Patent US5344676A successfully refreshed from Google Patents.
US5344676A
Expired / Lapsed
US
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Method and apparatus for producing nanodrops and nanoparticles and thin film deposits therefrom
Assignee: University of Illinois System
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Filing: 1992-10-23
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Granted: 1994-09-06
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Expires: 2012-10-23
Abstract
Abstract A method and apparatus for producing nanodrops which are liquid drops with diameters less than one micron and producing therefrom solid nanoparticles and uniform and patterned film deposits. A liquid precursor is placed in an open ended tube within which is a solid electrically conductive needle which protrudes beyond the open end of the tube. Surface tension of the liquid at the tube end prevents the liquid from flowing from the tube. Mutually repulsive electric charges are injected into the liquid through the needle, causing the surface tension to be overcome to produce a plurality of liquid jets which break up into nanodrops.
Inventors
- 👤 Kyekyoon Kim
- 👤 Choon K. Ryu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:55
CPC Classifications
B; B05; B05B; B05B5/00; B05B5/025; B05B5/053; B05B5/0533; B05B5/0536; B05B5/0255; B05B9/00; B05B9/002; B05D; B05D1/00; B05D1/02; B05D1/04
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
156 words
Apparatus for producing nanodrops comprising a. a supply vessel for receiving a liquid precursor, b. a hollow tube communicating at one end thereof with said supply vessel for receiving said liquid precursor therefrom and open at the other end thereof, c. a solid electrically conductive needle electrode positioned within said tube and having a point extending out of said open end of said tube, d. said tube and said needle point having dimensions such that surface tension of said liquid precursor prevents flow of said liquid precursor from said open end of said tube, and e. electrical power means for applying a direct current voltage to said needle whereby charges are injected into said liquid precursor adjacent to said point of said needle causing said surface tension of said liquid precursor to be overcome by the mutually repulsive forces of said injected charges to produce a plurality of charged liquid jets which break up into nanodrops.
Claim 2
Dependent Claim
156 words
Apparatus for producing nanodrops comprising a. a supply vessel for receiving a liquid precursor, b. a hollow tube communicating at one end thereof with said supply vessel for receiving said liquid precursor therefrom and open at the other end thereof, c. a solid electrically conductive needle electrode positioned within said tube and having a point extending out of said open end of said tube, d. said tube and said needle point having dimensions such that surface tension of said liquid precursor prevents flow of said liquid precursor from said open end of said tube, and e. electrical power means for applying a direct current voltage to said needle whereby charges are injected into said liquid precursor adjacent to said point of said needle causing said surface tension of said liquid precursor to be overcome by the mutually repulsive forces of said injected charges to produce a plurality of charged liquid jets which break up into nanodrops.
Claim 3
Dependent Claim
17 words
Apparatus according to claim 1 including a target and means for directing said nanodrops to said target.
Claim 4
Dependent Claim
21 words
Apparatus according to claim 2, wherein said target includes a flat substrate whereby said nanodrops directed thereto form a film thereon.
Claim 5
Dependent Claim
22 words
Apparatus according to claim 2 including means for introducing at least one gas among said nanodrops between said tube and said target.
Claim 6
Dependent Claim
22 words
Apparatus according to claim 4 including means for introducing at least two gases among said nanodrops between said tube and said target.
Claim 7
Dependent Claim
24 words
Apparatus according to claim 3 including a mask between said tube and said target for directing said nanodrops into a pattern on said substrate.
Claim 8
Dependent Claim
24 words
Apparatus according to claim 1 including means for freezing at least a portion of said liquid precursor adjacent said open end of said tube.
Claim 9
Dependent Claim
18 words
Apparatus according to claim 7 including means for thawing at least a portion of said frozen liquid precursor.
Claim 10
Dependent Claim
19 words
Apparatus according to claim 1 including means for adjusting pressure surrounding said nanodrops between said tube and said target.
Claim 11
Dependent Claim
21 words
Apparatus according to claim 4 including means between said tube and said target for removal of said gas from said apparatus.
