US5345085A
Expired / Lapsed
US
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Method and structure for electronically measuring beam parameters
Assignee: Applied Materials Inc
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Filing: 1993-03-26
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Granted: 1994-09-06
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Expires: 2013-03-26
Abstract
Abstract A method of electronically measuring parameters of an beam in a raster scan system includes the steps of: choosing a predetermined pixel to be calibrated, moving a grid adjacent this pixel, strobing the beam, incrementally moving the beam toward an axis of the grid, and integrating the signal resulting from the beam as the beam moves toward the axis. The steps of strobing the beam, incrementally moving the beam, and integrating the signal are repeated until the beam crosses the axis. The value of the accumulated signals, provided for example by a charge amplifier, is used to determine the relative position of the axis of the grid. The value of the accumulated signals associated with another axis is also determined. The relative positions of the two axes determine the relative location of the grid. If the grid location is known, the location of an associated substrate which is typically adjacent the grid is also known.
Inventors
- 👤 Richard W. Prior
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 10:58
CPC Classifications
G; G01; G01T; G01T1/00; G01T1/29; H; H10; H10P; H10P74/00; H01; H01J; H01J37/00; H01J37/30; H01J37/304; H01J2237/00; H01J2237/245; H01J2237/24507; H01J2237/30; H01J2237/304; H01J2237/30433; H01J2237/3045
Claims Analysis
Total Claims: 45
Claim 1
Independent Claim
94 words
A method of electronically measuring parameters of a beam in a raster scan system comprising the steps of: (a) choosing a predetermined pixel of the raster scan to be calibrated; (b) moving a grid adjacent said pixel; (c) strobing said beam; (d) incrementally moving said beam toward a first axis of said grid; (e) integrating the signal resulting from said beam as said beam moves toward said first axis; and (f) repeating steps (c) through (e) until a predetermined value of said signal is reached, thereby indicating said beam has crossed said first axis.
Claim 2
Independent Claim
94 words
A method of electronically measuring parameters of a beam in a raster scan system comprising the steps of: (a) choosing a predetermined pixel of the raster scan to be calibrated; (b) moving a grid adjacent said pixel; (c) strobing said beam; (d) incrementally moving said beam toward a first axis of said grid; (e) integrating the signal resulting from said beam as said beam moves toward said first axis; and (f) repeating steps (c) through (e) until a predetermined value of said signal is reached, thereby indicating said beam has crossed said first axis.
Claim 3
Dependent Claim
56 words
The method of claim 1 further including the steps of: (g) strobing said beam; (h) incrementally moving said beam toward a second axis of said grid; (i) integrating the signal resulting from said beam as said beam moves toward said second axis; and (j) repeating steps (g) through (i) until said beam crosses said second axis.
Claim 4
Dependent Claim
15 words
The method of claim 1 wherein an amplifier integrates said signal resulting from said beam.
Claim 5
Dependent Claim
23 words
The method of claim 3 further including the steps of: (b1) resetting said amplifier and (b2) setting said amplifier to an integrate mode.
Claim 6
Dependent Claim
22 words
The method of claim 1 wherein step (c) includes unblanking said predetermined pixel for N scans, where N is a predetermined integer.
Claim 7
Dependent Claim
28 words
The method of claim 1 further including the steps of (e1) converting a voltage output from said amplifier to a digital signal and (e2) storing said digital signal.
Claim 8
Dependent Claim
14 words
The method of claim 1 wherein step (a) includes choosing a plurality of pixels.
Claim 9
Dependent Claim
12 words
The method of claim 7 wherein said plurality of pixels are contiguous.
Claim 10
Dependent Claim
14 words
The method of claim 1 wherein said grid includes reflective segments on a substrate.
Claim 11
Dependent Claim
18 words
The method of claim 1 wherein said grid includes at least one scattering mark on a transmissive surface.
Claim 12
Dependent Claim
14 words
The method of claim 1 wherein said raster scan system is a lithographic system.
