US5354420A
Expired / Lapsed
US
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Method for laser-assisted etching of III-V and II-VI semiconductor compounds using chlorofluorocarbon ambients
Assignee: United States Department of the Navy
•
Filing: 1990-04-10
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Granted: 1994-10-11
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Expires: 2010-04-10
Abstract
Abstract An etching process allows a selective single-step patterning of III-V or II-VI semiconductor compound devices such as GaAs and InP or CdS and ZnSe in a noncorrosive environment. The etching relies on a maskless laser-assisted technique in a gaseous chlorofluorocarbon ambient, such as gaseous dichlorodifluoromethane and chloropentafluoroethane. Laser-assisted photothermal chemical etching reactions on the III-V or II-VI semiconductor compounds occur in these ambients when the incident fluence from an excimer laser at 248 nm exceeds the melt threshold. This provides a means for thin membrane formation in III-V or II-VI semiconductor compounds, rapid etches and processing of packaged devices or partially fabricated dies. The reduction in processing steps as compared to conventional wet chemical etches provides improvements in yield, reliability and cost.
Inventors
- 👤 Stephen D. Russell
- 👤 Douglas A. Sexton
- 👤 Richard J. Orazi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:14
CPC Classifications
B; B01; B01D; B01D53/00; B01D53/007; B01J; B01J19/00; B01J19/08; B01J19/12; B01J19/121; H; H10; H10F; H10F77/00; H10F77/70; H10F77/703; H10P; H10P50/00; H10P50/20; H10P50/24; H10P50/242; Y; Y02; Y02E; Y02E10/00; Y02E10/50
Claims Analysis
Total Claims: 50
Claim 1
Independent Claim
91 words
A method of performing a maskless laser-assisted etching of a III-V semiconductor compound sample such as InP or GaAs in a gaseous chlorofluorocarbon ambient comprising: placing said III-V semiconductor compound sample in contact with said gaseous chlorofluorocarbon ambient; directing radiant energy onto said III-V semiconductor compound sample within said gaseous chlorofluorocarbon ambient to create a melted portion of said III-V semiconductor compound where the radiant energy impinges; and etching away only said melted portion of said III-V semiconductor compound within said gaseous chlorofluorocarbon ambient which have said radiant energy impinging thereon.
Claim 2
Independent Claim
91 words
A method of performing a maskless laser-assisted etching of a III-V semiconductor compound sample such as InP or GaAs in a gaseous chlorofluorocarbon ambient comprising: placing said III-V semiconductor compound sample in contact with said gaseous chlorofluorocarbon ambient; directing radiant energy onto said III-V semiconductor compound sample within said gaseous chlorofluorocarbon ambient to create a melted portion of said III-V semiconductor compound where the radiant energy impinges; and etching away only said melted portion of said III-V semiconductor compound within said gaseous chlorofluorocarbon ambient which have said radiant energy impinging thereon.
Claim 3
Dependent Claim
20 words
A method according to claim 1 in which said radiant energy is a UV wavelength beam coming from a laser.
Claim 4
Dependent Claim
52 words
A method according to claim 2 in which said III-V semiconductor compound sample is placed within a processing chamber and said chlorofluorocarbon ambient is pressurized within predetermined limits and said UV wavelength beam is at predetermined rates and intensities to assure that said III-V semiconductor compound is melted but not ablated thereby.
Claim 5
Dependent Claim
28 words
A method according to claim 3 in which said UV wavelength beam is shaped, homogenized and adjusted in magnitude to obtain an optimal fluence impinging onto said silicon.
Claim 6
Dependent Claim
19 words
A method according to claim 4 in which the pressure of said ambient chlorofluorocarbon is greater than 150 torr.
Claim 7
Dependent Claim
30 words
A method according to claim 5 in which the pressure of said ambient chlorofluorocarbon is between 600 and 900 torr and the incident fluence is sufficient to melt the sample.
Claim 8
Dependent Claim
27 words
A method according to claim 1, 2, 3, 4, 5 or 6 in which said III-V semiconductor compound is InP and its related ternary and quaternary compound.
Claim 9
Dependent Claim
27 words
A method according to claim 1, 2, 3, 4, 5 or 6 in which said III-V semiconductor compound is GaAs and its related ternary and quaternary compounds.
Claim 10
Dependent Claim
13 words
A method according to claim 7 in which the chlorofluorocarbon ambient is chloropentafluoroethane.
