure, temperature, and volume of the source liquid in the bubbler.
Claim 7
Dependent Claim
235 words
A gas feeder, comprising: a bubbler holding a source liquid and passing a carrier gas through the source liquid to bubble the source liquid to produce a gas mixture of the carrier gas and a source gas derived from the source liquid; a first sensor provided upstream of said bubbler, said first sensor sensing the flow of the carrier gas and producing a carrier gas flow signal; a second sensor provided downstream of said bubbler, said second sensor sensing the flow of the gas mixture and producing a gas mixture flow signal; a computer comprising means for computing the concentration of the source gas from the carrier gas flow signal and the gas mixture flow signal; said computer comprising means for producing a product of the computed concentration of the source gas and the flow of the carrier gas from the carrier gas flow signal; said computer comprising means for computing the flow of the source gas from said product; said computer comprising means for producing a difference from a predetermined flow of the source gas and the computed flow of the source gas; said computer comprising means for producing a control signal in response to said difference; and means, provided downstream of said bubbler, for controlling the flow of the gas mixture in response to said control signal to adjust the flow of the source gas fed to a destination to the predetermined flow.
Claim 8
Dependent Claim
235 words
A gas feeder, comprising: a bubbler holding a source liquid and passing a carrier gas through the source liquid to bubble the source liquid to produce a gas mixture of the carrier gas and a source gas derived from the source liquid; a first sensor provided upstream of said bubbler, said first sensor sensing the flow of the carrier gas and producing a carrier gas flow signal; a second sensor provided downstream of said bubbler, said second sensor sensing the flow of the gas mixture and producing a gas mixture flow signal; a computer comprising means for computing the concentration of the source gas from the carrier gas flow signal and the gas mixture flow signal; said computer comprising means for producing a product of the computed concentration of the source gas and the flow of the carrier gas from the carrier gas flow signal; said computer comprising means for computing the flow of the source gas from said product; said computer comprising means for producing a difference from a predetermined flow of the source gas and the computed flow of the source gas; said computer comprising means for producing a control signal in response to said difference; and means, provided downstream of said bubbler, for controlling the flow of the gas mixture in response to said control signal to adjust the flow of the source gas fed to a destination to the predetermined flow.
Claim 9
Dependent Claim
30 words
The gas feeder as recited in claim 6, wherein said means for controlling the flow of the gas mixture comprises a valve provided in the flow of the gas mixture.
Claim 10
Dependent Claim
69 words
The gas feeder as recited in claim 6, wherein the computer computes the concentration of the source gas of the gas mixture from a flow ratio, defined as a ratio of the flow of gas mixture to the flow of carrier gas, and from an empirical constant, by the following equation: R=A×log.sub.10 (flow ratio) wherein R is the concentration of the source gas and A is said empirical constant.
Claim 11
Dependent Claim
32 words
The gas feeder as recited in claim 8, wherein said empirical constant is determined based on at least one of a pressure, temperature, and volume of the source liquid in the bubbler.
References Cited (Backward Citations)
US4276243A
Cited
US4436674A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-10-10 | 1998-04-11 | 1998-10-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-10-10 | 2002-04-11 | 2002-10-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-10-10 | 2006-04-11 | 2006-10-11 | $7700.00 | Window Closed / Lapsed |