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US5352902A
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Method for controlling plasma surface-treatments with a plurality of photodetectors and optical filters
Assignee: Tokyo Electron Ltd
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Filing: 1993-07-02
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Granted: 1994-10-04
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Expires: 2013-07-02
Abstract
Abstract In conducting a plurality of kinds of surface-treatments on objects to be treated, concentration of produced gases in exhaust gas discharged from a reaction vessel are detected, and data of the detected concentrations are compared with reference data stored in a control unit to continuously control and process the respective surface-treatments. As a result, processing control can be performed suitably for the respective kinds of surface-treatments, and different kinds of surface-treatments can be continuously conducted by one and the same surface-treatment device.
Inventors
- 👤 Kazutsugu Aoki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:03
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32917; H01J37/32935; H01J37/32981; C; C23; C23C; C23C16/00; C23C16/44; C23C16/4412; C23C16/52; H01J37/32431; H01J37/32798; H01J37/32816; H01J37/32834; H01J37/3299; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/334; H01J2237/3342
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
147 words
A method for controlling a plurality of kinds of plasma surface-treatments in which a plurality of kinds of surface-treatments are continuously conducted on objects to be treated in a reaction vessel with plasma discharges, said method comprising the steps of: optically detecting, in a first one of the surface-treatments, a concentration of a produced gas generated in the first surface-treatment, which is contained in exhaust discharged from the reaction vessel; comparing data of the detected concentration of the produced gas with preset reference data of the first surface-treatment to control the first surface-treatment; optically detecting, in a second one of the surface-treatments, a concentration of a produced gas generated in the second surface-treatment, which is contained in exhaust discharged from the reaction vessel; and comparing data of the detected concentration of the produced gas with preset reference data of the second surface-treatment to control the second surface-treatment.
Claim 2
Independent Claim
147 words
A method for controlling a plurality of kinds of plasma surface-treatments in which a plurality of kinds of surface-treatments are continuously conducted on objects to be treated in a reaction vessel with plasma discharges, said method comprising the steps of: optically detecting, in a first one of the surface-treatments, a concentration of a produced gas generated in the first surface-treatment, which is contained in exhaust discharged from the reaction vessel; comparing data of the detected concentration of the produced gas with preset reference data of the first surface-treatment to control the first surface-treatment; optically detecting, in a second one of the surface-treatments, a concentration of a produced gas generated in the second surface-treatment, which is contained in exhaust discharged from the reaction vessel; and comparing data of the detected concentration of the produced gas with preset reference data of the second surface-treatment to control the second surface-treatment.
Claim 3
Dependent Claim
41 words
The method for controlling a plurality of kinds of plasma surface-treatments according to claim 1, wherein said preset reference data for the first and the second surface-treatments are endpoint data at endpoints of the first surface-treatment and of the second surface-treatment.
Claim 4
Dependent Claim
51 words
The method for controlling a plurality of kinds of plasma surface-treatments according to claim 1, wherein when the concentrations of the produced gases generated in the respective surface-treatments are optically detected, light is applied from a light source to exhaust gas discharged from an exhaust pipe connected to the reaction vessel.
Claim 5
Dependent Claim
200 words
The method for controlling a plurality of kinds of plasma surface-treatments according to claim 1, wherein when the concentrations of the produced gases generated in the respective surface-treatments are optically detected, said method further comprising the steps of: passing only a set-wavelength component of light applied from a light source, which is absorbed by the produced gas in the exhaust gas generated in the first surface-treatment of said plurality of kinds of surface-treatments, by means of a first detection filter; passing only a set-wavelength component of light applied from a light source, which is absorbed by the produced gas in the exhaust gas generated in the second surface-treatment of said plurality of kinds of surface-treatments, by means of a second detection filter; passing all wavelengths of the light applied from the light source by means of a reference detection filter; detecting the components which have passed the first and the second filters and the reference filter by their associated photodetectors, and outputting them in electric signals; computing detection data based on the electric signals outputted from the respective photodetectors; and comparing the respective detection data with the respective preset reference data for the respective surface-treatments to control the respective surface-treatments.
Claim 6
Dependent Claim
66 words
The method for controlling a plurality of kinds of plasma surface-treatments according to claim 1, wherein when the respective surface-treatments are controlled, the preset reference data for the respective surface-treatments are endpoint data of the respective surface-treatments at endpoints, said method further comprising the steps of: comparing the endpoint data and the detected concentration data by the control unit to control ends of the respective surface-treatments.
Claim 7
Dependent Claim
21 words
The method for controlling a plurality of kinds of plasma surface-treatments according to claim 1, wherein said first surface-treatment is etching.
Claim 8
Dependent Claim
21 words
The method for controlling a plurality of kinds of plasma surface-treatments according to claim 1, wherein said second surface-treatment is ashing.
Claim 9
Dependent Claim
25 words
The method for controlling a plurality of kinds of plasma surface-treatments according to claim 1, wherein said first and said second surface-treatments are batch processing.
Claim 10
Dependent Claim
27 words
The method for controlling a plurality of kinds of plasma surface-treatments according to claim 1, wherein said first and said second surface-treatments are conducted in a vacuum.
Claim 11
Dependent Claim
27 words
The method for controlling a plurality of kinds of plasma surface-treatments according to claim 1, wherein said first and said second surface-treatments are conducted in an atmosphere.
Claim 12
Dependent Claim
24 words
The method for controlling a plurality of kinds of plasma surface-treatments according to claim 1, wherein said objects to be treated are silicon wafers.
Claim 13
Dependent Claim
23 words
The method for controlling a plurality of kinds of plasma surface-treatments according to claim 1, wherein said objects to be treated are LCDs.
Claim 14
Dependent Claim
31 words
The method for controlling a plurality of kinds of plasma surface-treatments according to claim 1, wherein a mixed gas of fleon gas and oxygen gas is used in the plasma surface-treatments.
Claim 15
Dependent Claim
25 words
The method for controlling a plurality of kinds of plasma surface-treatments according to claim 1, wherein said light from the light source is infrared radiation.
Claim 16
Dependent Claim
69 words
The method for controlling a plurality of kinds of plasma surface-treatments according to claim 1, wherein said first detection filter and said second detection filter are switched from each other by a switching unit in accordance with a kind of the surface-treatments; and only the set-wavelength component associated with the surface-treatment of the kind, which is admitted through the operatively switched detection filter is detected by the associated photodetector.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-10-03 | 1998-04-04 | 1998-10-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-10-03 | 2002-04-04 | 2002-10-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-10-03 | 2006-04-04 | 2006-10-04 | $7700.00 | Window Closed / Lapsed |