Claim 12
Dependent Claim
37 words
Apparatus according to claim 4 including means for converting said nanodrops into nanoparticles by introducing a reactive gas among said nanodrops between said tube and said target and wherein said target comprises a collection container for nanoparticles.
Claim 13
Independent Claim
132 words
A method for producing nanodrops comprising a. dissolving at least one base compound in a solvent to produce a liquid precursor, b. positioning within a hollow tube having an open end and a liquid precursor receiving end a solid electrically conductive needle electrode having a point extending out of said open end, said tube and said needle point having dimensions such that surface tension of said liquid precursor prevents flow of said liquid precursor from said open end, c. feeding said liquid precursor into said liquid precursor receiving end, and d. injecting mutually repulsive charges into said liquid precursor adjacent said open end such that mutually repulsive forces of said charges overcome said surface tension of said liquid precursor to produce a plurality of charged liquid jets which break up into nanodrops.
Claim 14
Independent Claim
132 words
A method for producing nanodrops comprising a. dissolving at least one base compound in a solvent to produce a liquid precursor, b. positioning within a hollow tube having an open end and a liquid precursor receiving end a solid electrically conductive needle electrode having a point extending out of said open end, said tube and said needle point having dimensions such that surface tension of said liquid precursor prevents flow of said liquid precursor from said open end, c. feeding said liquid precursor into said liquid precursor receiving end, and d. injecting mutually repulsive charges into said liquid precursor adjacent said open end such that mutually repulsive forces of said charges overcome said surface tension of said liquid precursor to produce a plurality of charged liquid jets which break up into nanodrops.
Claim 15
Dependent Claim
18 words
A method in accordance with claim 12, further comprising freezing said liquid precursor and thawing a portion thereof.
Claim 16
Independent Claim
139 words
A method for producing nanodrops comprising a. dissolving at least one base compound in a solvent to produce a liquid precursor, b. positioning within a hollow tube having an open end and a liquid precursor receiving end a solid electrically conductive needle electrode having a point extending out of said open end, said tube and said needle point having dimension such that surface tension of said liquid precursor prevents flow of said liquid precursor from said open end, c. feeding said liquid precursor into said liquid precursor receiving end, d. injecting mutually repulsive charges into said liquid precursor adjacent said open end such that mutually repulsive forces of said charges overcome said surface tension of said liquid precursor to produce a plurality of charged liquid jets which break up into nanodrops, and e. directing said nanodrops to a target.
Claim 17
Independent Claim
139 words
A method for producing nanodrops comprising a. dissolving at least one base compound in a solvent to produce a liquid precursor, b. positioning within a hollow tube having an open end and a liquid precursor receiving end a solid electrically conductive needle electrode having a point extending out of said open end, said tube and said needle point having dimension such that surface tension of said liquid precursor prevents flow of said liquid precursor from said open end, c. feeding said liquid precursor into said liquid precursor receiving end, d. injecting mutually repulsive charges into said liquid precursor adjacent said open end such that mutually repulsive forces of said charges overcome said surface tension of said liquid precursor to produce a plurality of charged liquid jets which break up into nanodrops, and e. directing said nanodrops to a target.
Claim 18
Dependent Claim
22 words
A method in accordance with claim 14, wherein the breaking up into nanodrops takes place in an atmosphere having a controlled pressure.
Claim 19
Dependent Claim
17 words
A method in accordance with claim 14 comprising reacting said nanodrops with a gas to produce nanoparticles.
Claim 20
Dependent Claim
14 words
A method in accordance with claim 14 comprising decomposing said nanodrops to produce nanoparticles.
Claim 21
Dependent Claim
18 words
A method in accordance with claim 14 comprising directing said nanodrops through a patterned mask to said target.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-09-05 | 1998-03-07 | 1998-09-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-09-05 | 2002-03-07 | 2002-09-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-09-05 | 2006-03-07 | 2006-09-06 | $7700.00 | Window Closed / Lapsed |