Claim 11
Dependent Claim
13 words
A method according to claim 7 in which the chlorofluorocarbon ambient is dichlorodifluoromethane.
Claim 12
Dependent Claim
13 words
A method according to claim 8 in which the chlorofluorocarbon ambient is chloropentafluoroethane.
Claim 13
Dependent Claim
13 words
A method according to claim 8 in which the chlorofluorocarbon ambient is dichlorodifluoroemethane.
Claim 14
Independent Claim
146 words
A method of performing a maskless laser-assisted etchig of III-V semiconductor compound sample in a gaseous chlorofluorocarbon ambient contained in a chamber comprising: placing said III-V semiconductor compound sample in said chamber; flowing said gaseous chlorofluorocarbon ambient in said chamber to attain a pressure within a processing window; adsorbing of some of said gaseous chlorofluorocarbon ambient onto said III-V semiconductor compound sample; illuminating with radiant energy onto said III-V semiconductor compound sample within said gaseous chlorofluorocarbon ambient to melt said III-V semiconductor compound sample, but insufficient to cause ablation of said IIIV semiconductor compound sample where said radiant energy impinges; decomposing the adsorbed said some of said gaseous chlorofluorocarbon ambient to impart an etching reaction between the dissociated chlorofluorocarbon and the sample forming volatile by-products; and desorbing said volatile by-products to result in the removal of at least one layer of said III-V semiconductor compound sample.
Claim 15
Independent Claim
146 words
A method of performing a maskless laser-assisted etchig of III-V semiconductor compound sample in a gaseous chlorofluorocarbon ambient contained in a chamber comprising: placing said III-V semiconductor compound sample in said chamber; flowing said gaseous chlorofluorocarbon ambient in said chamber to attain a pressure within a processing window; adsorbing of some of said gaseous chlorofluorocarbon ambient onto said III-V semiconductor compound sample; illuminating with radiant energy onto said III-V semiconductor compound sample within said gaseous chlorofluorocarbon ambient to melt said III-V semiconductor compound sample, but insufficient to cause ablation of said IIIV semiconductor compound sample where said radiant energy impinges; decomposing the adsorbed said some of said gaseous chlorofluorocarbon ambient to impart an etching reaction between the dissociated chlorofluorocarbon and the sample forming volatile by-products; and desorbing said volatile by-products to result in the removal of at least one layer of said III-V semiconductor compound sample.
Claim 16
Dependent Claim
33 words
A method according to claim 13 further including: repeating the steps of adsorbing, illuminating decomposing and desorbing until the desired removal of III-V semiconductor compound from said III-V semiconductor compound sample is attained.
Claim 17
Dependent Claim
25 words
A method according to claim 14 further including: purging said chamber and removing said III-V semiconductor compound sample after said desired removal has been attained.
Claim 18
Dependent Claim
20 words
A method according to claim 15 in which said radiant energy is a UV wavelength beam coming from a laser.
Claim 19
Dependent Claim
49 words
A method according to claim 16 in which said chlorofluorocarbon ambient is pressurized within predetermined limits and said sample is at a predetermined temperature and said UV wavelength beam is at predetermined rates and intensities to assure that said III-V semiconductor compound sample is melted but not ablated thereby.
Claim 20
Dependent Claim
30 words
A method according to claim 17 in which said UV wavelength beam is shaped, homogenized and adjusted in magnitude to obtain an optimal fluence impinging onto said III-V semiconductor compound.
Claim 21
Dependent Claim
19 words
A method according to claim 18 in which the pressure of said ambient chlorofluorocarbon is greater than 150 torr.
Claim 22
Independent Claim
146 words
A method of performing a maskless laser-assisted etching of II-VI semiconductor compound sample in a gaseous chlorofluorocarbon ambient contained in a chamber comprising: placing said II-VI semiconductor compound sample in said chamber; flowing said gaseous chlorofluorocarbon ambient in said chamber to attain a pressure within a processing window; adsorbing of some of said gaseous chlorofluorocarbon ambient onto said II-VI semiconductor compound sample; illuminating with radiant energy onto said II-VI semiconductor compound sample within said gaseous chlorofluorocarbon ambient to melt said II-VI semiconductor compound sample, but insufficient to cause ablation of said II-VI semiconductor compound sample where said radiant energy impinges; decomposing the adsorbed said some of said gaseous chlorofluorocarbon ambient to impart an etching reaction between the dissociated chlorofluorocarbon and the sample forming volatile by-products; and desorbing said volatile by-products to result in the removal of at least one layer of said II-VI semiconductor compound sample.