Claim 13
Dependent Claim
14 words
The method of claim 1 wherein said raster scan system is a metrologic system.
Claim 14
Independent Claim
96 words
A method of electronically measuring parameters of a beam in a raster scan system comprising the steps of: (a) choosing a predetermined plurality of pixels of said raster scan to be calibrated; (b) moving at least one reflective mark adjacent said plurality of pixels; (c) strobing said beam; (d) incrementally moving said beam toward said at least one reflective mark; (e) integrating the signal resulting from said beam as said beam moves toward said at least one reflective mark; and (f) repeating steps (c) through (e) until said beam crosses said at least one reflective mark.
Claim 15
Independent Claim
96 words
A method of electronically measuring parameters of a beam in a raster scan system comprising the steps of: (a) choosing a predetermined plurality of pixels of said raster scan to be calibrated; (b) moving at least one reflective mark adjacent said plurality of pixels; (c) strobing said beam; (d) incrementally moving said beam toward said at least one reflective mark; (e) integrating the signal resulting from said beam as said beam moves toward said at least one reflective mark; and (f) repeating steps (c) through (e) until said beam crosses said at least one reflective mark.
Claim 16
Dependent Claim
12 words
The method of claim 13 wherein said plurality of pixels are contiguous.
Claim 17
Dependent Claim
16 words
The method of claim 13 wherein said beam includes a plurality of beam fingers linearly positioned.
Claim 18
Dependent Claim
18 words
The method of claim 13 wherein said at least one reflective mark includes a plurality of reflective segments.
Claim 19
Dependent Claim
14 words
The method of claim 13 wherein said raster scan system is a lithographic system.
Claim 20
Dependent Claim
14 words
The method of claim 13 wherein said raster scan system is a metrologic system.
Claim 21
Independent Claim
100 words
A method of electronically measuring parameters of a beam in a raster scan system comprising the steps of: (a) choosing a predetermined plurality of pixels of said raster scan to be calibrated; (b) moving at least one scattering mark on a transmissive surface adjacent said plurality of pixels; (c) strobing said beam; (d) incrementally moving said beam toward said at least one scattering mark; (e) integrating the signal resulting from said beam as said beam moves toward said at least one scattering mark; and (f) repeating steps (c) through (e) until said beam crosses said at least one scattering mark.
Claim 22
Independent Claim
100 words
A method of electronically measuring parameters of a beam in a raster scan system comprising the steps of: (a) choosing a predetermined plurality of pixels of said raster scan to be calibrated; (b) moving at least one scattering mark on a transmissive surface adjacent said plurality of pixels; (c) strobing said beam; (d) incrementally moving said beam toward said at least one scattering mark; (e) integrating the signal resulting from said beam as said beam moves toward said at least one scattering mark; and (f) repeating steps (c) through (e) until said beam crosses said at least one scattering mark.
Claim 23
Dependent Claim
12 words
The method of claim 19 wherein said plurality of pixels are contiguous.
Claim 24
Dependent Claim
16 words
The method of claim 19 wherein said beam includes a plurality of beam fingers linearly positioned.
Claim 25
Dependent Claim
18 words
The method of claim 19 wherein said at least one scattering mark includes a plurality of scattering segments.
Claim 26
Dependent Claim
14 words
The method of claim 19 wherein said raster scan system is a lithographic system.
Claim 27
Independent Claim
96 words
A method of electronically measuring parameters of a beam in a vector scan system comprising the steps of: (a) choosing an origin position and a destination position on said vector scan; (b) moving said beam between said origin position and said destination position; (c) unblanking said beam at a predetermined time delay during step (b); (d) repeating steps (b) and (c) for N times, where N is a predetermined integer; (e) incrementally increasing the value of said predetermined time delay; and (f) repeating steps (b) through (e) until said beam has settled at said destination position.
