US5352912A
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Graded bandgap single-crystal emitter heterojunction bipolar transistor
Assignee: GlobalFoundries Inc
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Filing: 1991-11-13
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Granted: 1994-10-04
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Expires: 2011-11-13
Abstract
Abstract A heterojunction bipolar transistor having a single-crystal emitter with reduced charge storage and acceptable current gain is described herein. The heterojunction transistor comprises a collector region, a base region formed on the collector region, and a single-crystal emitter region grown on the base region by low temperature epitaxy. During the formation of the base region, a graded profile of 5-23% germanium is added to the base, as the distance to the collector region decreases, thereby decreasing the base bandgap as it approaches the collector region. Further, during the formation of the emitter region, a graded profile of 0-20% germanium is added to the emitter as the distance from the emitter-base junction increases. Thus, the emitter bandgap decreases as it moves farther from the emitter-base junction. The result of the above grading profiles is that the emitter bandgap is narrower at the emitter contact than the base bandgap at the emitter-base junction.
Inventors
- 👤 Emmanuel F. Crabbe
- 👤 David L. Harame
- 👤 Bernard S. Meyerson
- 👤 Gary Patton
- 👤 Johannes M. C. Stork
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 04:54
CPC Classifications
H; H10; H10D; H10D10/00; H10D10/80; H10D10/821; H10D10/891; Y; Y10; Y10S; Y10S438/00; Y10S438/936
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
135 words
A heterojunction transistor comprising: a first region of a first conductivity type; a second region of a second conductivity type formed on said first region; a third region of said first conductivity type formed on said second region, said third region having a bandgap which progressively decreases as the distance from said second region increases, said bandgap being narrower at all points within said third region than at a junction between said second and third regions; wherein said first conductivity type is N-type and said second conductivity type is P-type; and wherein said first region is a collector region, said second region is a base region and said third region is an emitter region and wherein said emitter region contains a field-free region of silicon remote from a junction between said second and third regions.
Claim 2
Dependent Claim
135 words
A heterojunction transistor comprising: a first region of a first conductivity type; a second region of a second conductivity type formed on said first region; a third region of said first conductivity type formed on said second region, said third region having a bandgap which progressively decreases as the distance from said second region increases, said bandgap being narrower at all points within said third region than at a junction between said second and third regions; wherein said first conductivity type is N-type and said second conductivity type is P-type; and wherein said first region is a collector region, said second region is a base region and said third region is an emitter region and wherein said emitter region contains a field-free region of silicon remote from a junction between said second and third regions.
Claim 3
Dependent Claim
32 words
The heterojunction transistor of claim 1, wherein an increasing amount of germanium is added to said field-free emitter region so that said bandgap decreases as the distance from said second region increases.
Claim 4
Dependent Claim
17 words
The heterojunction transistor of claim 2, wherein the amount of said germanium increases from 0% to 20%.
Claim 5
Dependent Claim
84 words
A heterojunction bipolar transistor comprising: a first region of n-doped silicon or silicon-germanium; a second region of p-doped silicon or silicon-germanium formed on said first region, said second region having a first bandgap; and a third region of n-doped silicon or silicon-germanium formed on said second region, said second region and said third region defining a junction, said third region having a contact formed thereon and a second bandgap, said second bandgap being narrower at said contact than said first bandgap at said junction.
Claim 6
Dependent Claim
84 words
A heterojunction bipolar transistor comprising: a first region of n-doped silicon or silicon-germanium; a second region of p-doped silicon or silicon-germanium formed on said first region, said second region having a first bandgap; and a third region of n-doped silicon or silicon-germanium formed on said second region, said second region and said third region defining a junction, said third region having a contact formed thereon and a second bandgap, said second bandgap being narrower at said contact than said first bandgap at said junction.
Claim 7
Dependent Claim
52 words
The heterojunction transistor of claim 4, wherein said first region is a collector region, said second region is a base region and said third region is an emitter region and wherein said emitter region contains a field-free region of silicon or silicon-germanium remote from a junction between said second and third regions.
Claim 8
Dependent Claim
12 words
The heterojunction transistor of claim 5, wherein said second bandgap is graded.
Claim 9
Dependent Claim
33 words
The heterojunction transistor of claim 6, wherein an increasing amount of germanium is added to said field-free emitter region in order to decrease said second bandgap as the distance to said contact decreases.