Claim 23
Independent Claim
146 words
A method of performing a maskless laser-assisted etching of II-VI semiconductor compound sample in a gaseous chlorofluorocarbon ambient contained in a chamber comprising: placing said II-VI semiconductor compound sample in said chamber; flowing said gaseous chlorofluorocarbon ambient in said chamber to attain a pressure within a processing window; adsorbing of some of said gaseous chlorofluorocarbon ambient onto said II-VI semiconductor compound sample; illuminating with radiant energy onto said II-VI semiconductor compound sample within said gaseous chlorofluorocarbon ambient to melt said II-VI semiconductor compound sample, but insufficient to cause ablation of said II-VI semiconductor compound sample where said radiant energy impinges; decomposing the adsorbed said some of said gaseous chlorofluorocarbon ambient to impart an etching reaction between the dissociated chlorofluorocarbon and the sample forming volatile by-products; and desorbing said volatile by-products to result in the removal of at least one layer of said II-VI semiconductor compound sample.
Claim 24
Dependent Claim
33 words
A method according to claim 20 further including: repeating the steps of adsorbing, illuminating, decomposing and desorbing until the desired removal of II-VI semiconductor compound from said II-VI semiconductor compound sample is attained.
Claim 25
Dependent Claim
25 words
A method according to claim 21 further including: purging said chamber and removing said II-VI semiconductor compound sample after said desired removal has been attained.
Claim 26
Dependent Claim
20 words
A method according to claim 22 in which said radiant energy is a UV wavelength beam coming from a laser.
Claim 27
Dependent Claim
49 words
A method according to claim 23 in which said chlorofluorocarbon ambient is pressurized within predetermined limits and said sample is at a predetermined temperature and said UV wavelength beam is at predetermined rates and intensities to assure that said II-VI semiconductor compound sample is melted but not ablated thereby.
Claim 28
Dependent Claim
30 words
A method according to claim 24 in which said UV wavelength beam is shaped, homogenized and adjusted in magnitude to obtain an optimal fluence impinging onto said II-VI semiconductor compound.
Claim 29
Independent Claim
146 words
A method of performing a maskless laser-assisted etching of III-V semiconductor compound sample in a gaseous chlorofluorocarbon ambient contained in a chamber comprising: placing said III-V Semiconductor compound sample in said chamber; flowing said gaseous chlorofluorocarbon ambient in said chamber to attain a pressure within a processing window; adsorbing of some of said gaseous chlorofluorocarbon ambient onto said III-V semiconductor compound sample; illuminating with radiant energy onto said III-V semiconductor compound sample within said gaseous chlorofluorocarbon ambient to melt said III-V semiconductor compound sample, but insufficient to cause ablation of said IIIV semiconductor compound sample where said radiant energy impinges; decomposing the adsorbed said some of said gaseous chlorofluorocarbon ambient to impart an etching reaction between the dissociated chlorofluorocarbon and the sample forming volatile by-products; and desorbing said volatile by-products to result in the removal of at least one layer of said III-V semiconductor compound sample.
Claim 30
Independent Claim
146 words
A method of performing a maskless laser-assisted etching of III-V semiconductor compound sample in a gaseous chlorofluorocarbon ambient contained in a chamber comprising: placing said III-V Semiconductor compound sample in said chamber; flowing said gaseous chlorofluorocarbon ambient in said chamber to attain a pressure within a processing window; adsorbing of some of said gaseous chlorofluorocarbon ambient onto said III-V semiconductor compound sample; illuminating with radiant energy onto said III-V semiconductor compound sample within said gaseous chlorofluorocarbon ambient to melt said III-V semiconductor compound sample, but insufficient to cause ablation of said IIIV semiconductor compound sample where said radiant energy impinges; decomposing the adsorbed said some of said gaseous chlorofluorocarbon ambient to impart an etching reaction between the dissociated chlorofluorocarbon and the sample forming volatile by-products; and desorbing said volatile by-products to result in the removal of at least one layer of said III-V semiconductor compound sample.
Claim 31
Dependent Claim
33 words
A method according to claim 26 further including: repeating the steps of adsorbing, illuminating, decomposing and desorbing until the desired removal of III-V semiconductor compound from said III-V semiconductor compound sample is attained.
Claim 32
Dependent Claim
25 words
A method according to claim 27 further including: purging said chamber and removing said III-V semiconductor compound sample after said desired removal has been attained.
