Abstract According to the invention, a probe for an atomic force microscope comprising a means for tunneling current is disclosed. The probe has a metal tip which is covered with a monomolecular film. The body of the probe is covered with a monomolecular laminated film, wherein conductive molecules are fixed on the the monomolecular film and/or the said monomolecular laminated film. The monomolecular laminated film has a crosslinked electroconductive surface. The monomolecular laminated film is fixed on the metal by a covalent bond comprising a siloxane base (--SiO--), and the laminated part of the molecule is also chemically fixed on the metal surface of a covalent bond comprising a siloxane base (--SiO--). The probe of this invention is durable and can be put to practical use, because the films are surface conductive rather than conductive through its thickness. Moreover, compared with a conventional probe, since this probe does not metal deposited on the surface, it has high reproductibility with less process step to manufacture the probe.
A probe for an atomic force microscope comprising a tunneling current measuring means having a probe body having a metal tip covered with a monomolecular film, wherein the probe body is covered with a monomolecular laminated film and conductive molecules are fixed on the monomolecular film and/or the monomolecular laminated film, and wherein the monomolecular film is fixed on the metal tip by covalent bonds comprising siloxane (--SiO--) groups, and the monomolecular laminated film is chemically fixed on the metal tip by covalent bonds comprising siloxane (--SiO--) groups.
Claim 2
Dependent Claim
88 words
A probe for an atomic force microscope comprising a tunneling current measuring means having a probe body having a metal tip covered with a monomolecular film, wherein the probe body is covered with a monomolecular laminated film and conductive molecules are fixed on the monomolecular film and/or the monomolecular laminated film, and wherein the monomolecular film is fixed on the metal tip by covalent bonds comprising siloxane (--SiO--) groups, and the monomolecular laminated film is chemically fixed on the metal tip by covalent bonds comprising siloxane (--SiO--) groups.
Claim 3
Dependent Claim
16 words
The probe according to claim 1, wherein said metal tip is tungsten wire or platinum wire.
Claim 4
Dependent Claim
18 words
The probe according to claim 1, wherein said monomolecular laminated film is formed as a chemically adsorbed film.
Claim 5
Dependent Claim
23 words
The probe according to claim 1, wherein said monomolecular laminated film has a polymer side chain of high orientation at the molecular level.
Claim 6
Dependent Claim
20 words
The probe according to claim 1, wherein said monomolecular film and said monomolecular laminated film has a crosslinked electroconductive surface.
Claim 7
Dependent Claim
17 words
The probe according to claim 5, wherein said monomolecular film and said crosslinked electroconductive surface is polythiophene.
Claim 8
Dependent Claim
19 words
The probe according to claim 1, wherein said monomolecular film and said monomolecular laminated film has a fluorocarbon group.