Claim 10
Dependent Claim
17 words
The heterojunction transistor of claim 7, wherein the amount of said germanium increases from 0% to 20%.
Claim 11
Dependent Claim
12 words
The heterojunction transistor of claim 8, wherein said first bandgap is graded.
Claim 12
Dependent Claim
32 words
The heterojunction transistor of claim 9, wherein an increasing amount of germanium is added to said second region such that said first bandgap decreases as the distance to said first region decreases.
Claim 13
Dependent Claim
19 words
The heterojunction transistor of claim 10, wherein the amount of said germanium increases from 5% germanium to 23% germanium.
Claim 14
Dependent Claim
17 words
The heterojunction transistor of claim 11, wherein said third region has a thickness greater than 300 Angstroms.
Claim 15
Dependent Claim
123 words
In a method of fabricating a bipolar transistor having a single-crystal emitter region including an emitter contact, a base region, and a collector region, the improvement comprising: the step of grading a bandgap in said emitter region such that said bandgap decreases as the distance to said emitter contact decreases, whereby charge storage in said emitter region is reduced, said bandgap being narrower at all points within said emitter region than at a junction between said base and emitter regions; and wherein said grading step includes adding an increasing amount of germanium to said emitter region as the distance to said emitter contact decreases; and wherein the amount of said germanium increases from 0% to 20% as the distance to said contact decreases.
Claim 16
Dependent Claim
123 words
In a method of fabricating a bipolar transistor having a single-crystal emitter region including an emitter contact, a base region, and a collector region, the improvement comprising: the step of grading a bandgap in said emitter region such that said bandgap decreases as the distance to said emitter contact decreases, whereby charge storage in said emitter region is reduced, said bandgap being narrower at all points within said emitter region than at a junction between said base and emitter regions; and wherein said grading step includes adding an increasing amount of germanium to said emitter region as the distance to said emitter contact decreases; and wherein the amount of said germanium increases from 0% to 20% as the distance to said contact decreases.
Claim 17
Dependent Claim
97 words
A heterojunction transistor, comprising: a first region of a first conductivity type; a second region of a second conductivity type formed on said first region; a third region of said first conductivity type formed on said second region, said third region having a bandgap which decreases as the distance from said second region increases, said bandgap being narrower at all points within said third region than at a junction between said second and third regions, and said second and third regions having a bandgap discontinuity substantially proximate to said junction of between about 0 to 0.04 eV.
Claim 18
Dependent Claim
97 words
A heterojunction transistor, comprising: a first region of a first conductivity type; a second region of a second conductivity type formed on said first region; a third region of said first conductivity type formed on said second region, said third region having a bandgap which decreases as the distance from said second region increases, said bandgap being narrower at all points within said third region than at a junction between said second and third regions, and said second and third regions having a bandgap discontinuity substantially proximate to said junction of between about 0 to 0.04 eV.
Claim 19
Dependent Claim
20 words
The heterojunction transistor of claim 14, wherein said first conductivity type is N-type and said second conductivity type is P-type.
Claim 20
Dependent Claim
102 words
In a method of fabricating a bipolar transistor having a single-crystal emitter region including an emitter contact, a base region, and a collector region, the improvement comprising the step of grading a bandgap in said emitter region such that said bandgap decreases as the distance to said emitter contact decreases, whereby charge storage in said emitter region is reduced, said bandgap being narrower at all points within said emitter region than at a junction between said base and emitter regions, and said emitter and base regions having a bandgap discontinuity substantially proximate to said junction of between about 0 to 0.04 eV.
Claim 21
Dependent Claim
102 words
In a method of fabricating a bipolar transistor having a single-crystal emitter region including an emitter contact, a base region, and a collector region, the improvement comprising the step of grading a bandgap in said emitter region such that said bandgap decreases as the distance to said emitter contact decreases, whereby charge storage in said emitter region is reduced, said bandgap being narrower at all points within said emitter region than at a junction between said base and emitter regions, and said emitter and base regions having a bandgap discontinuity substantially proximate to said junction of between about 0 to 0.04 eV.
Claim 22
Dependent Claim
28 words
The method of claim 16 wherein said grading step includes adding an increasing amount of germanium to said emitter region as the distance to said emitter contact decreases.
Claim 23
Dependent Claim
23 words
The method of claim 17 wherein the amount of said germanium increases from 0% to 20% as the distance to said contact decreases.
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