Claim 33
Dependent Claim
20 words
A method according to claim 28 in which said radiant energy is a UV wavelength beam coming from a laser.
Claim 34
Dependent Claim
49 words
A method according to claim 29 in which said chlorofluorocarbon ambient is pressurized within predetermined limits and said sample is at a predetermined temperature and said UV wavelength beam is at predetermined rates and intensities to assure that said III-V semiconductor compound sample is melted but not ablated thereby.
Claim 35
Dependent Claim
30 words
A method according to claim 30 in which said UV wavelength beam is shaped, homogenized and adjusted in magnitude to obtain an optimal fluence impinging onto said III-V semiconductor compound.
Claim 36
Dependent Claim
19 words
A method according to claim 31 in which the pressure of said ambient chlorofluorocarbon is greater than 150 torr.
Claim 37
Independent Claim
91 words
A method of performing a maskless laser-assisted etching of a II-VI semiconductor compound sample such as CdS or ZnSe in a gaseous chlorofluorocarbon ambient comprising: placing said II-VI semiconductor compound sample in contact with said gaseous chlorofluorocarbon ambient; directing radiant energy onto said II-VI semiconductor compound sample within said gaseous chlorofluorocarbon ambient to create a melted portion of said II-VI semiconductor compound where the radiant energy impinges; and etching away only said melted portion of said II-VI semiconductor compound within said gaseous chlorofluorocarbon ambient which have said radiant energy impinging thereon.
Claim 38
Independent Claim
91 words
A method of performing a maskless laser-assisted etching of a II-VI semiconductor compound sample such as CdS or ZnSe in a gaseous chlorofluorocarbon ambient comprising: placing said II-VI semiconductor compound sample in contact with said gaseous chlorofluorocarbon ambient; directing radiant energy onto said II-VI semiconductor compound sample within said gaseous chlorofluorocarbon ambient to create a melted portion of said II-VI semiconductor compound where the radiant energy impinges; and etching away only said melted portion of said II-VI semiconductor compound within said gaseous chlorofluorocarbon ambient which have said radiant energy impinging thereon.
Claim 39
Dependent Claim
20 words
A method according to claim 33 in which said radiant energy is a UV wavelength beam coming from a laser.
Claim 40
Dependent Claim
52 words
A method according to claim 34 in which said II-VI semiconductor compound sample is placed within a processing chamber and said chlorofluorocarbon ambient is pressurized within predetermined limits and said UV wavelength beam is at predetermined rates and intensities to assure that said II-VI semiconductor compound is melted but not ablated thereby.
Claim 41
Dependent Claim
28 words
A method according to claim 35 in which said UV wavelength beam is shaped, homogenized and adjusted in magnitude to obtain an optimal fluence impinging onto said silicon.
Claim 42
Dependent Claim
19 words
A method according to claim 36 in which the pressure of said ambient chlorofluorocarbon is greater than 150 torr.
Claim 43
Dependent Claim
34 words
A method according to claim 37 in which the pressure of said ambient chlorofluorocarbon is between 600 and 900 torr and the incident fluence of said UV wavelength beam sufficient to melt the sample.
Claim 44
Dependent Claim
26 words
A method according to claim 33, 34, 35, 36, 37 or 38 in which said II-VI semiconductor compound is CdS and related ternary and quaternary compounds.
Claim 45
Dependent Claim
26 words
A method according to claim 33, 34, 35, 36, 37 or 38 in which said II-VI semiconductor compound is ZnSe and related ternary and quaternary compounds.
Claim 46
Dependent Claim
13 words
A method according to claim 39 in which the chlorofluorocarbon ambient is chloropentafluoroethane.
Claim 47
Dependent Claim
13 words
A method according to claim 39 in which the chlorofluorocarbon ambient is dichlorodifluoromethane.
Claim 48
Dependent Claim
13 words
A method according to claim 40 in which the chlorofluorocarbon ambient is chloropentafluoroethane.
Claim 49
Dependent Claim
13 words
A method according to claim 40 in which the chlorofluorocarbon ambient is dichlorodifluoromethane.
Claim 50
Dependent Claim
19 words
A method according to claim 25 in which the pressure of said ambient chlorofluorocarbon is greater than 150 torr.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-10-10 | 1998-04-11 | 1998-10-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-10-10 | 2002-04-11 | 2002-10-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-10-10 | 2006-04-11 | 2006-10-11 | $7700.00 | Window Closed / Lapsed |