Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
112 words
A method for fabricating a one piece three dimensional reusable conformal photomask for use in forming a predetermined pattern on a substantially nonplanar substrate, comprising: forming a rigid shell corresponding to the entire shape of the substantially nonplanar substrate; coating the entire rigid shell with a removable light blocking material; forming multiple images in the light blocking material by repeated image projection, such that portions of the light blocking material corresponding to the predetermined pattern to be formed on the entire substantially nonplanar substrate are removed through at least one removal process, including the removal processes of ablation and chemical removal; and applying a light transmissive material to the light blocking material.
Claim 2
Independent Claim
112 words
A method for fabricating a one piece three dimensional reusable conformal photomask for use in forming a predetermined pattern on a substantially nonplanar substrate, comprising: forming a rigid shell corresponding to the entire shape of the substantially nonplanar substrate; coating the entire rigid shell with a removable light blocking material; forming multiple images in the light blocking material by repeated image projection, such that portions of the light blocking material corresponding to the predetermined pattern to be formed on the entire substantially nonplanar substrate are removed through at least one removal process, including the removal processes of ablation and chemical removal; and applying a light transmissive material to the light blocking material.
Claim 3
Dependent Claim
54 words
A method according to claim 1 wherein the light blocking material ia a metal film and the portions of the metal film are removed by coating the metal film with a photoresist material, imaging the predetermined pattern into the photoresist material, and etching the portions of the metal film corresponding to the predetermined pattern.
Claim 4
Dependent Claim
24 words
A method according to claim 2 wherein the light transmissive material is applied to the light blocking material by a spraying or dipping process.
Claim 5
Dependent Claim
22 words
A method according to claim 2 wherein the light transmissive material is applied to the light blocking material using a thermoforming process.
Claim 6
Dependent Claim
25 words
A method according to claim 1 wherein portions of the light blocking material corresponding to the predetermined pattern are ablated using a coherent light source.
Claim 7
Dependent Claim
26 words
A method according to claim 5 wherein the light blocking material includes a first organic material and the light transmissive film includes a second organic material.
Claim 8
Dependent Claim
37 words
A method according to claim 6 wherein the first organic film is applied to the rigid shell by electrostatic spraying and the second organic film is applied to the first organic film after it has been ablated.
Claim 9
Dependent Claim
108 words
A reusable three dimensional conformal photomask formed in a one piece construction for use in forming a predetermined pattern on a substantially nonplanar substrate, comprising: a light blocking material, formed on a rigid shell corresponding to the shape of the substantially nonplanar substrate, portions of the light blocking material having multiple images formed therein by repeated image projection, such that the portions corresponding to the entire predetermined pattern to be formed on the entire substantially nonplanar substrate can be removed through at least one removal process, including the removal processes of ablation and chemical removal; and a light transmissive material which is applied to the light blocking material.
Claim 10
Dependent Claim
108 words
A reusable three dimensional conformal photomask formed in a one piece construction for use in forming a predetermined pattern on a substantially nonplanar substrate, comprising: a light blocking material, formed on a rigid shell corresponding to the shape of the substantially nonplanar substrate, portions of the light blocking material having multiple images formed therein by repeated image projection, such that the portions corresponding to the entire predetermined pattern to be formed on the entire substantially nonplanar substrate can be removed through at least one removal process, including the removal processes of ablation and chemical removal; and a light transmissive material which is applied to the light blocking material.
Claim 11
Dependent Claim
56 words
A reusable conformal photomask according to claim 8 wherein the light blocking material is a metal film and the portions of the metal film are removed by coating the metal film with a photoresist material, imaging the predetermined pattern into the photoresist material, and etching the portions of the metal film corresponding to the predetermined pattern.
Claim 12
Dependent Claim
26 words
A reusable conformal photomask according to claim 9 wherein the light transmissive material is applied to the light blocking material by a spraying or dipping process.
Claim 13
Dependent Claim
24 words
A reusable conformal photomask according to claim 9 wherein the light transmissive material is applied to the light blocking material using a thermoforming process.
Claim 14
Dependent Claim
27 words
A reusable conformal photomask according to claim 8 wherein portions of the light blocking material corresponding to the predetermined pattern are ablated using a coherent light source.
Claim 15
Dependent Claim
28 words
A reusable conformal photomask according to claim 12 wherein the light blocking material includes a first organic material and the light transmissive film includes a second organic material.
Claim 16
Dependent Claim
39 words
A reusable conformal photomask according to claim 13 wherein the first organic film is applied to the rigid shell by electrostatic spraying and the second organic film is applied to the first organic film after it has been ablated.