Claim 28
Independent Claim
96 words
A method of electronically measuring parameters of a beam in a vector scan system comprising the steps of: (a) choosing an origin position and a destination position on said vector scan; (b) moving said beam between said origin position and said destination position; (c) unblanking said beam at a predetermined time delay during step (b); (d) repeating steps (b) and (c) for N times, where N is a predetermined integer; (e) incrementally increasing the value of said predetermined time delay; and (f) repeating steps (b) through (e) until said beam has settled at said destination position.
Claim 29
Dependent Claim
14 words
The method of claim 24 wherein said vector scan system is a lithographic system.
Claim 30
Independent Claim
52 words
A system for electronically measuring beam parameters for substrate patterning comprising: means for positioning said substrate; a detector secured to said means for positioning; a grid positioned over said detector; a charge amplifier coupled to said detector; and means for transferring a signal from said charge amplifier to said means for positioning.
Claim 31
Independent Claim
52 words
A system for electronically measuring beam parameters for substrate patterning comprising: means for positioning said substrate; a detector secured to said means for positioning; a grid positioned over said detector; a charge amplifier coupled to said detector; and means for transferring a signal from said charge amplifier to said means for positioning.
Claim 32
Dependent Claim
59 words
The system of claim 26 wherein said charge amplifier comprises: an operational amplifier; a capacitive element coupled in parallel with said operational amplifier; means for switching coupled in parallel with said operational amplifier; an offset adjust coupled in series with said means for switching; and a slope fine adjust coupled between said offset adjust and said means for switching.
Claim 33
Dependent Claim
19 words
The system of claim 27 wherein said detector is coupled to the inverting input terminal of said operational amplifier.
Claim 34
Dependent Claim
21 words
The system of claim 28 wherein a first voltage source is coupled to the non-inverting input terminal of said operational amplifier.
Claim 35
Dependent Claim
25 words
The system of claim 29 wherein said offset adjust and said slope fine adjust are coupled to said inverting input terminal of said operational amplifier.
Claim 36
Dependent Claim
12 words
The system of claim 26 wherein said system is a lithographic system.
Claim 37
Dependent Claim
12 words
The system of claim 26 wherein said system is a metrologic system.
Claim 38
Independent Claim
50 words
A system for electronically measuring parameters of a beam comprising: a substrate having a reflective mark thereon; a detector positioned over said substrate; a charge amplifier coupled to said detector; means for positioning said substrate; and means for transferring a signal from said charge amplifier to said means for positioning.
Claim 39
Independent Claim
50 words
A system for electronically measuring parameters of a beam comprising: a substrate having a reflective mark thereon; a detector positioned over said substrate; a charge amplifier coupled to said detector; means for positioning said substrate; and means for transferring a signal from said charge amplifier to said means for positioning.
Claim 40
Dependent Claim
12 words
The system of claim 33 wherein said system is a lithographic system.
Claim 41
Dependent Claim
12 words
The system of claim 33 wherein said system is a metrologic system.
Claim 42
Independent Claim
51 words
A system for electronically measuring parameters of a beam comprising: a transmissive surface having a scattering mark thereon; a detector positioned under said surface; a charge amplifier coupled to said detector; means for positioning said surface; and means for transferring a signal from said charge amplifier to said means for positioning.
Claim 43
Independent Claim
51 words
A system for electronically measuring parameters of a beam comprising: a transmissive surface having a scattering mark thereon; a detector positioned under said surface; a charge amplifier coupled to said detector; means for positioning said surface; and means for transferring a signal from said charge amplifier to said means for positioning.
Claim 44
Dependent Claim
12 words
The system of claim 36 wherein said system is a lithographic system.
Claim 45
Dependent Claim
12 words
The system of claim 36 wherein said system is a metrologic system.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-09-05 | 1998-03-07 | 1998-09-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-09-05 | 2002-03-07 | 2002-09-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-09-05 | 2006-03-07 | 2006-09-06 | $7700.00 | Window Closed / Lapsed |